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Table of Contents
Troubleshooting
Related Manuals for EBARA A70W
Summary of Contents for EBARA A70W
- Page 1 Doc. No. 7313-L4602B Rev. 3B INSTRUCTION MANUAL MULTI-STAGE DRY VACUUM PUMP A70W (A70W-S, A70W-C) A30W (A30W-S, A30W-C) A25S (A25S-S) A10S (A10S-S) A07V (A07V-S) Distribute this Instruction Manual to all end user personnel operating the equipment. ISSUED BY PRECISION MACHINERY GROUP...
- Page 2 Do not reproduce or reprint any portion of this manual without permission. Manufacturer reserves the right to discontinue or change any specifications or designs without notice and without incurring obligations. All rights reserved, copyright EBARA Corporation.
- Page 3 Measurement low. 27-Apr-01 ETI release of EC Rev 3 per ECO 5394. June 2002 Add UL grounding Third-party note marking Add LCD “hot Third-party surface” note marking Add appendices SEMI S2 Thruout Language Edit ECO 5771 EBARA Corporation...
- Page 4 Before installation and operation, the operator first should have a thorough knowledge of the pump’s construction, operating procedures, and hazards. The operator should read this instruction manual and other documents issued by EBARA. If you have any questions on pump operation, safety, or maintenance, please do not hesitate to contact EBARA directly.
- Page 5 Replace o-rings as required to correct leaks. See Appendix 4. Do not modify the pump or any of its parts without EBARA's WARNING approval. EBARA Corporation...
- Page 6 Dispose of printed circuit boards containing lithium batteries in CAUTION strict accord with all applicable local and national environmental regulations. The height of EBARA dry pumps may place the EMO button and CAUTION the LCD controller below the heights recommended in SEMI S8-95. See Appendix 3.
- Page 7 Turn power off and lockout before servicing. Hazardous materials warning (Applies only when pumping hazardous materials) Run the pump only with N gas purge before servicing. Take adequate measures against dangerous reaction and contact with human body. Electric charge mark EBARA Corporation...
- Page 8 (vi) Hazardous weight danger Heavy weight may cause severe injury or death due to overturning or falling pump. Keep out from under the lifted pump. Raise all adjuster feet fully when moving. EBARA Corporation...
- Page 9 (vii) EBARA Corporation...
- Page 10 (viii) EBARA Corporation...
- Page 11 (ix) EBARA Corporation...
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Page 12: Table Of Contents
Operation ..................... 30 5.2.1 Local (Pump side) Operation ............31 5.2.2 Remote (Distant) Operation............31 Maintenance and Overhaul................... 32 Routine Inspection ..................32 Piping Maintenance..................33 Lubricant Oil ....................33 Spare (Maintenance) Parts List ..............34 Overhaul ....................... 35 EBARA Corporation... - Page 13 Appendices 1. Material Safety Data Sheet – Vacuum Pump Oil..........I 2. Safety Interlocks ....................III 3. Ebara Dry Pumps and SEMI S2-93A (S2-0200)..........V 4. Leak Check Procedure ..................VI 5. Returning pumps for Rebuild in U.S..............VII EBARA Corporation...
- Page 14 (xii) [Blank page] EBARA Corporation...
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Page 15: Foreword
1 Foreword We appreciate your selection of an EBARA A Series dry vacuum pump. EBARA has manufactured this pump with much care and attention to permit safe and satisfactory operation. Incorrect operation will result in lack of performance and may cause accidents and injuries to personnel. -
Page 16: Product Description
Adjusting the regulation pressure to the specified value supplies the correct amount of N gas for these two types of purge operation. The pumps of this series are equipped with a dilution N gas control valve. Consult EBARA before adjusting the N gas supply to the appropriate level for specific conditions of use. -
Page 17: Warning
The pump will stop automatically and generate a TRIP signal output if a parameter approaches a mechanical safety limit. Contact EBARA Corporation for details on checking the ALARM and TRIP setting conditions. 3.2.2 Operation Status Control To facilitate operation status control and daily inspection, the LCD controller displays the sensor data. -
Page 18: Moving Method
A70W Outline Drawing 2 A30W Outline Drawing 3 A25S Outline Drawing 4 A10S Outline Drawing 5 A07V Figure 3.1 Performance Curve (A70W, A30W) Figure 3.2 Performance Curve (A25S, A10S) Figure 3.3 Performance Curve (A07V) Figure 3.4 System Flow EBARA Corporation... - Page 19 Table 3.1 Specification (A70W, A30W) Model A70W A30W Pumping Speed (50 / 60Hz) 7000 / 8400 L/min 3000 / 3600 L/min Ultimate Pressure (50 / 60Hz) 0.27 / 0.13 Pa 0.4 / 0.27 Pa Gas Inlet NW50 Connection Gas Outlet...
- Page 20 ** Numerals in brackets [ ] are flow rate in dilution-0 mode. [Note] Approximate flow rate of N gas shows a necessary total amount for seal N dilution N LCD controller displays only the flow rate of dilution N EBARA Corporation...
- Page 21 EBARA Corporation...
- Page 22 EBARA Corporation...
- Page 23 EBARA Corporation...
- Page 24 (10) EBARA Corporation...
- Page 25 (11) EBARA Corporation...
- Page 26 (12) [50Hz] 100000 10000 A70W A70W A30W 1000 A30W [Pa] [60Hz] 100000 10000 A70W A70W A30W 1000 A30W [Pa] Figure 3.1 Performance Curve (A70W, A30W) EBARA Corporation...
- Page 27 (13) [50Hz] 100000 10000 A25S 1000 A10S [Pa] [60Hz] 100000 10000 A25S 1000 A10S [Pa] Figure 3.2 Performance Curve (A25S, A10S) EBARA Corporation...
- Page 28 (14) [50Hz] 100000 10000 1000 A07V [Pa] [60Hz] 100000 10000 1000 A07V [Pa] Figure 3.3 Performance Curve (A07V) EBARA Corporation...
- Page 29 Booster Pump Water Motor 2 Dilluting N2 Gas Flow Sensor (BP) Gas Outlet Main Pump Motor 1 Cooling Water Flow Sensor (MP) Check Valve [NOTE] A25S, A10S and A07V do not have a booster pump. Figure 3.4 System Flow EBARA Corporation...
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Page 30: Installation
The difference in height between the two sides of the pump base shall not exceed 1mm. The adjustment allowance is approximately 15 mm. [NOTE] An unleveled pump may generate an OIL LEVEL LOW ALARM. Failure to use adjustment feet will increase floor vibrations. [NOTE] EBARA Corporation... -
Page 31: Piping
Support the piping properly and do not apply excessive force to align flange faces. e) EBARA recommends the insertion of a flexible bellows between the piping and the suction and exhaust flanges of the pump. Length of the flexible bellows on the suction side will vary according to the vacuum drawn. - Page 32 In humid locations, allowing the cooling water to run when the CAUTION pump is stopped will lead to condensation on parts of the pump. If droplets appear on the outside of the water tubes when the pump is not running, cut off water flow. EBARA Corporation...
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Page 33: N 2 Gas Piping
Without proper ventilation, the temperature inside the cover may rise, causing an ALARM. The pump does not have a gas leak detector. For hazardous gases, EBARA recommends installing a gas leak detector, interlocked to gas flow, in the ventilation duct piping. -
Page 34: Electrical Wiring
Power Supply Receptacle Phase Ｄ Ｃ Ｂ Figure 4.4 Power Supply Receptacle Ground (As seen from connecting side) Table 4.3 Receptacle Specifications Pump Model A70W A30W A25S A10S A07V Receptacle Japan Aviation Electronics Industry Co., Ltd. manufacturer Receptacle type MS3102A 22-22P... -
Page 35: Control Signal Wiring
Apply a voltage not exceeding 50V DC on the equipment side. Wire signals with correct polarity CAUTION (SIGNAL/COMMON). When output signals energize an inductive load, such as a CAUTION relay, insert a diode (100V. 1A class) to absorb the back electromotive force from surge currents. EBARA Corporation... - Page 36 Emergency Stop 1. Insert a diode (100V / 1A class) when Switch [ OPTION ] connecting inductive load by output signal. 2. Do not connect wiring to opened pins. It may cause malfunction. Figure 4.6 Control Signal Wiring EBARA Corporation...
- Page 37 Pin No. 8 (Emergency Stop Switch) output remains OFF until the switch is closed and a RESET signal is entered. *4 Dipswitch No.2 selects observation of cooling water and N gas flow as “always” or “operating period only.” EBARA Corporation...
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Page 38: Operation Mode
*6 Pins No. 2 (BP Start), 5 (BP Stop), 12 (BP Operation), 29 (BP Motor Temp.), 31 (BP Overload), 42 (BP Current) apply to Models A70W and A30W. Only Model A07V uses Pin No. 45 (Bearing Temperature). - Page 39 Default factory settings at time of shipment are: Data Length = 8 bits, always observation, buzzer in use, according to signal, alternating signal, with dilution mode, BP automatic operation, and Local operation. Refer to Figure 4.7. Figure 4.7 Switch Settings Switch Rotary Switch Toggle LOCAL Switch REMOTE Power RS232C Port EBARA Corporation...
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Page 40: Operation
Dipswitch No. 7 Selector Valve CLOSED OPEN [NOTE] gas flow requires several seconds to stabilize after opening valve. [NOTE] During regular operation, open dilution N gas selector valve except for processes that are non-corrosive and do not produce reaction byproducts. EBARA Corporation... - Page 41 Ensure cooling water flow is 3.5 L/min or more. Readjust regulator so that dilution N gas is within the range described below. Table 5.1 Dilution N gas flow A70W 20-24 Pa m3/s A30W 15-19 Pa m3/s A25S 14-17 Pa m3/s...
- Page 42 DISP. SELECT： Change LCD indication RESET： Reset ALARM and TRIP BUZZER OFF： Mute buzzer in ALARM / TRIP [LED] B.P. RUN： BP running M.P. RUN： MP running LOCAL： LOCAL mode ALARM： ALARM condition TRIP： TRIP condition ERROR： Microprocessor malfunction EBARA Corporation...
- Page 43 Lower row " $$$$$$ " shows value of parameter that caused ALARM / TRIP. Display defaults to No. 2 (Motor Current) when buttons on LCD controller are not operated for one minute. "DISP. SELECT" scrolls the display in order. It will display progressively all present ALARM/TRIP’s. EBARA Corporation...
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Page 44: Operation
In service observation mode “Always,” cooling water and dilution N [NOTE] ALARMs can occur when the pump is stopped. The pump will not start while an ALARM/TRIP signal remains active. [NOTE] Pressing START button will bring STARTFAIL to the display. EBARA Corporation... -
Page 45: Local (Pump Side) Operation
4000 Pa. Stop [Alternating signal mode] Turn MP START signal off, both MP and BP stop. [Momentary (Pulse) signal mode] Input external MP STOP signal, both MP and BP stop. EBARA Corporation... -
Page 46: Maintenance And Overhaul
In the REMOTE operating mode, when a TRIP signal has occurred, CAUTION interrupt the external start signal before beginning maintenance. If the external ALTERNATE start signal is present, the pump will start as soon as the TRIP is RESET. EBARA Corporation... -
Page 47: Piping Maintenance
Material Safety Data Sheet (Appendix 1). Upon an OIL LEVEL LOW ALARM or whenever the lubricant oil needs replenishing, fill the oil chamber and drain the oil that has collected in the secondary reservoir. EBARA Corporation... -
Page 48: Spare (Maintenance) Parts List
20 L/min CER90-6018 942020 Pump gas flow sensor (seal) 3.4 Pam3/s CER90-6012 flow sensor 84.4 Pam3/s CER90-6017 ----- T/C bolt T TYPE, M8 CER90-6035 913046 gas pressure regulator R31-200-C121 CER01-4420 980086 (EC: EBARA CORPORATION; ETI: EBARA TECHNOLOGIES INCORPORATED) EBARA Corporation... -
Page 49: Overhaul
HAZARDOUS VOLTAGE WARNING CER90-9115 321868 [WARNING] HIGH TEMPERATURE WARNING CER90-9113 321866 [WARNING] HAZARDOUS MATERIAL WARNING CER90-9116 321869 [CAUTION] CHARGE MARK CER90-9112 321865 6.5 Overhaul Properly trained personnel should perform overhaul work. Contact EBARA sales office or overhaul service center. EBARA Corporation... -
Page 50: Removal And Transportation
(36) 7 Removal and Transportation When a pump exhausts highly toxic gases such as arsenic and WARNING mercury compounds, contact EBARA Corporation before you return the pump. In the interest of safety during the transportation, disassembly and CAUTION cleaning of the pump, take note of the gases that it has pumped. - Page 51 Route the sling to avoid damaging any options, such as an interface box, mounted on the pump. To transport an uncrated pump, lower the adjustment feet. Place a protective cloth around the pump and use protective members between the outer cover and the tie down straps to distribute the strap load. EBARA Corporation...
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Page 52: Troubleshooting
Do not remove the pump cover during operation. Check for gas leaks after installing and maintaining the piping. WARNING Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the admission of air into the pump EBARA Corporation... -
Page 53: Troubleshooting (2) Alarm
ALARM: BP-GEAR BP gear side oil level Decrease of oil Fill the lubricating oil OIL LEVEL LOW Insufficient sealing N Check sealing N ALARM Pump is inclined Level the pump with ALARM: BP-MOTOR BP motor side oil adjuster feet EBARA Corporation... - Page 54 Do not remove the pump cover during operation. Check for gas leaks after installing and maintaining the piping. WARNING Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the admission of air into the pump EBARA Corporation...
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Page 55: Troubleshooting (3) Trip
Do not remove the pump cover during operation. Check for gas leaks after installing and maintaining the piping. WARNING Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the admission of air into the pump. EBARA Corporation... -
Page 56: Troubleshooting (4) Trip [Options]
Do not remove the pump cover during operation. Check for gas leaks after installing and maintaining the piping. WARNING Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the admission of air into the pump EBARA Corporation... -
Page 57: Inquiries
( 43) 9 Inquiries For all inquiries and queries in connections with any of the details given in this Operating Instruction Manual or the pump in general, please contact EBARA Corporation directly with pump model and serial number. 9.1 North America EBARA TECHNOLOGIES, INC. -
Page 58: Asia
Precision Machinery Group Nissay Aroma Square 5-37-1 Kamata Ohta-Ku, Tokyo 144-8721 Japan Phone: 81-3-5714-6111 Fax: 81-3-5714-6081 (2) Korea EBARA Precision Machinery Korea, Inc. 15 FL, Kangnam Bldg. 1321 Seocho-Dong, Seocho-Ku, Seoul, Korea Phone: 82-2-581-6901 Fax: 82-2-581-4211 (3) Taiwan EBARA Densan (TED) No. -
Page 59: Europe
( 45) 9.3 Europe (1) United Kingdom EBARA Corporation Scotland Branch 3 & 4 Adam Square-Brucefield Industrial Estate Livingston, G-8West Lothian, EH54 9DE U.K. Phone: 44-1509-460232 Fax: 44-1506-460222 (2) Germany EBARA Germany GmbH Donaustabe 7, D-63452 Hanau, Germany Phone: 49-16181-1876-0 Fax: 49-1618¥1-1876-40... - Page 60 (46) [Blank Page] EBARA Corporation...
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Page 61: Material Safety Data Sheet Vacuum Pump Oil
=========================================================================== Flash Point: NONE Special Fire Fighting Proc: KEEP CONTAINERS COOL BY SPRAYING W/WATER WHEN EXPOSED TO FIRE, IF FLAMES HAVE REACHED THE PRODUCT CAUSING A POSSIBLE DECOMPOSITON YIELDING, USE SCBA. Unusual Fire And Expl Hazrds: NONE =========================================================================== EBARA Corporation... - Page 62 Label Status: G Common Name: FOMBLIN Y-LVAC 25/6 Special Hazard Precautions: N/K N/K Label Name: INLAND VACUUM INDUSTRIES INC Label Street: 35 HOWARD AVE Label P.O. Box: 373 Label City: CHURCHVILLE Label State: NY Label Zip Code: 14428 EBARA Corporation...
- Page 63 (III) Label Country: US Label Emergency Number: 716-293-3330 EBARA Corporation...
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Page 64: Safety Interlocks
Safety Interlocks In compliance with SEMI S2, Safety Guidelines for Semiconductor Manufacturing Equipment, EBARA A Dry Vacuum pumps include a set of safety interlocks, which shut down the pump upon detecting a violation of "safe" condition. The following interlocks are standard equipment on all A Series Pumps: Emergency Off (EMO): A manually activated button breaks a low-voltage control circuit that, in turn, interrupts line power. - Page 65 Cabinet Exhaust Flow Sensor and Liquid Leak Sensor: Strict compliance with SEMI S2-93A (and S2-0200) requires a cabinet exhaust flow interlock and a leak detector. Most customers find incorporating these features, as needed, into facilities sensors is more economical than including the capability with each individual pump. See Appendix 3. EBARA Corporation...
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Page 66: Ebara Dry Pumps And Semi S2-93A (S2-0200)
Should your vacuum pump application require frequent manual operation of the controls, you may contact your sales representative or the nearest EBARA office for assistance in mounting the controls at a convenient height. - Page 67 (“sniffer”) of a mass spectrometer leak detector around all joints, seals and fittings. Realign joints, tighten fittings, replace seals, etc. Repeat as necessary to eliminate all leaks. Disconnect helium supply and place system in operating condition. EBARA Corporation...
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Page 68: Returning Pumps For Rebuild In U.s
• Tag or label equipment stating the possible hazardous material and/or the environment in which it was used. • Obtain an RMA number from the EBARA Service department and post on all bags, containers, and packing list along with a copy of the Environmental Health & Safety Clearance Form. - Page 69 (IX) [Blank Page] EBARA Corporation...