Compliance With Semi-F47 Standard - Mitsubishi Electric MELSERVO-J4 Series Instruction Manual

7.4

Compliance with SEMI-F47 standard

• The control circuit power supply of the servo amplifier can be possible to comply with SEMI-F47 standard.
However, a back-up capacitor may be necessary for instantaneous power failure in the main circuit power
supply depending on the power supply impedance and operating situation.
• Use a 3-phase for the input power supply of the servo amplifier. Using a 1-phase 100 V AC/200 V AC for the
input power supply will not comply with SEMI-F47 standard.
• The external dynamic brake cannot be used for compliance with SEMI-F47 standard. Do not assign DB
(Dynamic brake interlock) in [Pr. PD07] to [Pr. PD09]. Failure to do so will cause the servo amplifier to
become servo-off when an instantaneous power failure occurs.
• Be sure to perform actual machine tests and detail checks for power supply instantaneous power failure of
SEMI-F47 standard with your equipment.
The following explains the compliance with "SEMI-F47 semiconductor process equipment voltage sag immunity test" of MR-
J4 series.
This function enables to avoid triggering [AL. 10 Undervoltage] using the electrical energy charged in the capacitor in case
that an instantaneous power failure occurs during operation.
Parameter setting
Setting [Pr. PA20] and [Pr. PF25] as follows will enable SEMI-F47 function.
Parameter
PA20
PF25
Enabling SEMI-F47 function will change operation as follows.
• The voltage will drop in the control circuit power at "Rated voltage  50% or less". After 200 ms, [AL. 10.1 Voltage drop in
the control circuit power] will occur.
• [AL. 10.2 Voltage drop in the main circuit power] will occur when bus voltage is as follows.
Servo amplifier
MR-J4-10GF(-RJ) to MR-J4-700GF(-RJ)
MR-J4-11KGF(-RJ) to MR-J4-22KGF(-RJ)
MR-J4-60GF4(-RJ) to MR-J4-22KGF4(-RJ)
• MBR (Electromagnetic brake interlock) will turn off when [AL. 10.1 Voltage drop in the control circuit power] occurs.
Requirement of SEMI-F47 standard
The following shows the requirement of SEMI-F47 standard for the instantaneous power failure voltage and permissible time
of instantaneous power failure.
Instantaneous power failure voltage
Rated voltage  80%
Rated voltage  70%
Rated voltage  50%
Setting value Description
_ 1 _ _ Enable SEMI-F47 function selection.
200 Set the time [ms] of the [AL. 10.1 Voltage drop in the control circuit power] occurrence.
Bus voltage which triggers alarm
158 V DC
200 V DC
380 V DC
Permissible time of instantaneous power failure [s]
1
0.5
0.2
7 SPECIAL ADJUSTMENT FUNCTIONS
7.4 Compliance with SEMI-F47 standard
7
273