Agilent Technologies 5977B Series Operating Manual page 142

5 Operating in CI Mode
Table 15
MFC
(%)
10
15
20
25
30
35
40
Familiarize yourself with the measurements on your system under operating
conditions and watch for changes that may indicate a vacuum or gas flow
problem. Measurements will vary by as much as 30% from one MSD and gauge
controller to the next.
142
MFC settings and typical pressure readings
Pressure (Torr)
Methane
EI/PCI/NCI MSD 
(Turbo pump)
10
–5
5.5 ×
10
–5
8.0 ×
10
–4
1.0 ×
10
–4
1.2 ×
1
–4
1.5 ×
10
–4
2.0 ×
10
–4
2.5 ×
Ammonia
EI/PCI/NCI MSD 
(Turbo pump)
–5
5.0 × 10
–5
7.0 × 10
–5
8.5 × 10
–4
1.0 × 10
–4
1.2 × 10
–4
1.5 × 10
–4
2.0 × 10
5977B Series MSD Operating Manual
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