Related Manuals for EBARA 80?25
Summary of Contents for EBARA 80?25
- Page 1 Global Innovators in Technology Multi-Stage Dry Vacuum Pumps Installation — Operation — Maintenance Manual Pump Model 80x25 EBARA Technologies, Incorporated 51 Main Avenue Sacramento, CA 95838 (916) 920-5451; Fax: (916) 925-6654...
- Page 2 Copyright 1993 by EBARA Technologies, Inc.
- Page 3 Ebara Technologies, Inc., and its employees appreciate that you have selected an Ebara Vacuum Pump for your needs. Our pump is manufactured with a great deal of care and attention. This is to ensure the best performance, as well as safe and satisfactorily operation;...
- Page 4 WARRANTY EBARA Technologies, Incorporated Products manufactured by Supplier are warranted against defects in materials and workmanship for 12 months from date of initial operation or 15 months from date of shipment by Supplier, whichever occur first. Supplier's liability under valid warranty claims is limited, at the option of Supplier, to repair, replacement, or refund of an equitable portion of the purchase price of the Product.
- Page 5 WARRANTY (con't) All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto, and must be received within the applicable warranty period by Supplier or its authorized representative. Such claims should include Product serial number, the date of shipment, and a full description of the circumstances giving rise to the claim.
- Page 6 Record of changes Rev. Date Position Contents Reason 12/12/97 New Release per ECO 2905...
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Page 7: Table Of Contents
EBARA Multi-Stage Dry Vacuum Pumps Table of Contents Safety ........................1 User Obligations to Safety ................. 1 1.1.1 Electrical Grounding................ 1 1.1.2 Exhaust Venting................1 Safety Labels ..................... 1 Hazard Icons....................2 Product Overview ....................4 Summary of Requirements ................ 4 2.1.1 Nitrogen Flow .................. - Page 8 EBARA Multi-Stage Dry Vacuum Pumps Table of Contents Weekly Maintenance ................20 Other Periodic Maintenance ..............21 5.3.1 Lubricating Fluid Change .............. 21 5.3.2 Complete Pump Overhaul............. 21 Lubricating Fluid Level................21 5.4.1 Checking the Lubricating Fluid Level ..........22 5.4.2 Sight Glass Locations ..............
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Page 9: Safety
It is the user’s responsibility to operate all equipment according to the recommended procedures, and to maintain safe operating conditions at all times. Ebara Technologies, Inc., assumes no liability for personal injury or for damage to equipment resulting from the improper operation or service of the equipment. -
Page 10: Hazard Icons
EBARA Multi-Stage Dry Vacuum Pumps Safety WARNING Warning notices signify situations involving potential bodily injury. They are generally used when failure to observe instructions or precautions could result in severe injury or, possibly, death. Potential exposure to extreme heat or cold, or mechanical dangers are examples of where a Warning label would appear. - Page 11 EBARA Multi-Stage Dry Vacuum Pumps Safety Toxic Fumes DANGER This icon indicates the possible presence of toxic fumes, gasses, or particles. Danger indicates that potential loss of life could occur. Explosion WARNING This icon indicates potential harm from explosion. Warning indicates that severe injury could occur.
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Page 12: Product Overview
2.1.3 Lubricating Fluid Ebara dry pumps use only perfluorinated polyether (PFPE) fluid to lubricate the pump's bearings and gears. This fluid is non-flammable and inert. This is the lubricating fluid referred to throughout the manual. -
Page 13: Pump Overhaul
EBARA Multi-Stage Dry Vacuum Pumps Overview CAUTION It is very important that the lubricating fluid is maintained at the proper level. Failure to do so could result in severe damage to the pump. CAUTION When changing or replenishing lubricating fluid, be sure to stop the pump and allow the pump to return to atmospheric pressure. - Page 14 EBARA Multi-Stage Dry Vacuum Pumps Overview Depending on the process, a complete pump overhaul is recommended every 1-2 years as a means of ensuring trouble-free performance. During overhaul service, all bearings, labyrinth seal rings, and O-rings are replaced; coolers are cleaned or exchanged, and the pump internals area cleaned, wet bead finished and vacuum baked.
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Page 15: 80X25 Specifications
EBARA Multi-Stage Dry Vacuum Pumps Overview 80X25 This pump consists of two pump modules. Process Flow: Three stages in the fore pump, and three stages, with intercoolers, in the rear pump. Ultimate pressure: 4x10 Torr. 2.2.1 80x25 Specifications Typical Configuration –Refer to Attachments for Specific Information... -
Page 16: 80X25, Side View
EBARA Multi-Stage Dry Vacuum Pumps Overview 2.2.2 80x25, Side View Typical Configuration – Refer to Attachments for Specific Information. 930601-P... -
Page 17: 80X25, Gear End
EBARA Multi-Stage Dry Vacuum Pumps Overview 2.2.3 80x25, Gear End Typical Configuration – Refer to Attachments for Specific Information. 930601-P... -
Page 18: 80X25, Motor End
EBARA Multi-Stage Dry Vacuum Pumps Overview 2.2.4 80x25, Motor End Typical Configuration – Refer to Attachments for Specific Information. 930601-P... -
Page 19: 80X25, Top View
EBARA Multi-Stage Dry Vacuum Pumps Overview 2.2.5 80x25, Top View Typical Configuration – Refer to Attachments for Specific Information. 930601-P... -
Page 20: Installation
Unpacking and Initial Positioning • Carefully unpack the pump. • Check for signs of possible damage in shipment. • Notify the Ebara representative immediately if there are any signs of damage. 3.1.1 Pump Location Locate the pump in an area that is: •... -
Page 21: Vacuum Piping
The lubricating fluid reservoirs are located at both ends of each pump. The lubricating fluid fill plugs are located on the top of the gear case and on the motor mounting flange. NOTICE Recommended lubricating fluids for Ebara pumps are Krytox 1525, Fomblin Y-LVAC 25/6, Barrierta J100, or equivalent fluids. Vacuum Piping CAUTION Because of the pump’s tight internal running clearances, care must be taken to... -
Page 22: Cooling Water Requirements
Nitrogen Purge Piping A Nitrogen gas purge is used for labyrinth seal purge and gas dilution. The flow rates to the individual stages have been preset at Ebara by factory personnel and should not be adjusted in the field. 3.4.1... -
Page 23: Electrical Connections
Also available are outputs signals from each of these controls for remote monitoring. The standard Ebara control panels are for 208 volt, 3-phase, 4-wire service. A main circuit breaker receives the incoming power conductors and provides over current protection. -
Page 24: Initial Check
EBARA Multi-Stage Dry Vacuum Pumps Installation The pump may be started either locally (Manual) or remotely (Auto). The Auto/Manual switch is located inside the control panel. In Manual mode, the pump is started and stopped by pressing the ON or OFF buttons on the front of the control panel. In the auto mode, power from a remote source is supplied to terminals B1 and B2. -
Page 25: Operation
If any toxic and pyrophoric gasses are used, it is necessary to maintain a flow of dilution Nitrogen to the dry pump. Failure to do so could result in fire or explosion. Ebara dry pumps are equipped with provisions for diluting exhaust gasses, and for purging seals and gear chambers with Nitrogen. -
Page 26: Cooling Water
See "Nitrogen Supply Requirements". Start-Up & Trial Run NOTICE It is preferred that the initial startup be performed by Ebara service personnel or their authorized representative. Proceed with the following only after having completed the Prestart Check. 1. Open all exhaust valves. -
Page 27: Auto Mode
This is the initial operation running motor current. Compare this with the following chart to ensure that the pump is performing to specification. If the pump fails to reach the spec., contact your Ebara Service Center. (See "Service Centers".) CAUTION Always set the overload to the rated motor current. -
Page 28: Pump Maintenance
EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance 5.0 Pump Maintenance Safety Issues DANGER Thoroughly purge the pump for at least 15 minutes to remove all toxic gases before opening the pump for any reason. WARNING Allow the pump to cool before attempting any maintenance. -
Page 29: Other Periodic Maintenance
The overhaul requires 1-2 weeks to complete, not including shipping to and from the service center. Exchange pumps are available upon request. Contact your Ebara representative for further details. -
Page 30: Checking The Lubricating Fluid Level
EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance Before attempting to add any lubricating fluid into the pump, it is imperative that the secondary reservoirs are drained first. Failure to do so could result in lubricating fluid being forced into the vacuum area of the pump. -
Page 31: Refilling Or Replacing The Lubricating Fluid
EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance 5.4.4 Refilling or Replacing the Lubricating Fluid DANGER Thoroughly purge the pump for at least 15 minutes to remove all toxic gases before opening the pump for any reason. CAUTION Before attempting to add any lubricating fluid into the pump, it is imperative that the secondary reservoirs are drained first. -
Page 32: Replenishing The Lubricating Fluid
EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance CAUTION Be sure to use the outer most plugs. On all pump models, a second plug is located on the inner flange. This is not a fill plug and should not be removed to add lubricating fluid to the pump. -
Page 33: Cleaning The Sight Glass
EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance Be sure to use the outer most plugs. On all pump models, a second plug is located on the inner flange. This is not a fill plug and should not be removed to add lubricating fluid to the pump. -
Page 34: Vibrations And Noise
EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance 2. Remove the sight glass. The sight glass can be cleaned with a clean lint-free wipe and alcohol. 3. Clean the O-ring and check for any damage. Replace the O-ring if it is worn or damaged. -
Page 35: Nitrogen Purge Flow
EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance 2.2kW 11.2 11.2 11.0 11.0 11.0 10.8 11.0 5.6 60Hz 18.4 17.9 17.7 17.6 17.4 17.4 17.4 9.2 3.7kW When the motor current goes above the rated value, or if the current is more than 10%... -
Page 36: Ultimate Pressure
EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance Flow: Motor and module: 5.0-8.0 lpm 1.3-2.1 gpm. Gas coolers: 0.8-1.2 lpm 0.21-0.32 gpm. Pressure (Operating) 1.0-2.0 kgf/cm 14-28 psi. Max: 2.0 kgf/cm 28 psi. Temperature (max) 30°C 86°F Ultimate Pressure The rated ultimate pressure is measured at the pump inlet with the Nitrogen purge on (at factory specifications). -
Page 37: Overview
Therefore, part of the maintenance of the pump includes periodically inspecting and cleaning the gas coolers. Ebara recommends that all coolers used on process equipment be inspected after two to three months of use to determine the amount of process build-up. (See 'Cooler Inspection Procedure'). - Page 38 The following list summarizes the recommended cooler cleaning procedures for several common semiconductor processes. If not listed below, please contact the local Ebara service representative for assistance in determining the appropriate cleaning procedure.
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Page 39: Single Pass Cooler Inspection Procedure
EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance 5.10.2 Single Pass Cooler Inspection Procedure DANGER Respirators may be required when inspecting or cleaning coolers (Process dependent). WARNING Wear protective gloves when performing maintenance on the coolers. WARNING Protective eyeware should be worn when inspecting or cleaning coolers. -
Page 40: Single Pass Cooler Cleaning Procedure
Cooler Cleaning and Inspection Form). Example: 30 - 40% build-up in the tube. 6. Examine the O-ring and replace it if necessary. (Ebara Part Description: G-90). 7. Replace the end cap being careful not to pinch or damage the O-ring. Replace the centering O-ring if necessary. - Page 41 EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance Wear protective gloves when performing maintenance on the coolers. WARNING Protective eyeware should be worn when inspecting or cleaning coolers. WARNING Allow the pump package to cool before attempting any maintenance. Wear protective gloves when performing maintenance on the coolers.
- Page 42 EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance Prior to removing the piping, it is helpful to mark which side it was removed from, i.e., exhaust piping and inter-cooler piping in between the pump and coolers, check, valve, etc. 1. Remove all piping.
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Page 43: U-Tube Cooler Cleaning Procedure
11. After the parts are dry and cool, locate and organize all parts. Look for matching marks on end caps and coolers. 12. Check all O-rings and replace them if necessary. (Ebara Part Number: G-90). 13. Reinstall end caps to cooler bodies ensuring that the markings line up. Be careful not to pinch the O-rings. - Page 44 EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance Respirators may be required when inspecting or cleaning coolers (Process dependent). WARNING Wear protective gloves when performing maintenance on the coolers. WARNING Protective eyeware should be worn when inspecting or cleaning coolers. WARNING Allow the pump package to cool before attempting any maintenance.
- Page 45 EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance Small, Flat Tray ( to place under the pump frame) Small pan or tray of 15 - 20 liter capacity Medium ScotchBrite Pad Polyethylene Bags (4 - 5) Clean Room Wipes Nitrile Gloves...
- Page 46 EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance CAUTION On no account should any metal wedges, screwdrivers, or other steel materials be used to pry apart or tap the coolers, as this could damage the components. 7. Once loosened, Slide the tube section of the cooler towards you.
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Page 47: Cooler Cleaning And Inspection Form
EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance 5.10.5 Cooler Cleaning and Inspection Form Company Name: ____________________ Location: ____________________ Pump Model: ____________________ ____________________ Serial Number: ____________________ Configuration: ____________________ Process Type: ____________________ Services: ____________________ Inlet Gases: ____________________ Cooler Type - Check (X) One:... -
Page 48: Sublimator Cleaning
EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance Test No. 2 1. With the pump off, blank off the inlet. 2. Attach a blank flange to the exhaust with a pressure gauge on it. 3. Allow a small amount of Nitrogen gas into the pump, approximately 1.1-1.4 kgf/cm2 (15 - 20 psi). -
Page 49: Consumables And Spares List
EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance 5.13 Consumables and Spares List This is a general recommended Spares List for the UERR series Ebara Dry Pumps. Exhaust Motor Motor Motor Lubricant Water Cooler Cooler Check Contactor* Contactor Contactor* Flow G-90... -
Page 50: Troubleshooting
EBARA Multi-Stage Dry Vacuum Pumps Troubleshooting 6.0 Troubleshooting Possible Problems / Suggested Solutions Table 1: Trouble Possible Causes Solutions Pump has shut Cooling water flow rate Check the inlet flow and pressure for down, and the water is below 3-4 lpm. - Page 51 EBARA Multi-Stage Dry Vacuum Pumps Troubleshooting Table 1: Trouble Possible Causes Solutions Lubricating fluid is Nitrogen flow across Check the Nitrogen pressure and flow found in the the labyrinth seal is across the seals. secondary reservoir. blocked. Pump was not turned Drain the secondary reservoir.
- Page 52 ) in inlet sublimator. pressure to the sublimator. Contact the local Ebara service representative if any of the following problems arise: Pump shutdown due to motor overload. Extremely high motor running current. Excessive or unusual noise. Lubricating Fluid leakage.
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Page 53: Service Centers
EBARA Multi-Stage Dry Vacuum Pumps Troubleshooting Service Centers 6.2.1 EASTERN REGION: EBARA Technologies, Inc. One Parklawn Drive Bethel, CT 06801 Phone: (203) 790-1080 Fax: (203) 790-7404 CENTRAL REGION: Ebara Technologies, Inc. 3019 Alvin DeVane Boulevard, Bldg. 3, Suite 350 Austin, TX 78741... -
Page 54: Europe
EBARA Multi-Stage Dry Vacuum Pumps Troubleshooting 6.2.2 EUROPE DEUTSCHLAND EBARA Germany GmbH PRECISION MACHINERY GROUP DonaustraBe 7 D-63452 Hanau Phone: 49-6181-1876-0 Fax: 49-6181-1876-40 HOLLAND: EBARA Technologies, Incorporated Jarmuiden 44 D1046 AC Amsterdam, The Netherlands Phone: 31-20-6114345 Fax: 31-20 6114375 SCOTLAND:... - Page 55 EBARA Multi-Stage Dry Vacuum Pumps Troubleshooting Taipei, 10499 Taiwan ROC Phone: 886+02-2560-1166 Fax: 886+02-2560-1177 SINGAPORE: EBARA Engineering Singapore (EES) No 1 Tuas Link2 Singapore 639550 Phone: 65+862-3536 Fax: 65+861-0589 KOREA: EBARA Precision Machinery Korea Inc. 15 FL, Kangnam Bldg. 1321 Seocho-Dong...
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Page 56: Attachments
EBARA Multi-Stage Dry Vacuum Pumps Attachments 7.0 Attachments One or more of the following items are included to cover areas specific to your pump. Please refer to these attachments for further, pump-specific information. 930601-P... - Page 57 EBARA Multi-Stage Dry Vacuum Pumps Attachments 930601-P...