Table of Contents
Advertisement
EBARA Multi-Stage Dry Vacuum Pumps
Trouble
Pump rotates in the
wrong direction.
Motor amperage is
rising.
Water found in the
coolers.
Slight increase (0.2
2
kg/cm
) in inlet
pressure to the
sublimator.
Contact the local Ebara service representative if any of the following problems arise:
a.
Pump shutdown due to motor overload.
b.
Extremely high motor running current.
c.
Excessive or unusual noise.
d.
Lubricating Fluid leakage.
e.
Loss of pump performance.
930601-P
Table 1:
Possible Causes
Pump wiring to the
main connection is
backwards.
Particulate or other
foreign matter is closing
tolerances.
Coolers and/or an
exhaust line is blocked.
Water leak in the
coolers.
Water entering from the
fab exhaust line.
Chamber cleaning
water dumped into the
pump.
Chemical buildup in the
sublimator.
Solutions
Reverse any two of the three power
input wires from the main power
supply on the terminal switch.
Inspect pump for particulate buildup or
other blockage. If there is heavy
particulate build. The pump should be
rebuilt.
Clean out the coolers or the exhaust
line or both.
Change the defective cooler.
Redesign the dry pump exhaust into
the fab exhaust so that water is not
sucked back into the dry pump
exhaust.
Evacuate the chamber with the load
lock, or use a more complete wipe-
down procedure.
Remove and clean the sublimator.
Troubleshooting
44
Hide quick links:
Advertisement
Table of Contents
