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EBARA Multi-Stage Dry Vacuum Pumps
f.
Nitrogen Flow.
g.
Nitrogen Pressure.
h.
Temperature Monitor (if equipped)
5.3
Other Periodic Maintenance
5.3.1
Lubricating Fluid Change
The lubricating fluid should be changed every six months or when discoloration is
noticed, whichever occurs first. See "Refilling or Replacing the Lubricating Fluid" on
page30.
5.3.2
Complete Pump Overhaul
Depending on the process, a complete pump overhaul is recommended every 1-2 years
as a means of ensuring trouble-free performance. During overhaul service, all
bearings, labyrinth seal rings, and O-rings are replaced; coolers are cleaned or
exchanged, and the pump internals are cleaned, wet bead finished and vacuum baked.
The overhaul requires 1-2 weeks to complete, not including shipping to and from the
service center. Exchange pumps are available upon request. Contact your Ebara
representative for further details.
5.4
Lubricating Fluid Level
CAUTION
!
It is very important that the lubricating fluid is maintained at the proper level.
Failure to do so could result in severe damage to the pump.
CAUTION
!
When changing or replenishing lubricating fluid, be sure to stop the pump and
allow the pump to return to atmospheric pressure. Because the lubricating fluid
reservoir is under vacuum, the pump can be severely damaged if the lubricating
fluid port plug is removed while the pump is in operation, or not at atmosphere.
CAUTION
!
930601-P
Pump Maintenance
21
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