Troubleshooting; Troubleshooting (1) Basic Trouble - EBARA A70W Instruction Manual

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8 Troubleshooting

8.1 Troubleshooting (1) Basic Trouble

Abnormal symptom
Circuit breaker is activated.
(Leakage detector is on.)
Power LED does not come
on.
Nothing appears on LCD.
Display is abnormal.
MP does not start when
pressing START button.
MP does not start when
applying START signal.
BP does not start.
Abnormal noise.
Excessive vibration.
Vacuum pressure increase.
Interrupt Earth Leakage Breaker (ELB) or CB and lock out power
WARNING
before starting on wiring and maintenance work.
Do not switch on the power supply to the pump until work is
completed.
The pump casing and exhaust piping become extremely hot during
WARNING
operation and for some time after stopping.
Keep pump and exhaust piping away from contact with personnel and
flammable substances.
Do not remove the pump cover during operation.
Check for gas leaks after installing and maintaining the piping.
WARNING
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air into
the pump
Check Item
Incorrect wiring
Ground fault
Short circuit
No power supply to pump
Connector is not connected
ELB is not mode ON
ELB is not mode ON
Instruments are in failure
Mode is set in "Remote"
Start-up conditions are not satisfied
("STARTFAIL" is displayed)
Instruments are in failure
Mode is set in "Local"
Mode is set in "Alternate"
(Pump jogs)
Instruments are in failure
Leakage on vacuum piping
MP insufficient vacuum
BP start signal is not applied
Instrument failure
Adjuster foot is not lowered
Cover is in contact with other items
Cover screws loose
Pump part is damaged
Byproducts settled in piping
N pressure setting is high
2
Leakage from vacuum piping
Byproducts settled in pump
Corrective Action
Check wiring
Replace or overhaul pump
Replace or overhaul pump
Check power supply
Connect power connector
Switch ELB ON
Switch ELB ON
Replace instruments
Set switch to "Local" mode
Satisfy all start-up conditions
Replace instruments
Set switch to "Remote" mode
Apply "Alternate" start signal
Set to "Momentary" mode
Replace instruments
Check piping
Replace or overhaul
Apply BP start signal
Replace instruments
Properly set all adjuster feet
Remove objects from cover
Tighten mounting screws
Replace or overhaul pump
Clean up piping
Set pressure for correct value
Check piping
Replace or overhaul pump
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