Cooling Water; Nitrogen Purge; Start-Up & Trial Run - EBARA 80?25 Installation Operation & Maintenance

EBARA Multi-Stage Dry Vacuum Pumps
where necessary.
See "Vacuum Piping".
4.2.4

Cooling Water

Turn on the water flow and check for proper flow and pressure.
• Check for any leaks.
• If equipped, set cooling flow through the coolers at 1 lpm.***
• Set total cooling water flow through the pump at 5-8 lpm.***
***These are interactive adjustments: adjusting one will affect the other. Be sure to
recheck both settings when making adjustments.
See "Cooling Water Requirements:".
4.2.5

Nitrogen Purge

Turn on the Nitrogen flow and check for proper flow and pressure.
• Set the pressure regulators on the pump to 1 kg/cm
• Open the flow meter control valve to wide open. Check for proper flow. Some
pumps are equipped with two Nitrogen flow meters. One meter is for the pump
module. The other meter is for exhaust gas dilution and is process dependent.
See "Nitrogen Supply Requirements".
4.3 Start-Up & Trial Run
NOTICE
!
It is preferred that the initial startup be performed by Ebara service personnel or
their authorized representative.
Proceed with the following only after having completed the Prestart Check.
1. Open all exhaust valves.
2. Close all inlet valves.
3. Energize the control panel: turn on the power at the main breaker.
4. Set the Auto/Manual switch to Manual to control the pump from the control
panel.
5. Momentarily "bump" the pump to check for proper motor rotation.
See "Initial Check"
6. Turn the pump on.
After 30 minutes of operation:
7. Record the base pressure.
This is the initial operating base pressure. Compare this with the pump specification (See
"80x25 Specifications".) If the pump fails to reach the spec. In the 30 minutes of
operation, allow another 30 minutes and recheck the pressure. Of the pump still fails to
reach the spec., contact your Ebara Service Center. (See "Service Centers".)
8. Record the running motor current for the pump.
930601-P
2
(14.2 psi).
Operation
18