EBARA 80?25 Installation Operation & Maintenance page 51

EBARA Multi-Stage Dry Vacuum Pumps
Trouble
Lubricating fluid is
found in the
secondary reservoir.
Lubricating fluid is
found in the dry
pump swept volume.
Pump is causing
excessive vibration.
Pump package has
shut down, and the
trouble light is on.
930601-P
Table 1:
Possible Causes
Nitrogen flow across
the labyrinth seal is
blocked.
Pump was not turned
off and vented to
atmosphere before
removing the lubricating
fluid fill plug.
The lubricating fluid fill
plug was opened while
the pump was running.
Pump is not level.
Pump is not on rubber
cushions.
Lubricating fluid level
low.
Cooler tubes restricted
due to inadequate P/M,
or MFC failure in the
tool.
Restricted exhaust
possibly due to
moisture in the house
exhaust, or metal etch
deposit.
Solutions
Check the Nitrogen pressure and flow
across the seals.
Drain the secondary reservoir.
Depending on the amount of
lubricating fluid, the pump may have
to be torn down and cleaned. Contact
your Ebara representative.
Level the pump.
Ensure that the pump is on the rubber
cushions provided.
Check lubricating fluid levels in each
reservoir: refill if necessary.
Open cooler bonnets and examine
cooler tubes for flow restrictions and
clear any restrictions; reset current
trip switches inside the control panel;
restart the pump.
Check the exhaust line for flow
restrictions; reset current trip switches
inside the control panel; restart the
pump.
If the pump fails to restart after
completing the above, contact the
Ebara Service Center.
Troubleshooting
43