EBARA Multi-Stage Dry Vacuum Pumps
4.0 Operation
4.1
Safety Issues
DANGER
!
WARNING
!
If any toxic and pyrophoric gasses are used, it is necessary to maintain a flow of
dilution Nitrogen to the dry pump. Failure to do so could result in fire or
explosion. Ebara dry pumps are equipped with provisions for diluting exhaust
gasses, and for purging seals and gear chambers with Nitrogen.
4.2
Pre-Start Check
NOTICE
!
The descriptions and instructions included in this manual are for a typical pump
installation. Documentation specific to this pump installation has been included
in the Attachments section. This section is located at the back of this manual.
Please refer to the Attachments section for installation-specific information.
4.2.1
Initial Positioning
• Shipping hardware repositioned.
• Suitable location for the pump.
• The pump is secure, level; the leveling pads are properly adjusted.
See "Pump Location".
4.2.2
Lubricating Fluid Reservoirs
• Ensure that all primary lubricating fluid reservoirs are filled to the upper limit line.
See " Lubricating Fluid Reservoirs".
4.2.3
Vacuum Piping
• Ensure that all vacuum fittings are tight and that the piping is supported properly,
930601-P
Operation
17