Non-Coaxial Measurements - HP 8753E User Manual

Non-coaxial Measurements

The capability of making non-coaxial measurements is available with the HP 8753 family of
analyzers with TRL* (thru-reflect-line) or LRM* (line-reflect-match) calibration. For in-depth
information on TRL*/LRM* calibration, refer to Chapter 6, "Application and Operation
Concepts. n
Non-coaxial, on-wafer measurements present a unique set of challenges for error correction in
the analyzer:
of isolation between the input and the output.
The type of device measured on-wafer is often not always a simple two-port.
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pads
Due to the simplicity of the calibration standards, TRL* or LRM+ calibrations may be used
for non-coaxial applications such as on-wafer measurements. This type of calibration with
time domain gating and a variety of probe styles can provide optimal accuracy in on-wafer
measurements. At frequencies where on-wafer calibration standards are available, short,
open, load, thru (SOLI') calibrations can also be done and may be preferred due to the better
accuracy of the SOI. calibration method.
For information on how to perform TRL* or LRM* calibrations, refer to the section "TRL+ and
Making Measurements 2-81