EBARA 80?25 Installation Operation & Maintenance page 8

EBARA Multi-Stage Dry Vacuum Pumps
5.2 Weekly Maintenance ............................................................................... 20
5.3 Other Periodic Maintenance .................................................................... 21
5.3.1 Lubricating Fluid Change .............................................................. 21
5.3.2 Complete Pump Overhaul............................................................. 21
5.4 Lubricating Fluid Level............................................................................. 21
5.4.1 Checking the Lubricating Fluid Level ............................................ 22
5.4.2 Sight Glass Locations ................................................................... 22
5.4.3 Checking for Discoloration ............................................................ 22
5.4.4 Refilling or Replacing the Lubricating Fluid ................................... 23
5.4.5 Changing the Lubricating Fluid ..................................................... 23
5.4.6 Replenishing the Lubricating Fluid ................................................ 24
5.4.7 Cleaning the Sight Glass............................................................... 25
5.5 Vibrations and Noise................................................................................ 26
5.6 Motor Current........................................................................................... 26
5.7 Nitrogen Purge Flow ................................................................................ 27
5.7.1 Nitrogen Supply Requirements ..................................................... 27
5.8 Cooling Water Flow Rate......................................................................... 27
5.8.1 Cooling Water Requirements........................................................ 27
5.9 Ultimate Pressure .................................................................................... 28
5.10 Cooler Inspection and Cleaning............................................................... 28
5.10.1 Overview ....................................................................................... 29
5.10.2 Single Pass Cooler Inspection Procedure..................................... 31
5.10.3 Single Pass Cooler Cleaning Procedure ....................................... 32
5.10.4 U-Tube Cooler Cleaning Procedure.............................................. 35
5.10.5 Cooler Cleaning and Inspection Form........................................... 39
5.11 Leak-Checking the Pump ........................................................................ 39
5.12 Sublimator Cleaning ................................................................................ 40
5.12.1 Removing the Sublimator.............................................................. 40
5.12.2 Reinstalling the Sublimator ........................................................... 40
5.13 Consumables and Spares List................................................................. 41
6.0 Troubleshooting.................................................................................................. 42
6.1 Possible Problems / Suggested Solutions ............................................... 42
6.2 Service Centers ....................................................................................... 45
6.2.1 USA 45
6.2.2 EUROPE....................................................................................... 46
6.2.3 ASIA/PACIFIC RIM ....................................................................... 46
7.0 Attachments ....................................................................................................... 48
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