U-Tube Cooler Cleaning Procedure - EBARA 80?25 Installation Operation & Maintenance

EBARA Multi-Stage Dry Vacuum Pumps
11. After the parts are dry and cool, locate and organize all parts. Look for matching
marks on end caps and coolers.
12. Check all O-rings and replace them if necessary. (Ebara Part Number: G-90).
13. Reinstall end caps to cooler bodies ensuring that the markings line up. Be
careful not to pinch the O-rings.
14. Use graphite anti-seize (Permatex 133-A) on stainless steel bolts before bolting
the end cap to the cooler body.
15. Tighten the bolts evenly in a criss-cross pattern until the end cap is seated tightly
against the cooler body.
NOTICE
!
Perform a helium leak check at this point. When finished continue to the next step.
16. Use two 36" bungie cord tie-downs to support the coolers on the pump.
17. Connect all vacuum lines and reinstall all NW 40 and NW 25 connections and
piping between the pump coolers.
18. Re-install the u-bolts.
19. Re-install all water line connections.
20. Re-install all Nitrogen connections.
CAUTION
!
Be careful to make a tight seal on the flanges. Replace worn or damaged O-rings.
21. Reinstall piping for exhaust to 6th stage cooler.
CAUTION
!
When installing the exhaust piping, be sure that the check valve is facing
correctly. If installed incorrectly, dry pump will fail due to exhaust back pressure.
22. Once the piping is reinstalled, turn on the cooling water flow and examine for
leaks.
23. Test the pump for leaks. (See "Leak-Checking the Pump.")
5.10.4

U-Tube Cooler Cleaning Procedure

Safety Precautions
DANGER
!
930601-P
Pump Maintenance
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