7
CI Maintenance
To Install a CI Source Filament
Materials needed
• Filament assembly, 2-pk, CI (G7005-60072)
• Gloves, clean, lint-free (Large 8650-0030) (Small 8650-0029)
• Tweezers (8710-2460)
Procedure
1 Remove the old filament. (See
2 Place the new filament into its position on the ion source body. (See
3 Secure the filament to the ion source body with the screw. (See
4 After installing the filament, verify that it is not grounded to source body.
5 Reinstall the CI source. (See
6 Pumpdown the MSD. (See
7 Autotune the MSD.
224
page 223.)
Figure 73
on page 223.)
page 223.)
"General Information"
"To Remove the CI Source Filament"
"To Install the CI Source"
on page 198.)
"To Pumpdown the MSD"
5977B Series MSD Operating Manual
on
Figure 73
on page 225 or
on page 116.)
on