Table Of Contents - EBARA 80?25 Installation Operation & Maintenance

Multi-stage dry vacuum pumps
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EBARA Multi-Stage Dry Vacuum Pumps
1.0
Safety ................................................................................................................... 1
1.1
User Obligations to Safety ......................................................................... 1
1.1.1 Electrical Grounding........................................................................ 1
1.1.2 Exhaust Venting.............................................................................. 1
1.2
Safety Labels ............................................................................................. 1
1.3
Hazard Icons.............................................................................................. 2
2.0
Product Overview ................................................................................................. 4
2.1
Summary of Requirements ........................................................................ 4
2.1.1 Nitrogen Flow .................................................................................. 4
2.1.2 Cooling Water ................................................................................. 4
2.1.3 Lubricating Fluid.............................................................................. 4
2.1.4 Pump Overhaul ............................................................................... 5
2.2
80X25 ........................................................................................................ 7
2.2.1 80x25 Specifications ....................................................................... 7
2.2.2 80x25, Side View ............................................................................ 8
2.2.3 80x25, Gear End............................................................................. 9
2.2.4 80x25, Motor End.......................................................................... 10
2.2.5 80x25, Top View ........................................................................... 11
3.0
Installation .......................................................................................................... 12
3.1
Unpacking and Initial Positioning ............................................................. 12
3.1.1 Pump Location .............................................................................. 12
3.1.2 Leveling Pads ............................................................................... 12
3.1.3 Shipping Hardware........................................................................ 12
3.1.4 Lubricating Fluid Reservoirs.......................................................... 12
3.2
Vacuum Piping......................................................................................... 13
3.3
Water Piping ............................................................................................ 13
3.3.1 Cooling Water Requirements:....................................................... 14
3.4
Nitrogen Purge Piping.............................................................................. 14
3.4.1 Nitrogen Supply Requirements ..................................................... 14
3.5
Electrical Connections ............................................................................. 15
3.5.1 Control Panel ................................................................................ 15
3.6
Initial Check ............................................................................................. 16
4.0
Operation............................................................................................................ 17
4.1
Safety Issues ........................................................................................... 17
4.2
Pre-Start Check ....................................................................................... 17
4.2.1 Initial Positioning ........................................................................... 17
4.2.2 Lubricating Fluid Reservoirs.......................................................... 17
4.2.3 Vacuum Piping.............................................................................. 17
4.2.4 Cooling Water ............................................................................... 18
4.2.5 Nitrogen Purge .............................................................................. 18
4.3
Start-Up & Trial Run ................................................................................ 18
4.4
Auto Mode ............................................................................................... 19
4.5
Manual Operation .................................................................................... 19
5.0
Pump Maintenance ............................................................................................ 20
5.1
Safety Issues ........................................................................................... 20
930601-P

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