80X25 Specifications - EBARA 80?25 Installation Operation & Maintenance

EBARA Multi-Stage Dry Vacuum Pumps
2.2 80X25
This pump consists of two pump modules. Process Flow: Three stages in the fore
pump, and three stages, with intercoolers, in the rear pump.
Ultimate pressure: 4x10
2.2.1

80x25 Specifications

Typical Configuration –Refer to Attachments for Specific Information
MODEL: 80X25
PUMPS:
ULTIMATE PRESSURE:
PUMP SPEED:
POWER:
M
CURRENT
O
FULL LOAD:
T
VOLTAGE:
O
R
RPM:
INLET:
Flanging
EXHAUST:
C
INLET:
W
O
A
O
OUTLET:
T
L
E
I PRESSURE:
R
N
QUANTITY:
G
INLET:
N
2
P
PRESSURE
U
PRIMARY:
R
G
SECONDARY:
E
QUANTITY:
LUBRICATING FLUID:
WEIGHT (APPROX.):
REMARKS:
930601-P
-3
Torr.
60 Hz
REARPUMP
FOREPUMP
-3
3 X10 Torr
8,400 lpm / 297 cfm
2.2 kW
3.7 kW
11.0 Amps. 17.7 Amps.
208 VAC
3430
3460
2
< 4 kgf/cm (60 psi) Differential: 1-2 kgf/cm
5 to 8 lpm (1.3 - 2.1 gpm)
1/4" Tube Connection
1-7 kgf/cm
5 to 8 slpm (0.2 - 0.3 cfm) W/O Exhaust Gas Dilution
EBARA
FOREPUMP
3 X10
7,000 lpm / 247 cfm
2.2 kW
12.2 Amps.
200 VAC
2880
ISO 80
NW 40
3/8" NPT Female
3/8" NPT Female
2
(14-100 psi)
2
1 kgf/cm (14 psi)
0.4 L (13.5 oz.)
450 kg (990 lbs)
TECHNOLOGIES, INC.
Overview
50 Hz
REARPUMP
-3
Torr
3.7 kW
19.4 Amps.
2880
2
(14-28 psi)
7