Cooling Water Requirements; Nitrogen Purge Piping; Nitrogen Supply Requirements - EBARA 80?25 Installation Operation & Maintenance

EBARA Multi-Stage Dry Vacuum Pumps
1. Open the control panel.
2. Gradually reducing the flow of cooling water until the LED on the delay timer
comes on.
3. When the light comes on, stop reducing the flow and check the flow meter for
the actual flow.
4. Check this value against the setting. Adjust the as needed, and recheck again
by reducing the flow until the LED comes on.
CAUTION
!
Use industrial water for cooling. The use of de-ionized water may cause
corrosion of the pump internal parts. If de-ionized water is used, stainless steel
plumbing is required. Use of a filter before the pump inlet is recommended. If
the ambient temperature is expected to drop below freezing, and the pumps are
not expected to be run, blow out all water from the pumps with compressed air.
3.3.1

Cooling Water Requirements:

Flow: Motor and module:
Gas coolers:
Water flow less than 1 liter per minute to coolers will cause cooler corrosion.
Pressure (Operating)
Inlet - Outlet Differential
Temperature (max)
Connections:
3.4

Nitrogen Purge Piping

A Nitrogen gas purge is used for labyrinth seal purge and gas dilution. The flow rates to
the individual stages have been preset at Ebara by factory personnel and should not be
adjusted in the field.
3.4.1

Nitrogen Supply Requirements

Supply Pressure:
Regulated Pressure:
Connections:
Flow:
Excluding exhaust gas dilution, if applicable. (Process & Pump Specific. See
Attachments in the back of the book.)
930601-P
5.0-8.0 lpm
0.8-1.2 lpm
<4 kgf/cm2
1.0-2.0 kgf/cm2
30°C
3/8: NPT Female
(See "50x20 Specifications".)
1.0-7.0 kgf/cm2
.9-1.1 kgf/cm2
1/4 inch tube
5.0 - 8.0 lpm
1.3-2.1 gpm
0.21-0.32 gpm
60 psi
14-28 psi
86°F
14-100 psi
14-21 psi
.2 - .3 cfm
Installation
14