Sublimator Cleaning; Removing The Sublimator; Reinstalling The Sublimator - EBARA 80?25 Installation Operation & Maintenance

EBARA Multi-Stage Dry Vacuum Pumps
Test No. 2
1. With the pump off, blank off the inlet.
2. Attach a blank flange to the exhaust with a pressure gauge on it.
3. Allow a small amount of Nitrogen gas into the pump, approximately 1.1-1.4
kgf/cm2 (15 - 20 psi).
4. Watch for the needle on the pressure gauge to go down. If it does, there is a
leak. Find and fix the leak.
These simple leak tests are designed to identify leaks that are sometimes present after
cleaning the coolers. These tests do not take the place of the standard leak against
time test, or of a quality test, done with a Helium leak detector.

5.12 Sublimator Cleaning

Sublimators are provided as an optional for Aluminum Etch processes. The sublimator
should be examined after months of service to gauge the level of chemical build-up. A
pressure gauge is provided to monitor increases in the exhaust line pressure--the
section of pipe between the final cooler and the sublimator. A pressure increase of as
2
little as 0.2 kg/cm (3 psi) from the initial operation pressure is an indication of chemical
build-up.
If the sublimator is equipped with a by-pass valve, the sublimator can be removed while
the pump is running.
5.12.1

Removing the Sublimator

1. Open the bypass valve
2. Close and disconnect both the inlet and outlet valves to the sublimator.
3. Disconnect the water lines
4. Remove the sublimator.
5. Clean the sublimator by soaking it is water for 2-3 hours under a hood. Thoroughly
dry the cleaned sublimator in an over before reinstallation.
5.12.2

Reinstalling the Sublimator

6. Reconnect the water lines
7. Reconnect and open both the inlet and outlet valves to the sublimator.
8. Open the bypass valve.
930601-P
Pump Maintenance
40