Cooler Cleaning And Inspection Form; Leak-Checking The Pump - EBARA 80?25 Installation Operation & Maintenance

EBARA Multi-Stage Dry Vacuum Pumps
5.10.5

Cooler Cleaning and Inspection Form

Company Name: ____________________
Pump Model: ____________________
Serial Number: ____________________
Configuration: ____________________
Process Type: ____________________
Services: ____________________
Inlet Gases: ____________________
Cooler Type -
Check (X) One: Single Pass: _____
Hot (Inlet) Side
3rd Stage (#1): _____%
4th Stage (#2): _____%
5th Stage (#3)): _____%

5.11 Leak-Checking the Pump

Whenever any internal connections of the pump package are broken, it is important to
minimize the potential for gross leaks. A leak into the pump package could allow
moisture to react with process gasses. This could cause severe damage to the pump.
A leak out of the pump could allow process gasses to escape into the fab, leading to
potentially hazardous conditions. The following are only initial checks. Further
checking may be necessary with a helium leak detector.
5.11.1 Leak Testing the Pump
When examination or cleaning of the coolers is complete, test the pump for leaks by
following the listed steps.
Test No. 1
1. Turn off the Nitrogen.
2. Blank off the inlet of the pump with the appropriate blank flange with a vacuum
gauge attached.
3. Start the pump and run it until the base pressure is reached.
4. With the pump running, place a collapsed latex glove tightly around the exhaust
and watch for the glove to inflate. If the glove inflates, there is a leak. Find and fix
the leak.
930601-P
PROCESS BUILD-UP RECORD
Cold (Outlet) Side
3rd Stage (#1): ______%
4th Stage (#2): ______%
5th Stage (#3): ______%
Location: ____________________
____________________
U-Tube: _____
Pump Maintenance
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