EBARA Multi-Stage Dry Vacuum Pumps
1.0
Safety ................................................................................................................... 1
1.1
1.2
Safety Labels ............................................................................................. 1
1.3
Hazard Icons.............................................................................................. 2
2.0
Product Overview ................................................................................................. 4
2.1
2.1.1 Nitrogen Flow .................................................................................. 4
2.1.2 Cooling Water ................................................................................. 4
2.1.4 Pump Overhaul ............................................................................... 5
2.2
80X25 ........................................................................................................ 7
3.0
Installation .......................................................................................................... 12
3.1
3.1.1 Pump Location .............................................................................. 12
3.1.2 Leveling Pads ............................................................................... 12
3.2
Vacuum Piping......................................................................................... 13
3.3
Water Piping ............................................................................................ 13
3.4
3.5
3.5.1 Control Panel ................................................................................ 15
3.6
Initial Check ............................................................................................. 16
4.0
Operation............................................................................................................ 17
4.1
Safety Issues ........................................................................................... 17
4.2
Pre-Start Check ....................................................................................... 17
4.2.3 Vacuum Piping.............................................................................. 17
4.2.4 Cooling Water ............................................................................... 18
4.2.5 Nitrogen Purge .............................................................................. 18
4.3
Start-Up & Trial Run ................................................................................ 18
4.4
Auto Mode ............................................................................................... 19
4.5
Manual Operation .................................................................................... 19
5.0
Pump Maintenance ............................................................................................ 20
5.1
Safety Issues ........................................................................................... 20
930601-P
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