Leak Detector Vacuum System Diagram - Agilent Technologies G8610A Operation Manual

Helium leak detector
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Test Port
V7
Test Port thermocouple
V2
V3
* V8
**
Figure 7-10 Leak Detector Vacuum System Diagram
* Normally open valve, powered closed during all operations. ** Model G8610B, G8611C,
G8612C, G8611B during the roughing sequence.
Agilent Technologies Helium Leak Detector
Calibrated Leak
V6
V5
V4
V1
Spectrometer
V1 Foreline
V2 Contraflow1
V3 Contraflow2
V4 Midstage1
V5 Midstage2
V6 Cal Leak
V7 Vent
*V8 Exhaust
123

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