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icWARCS
A419-00-880 Issue K
3
Installation
3
.
1
Safety
WARNING
Obey
the safety instructions in
this section and take note of appropriate precautions. Failure to
observe these instructions
may result in injury
to
people and damage
to
equipment.
WARNING
The system should not be operated with any of the
side covers
removed.
WARNING
Do not expose any part of the
human
body
to vacuum
as it can cause
injury.
CAUTION
Cooling
water
must be provided commensurate
with
environmental
conditions
(humidity and temperature) such
that the
dew
point is not reached.
•
Ensure
that the
EPX
pump is suitable for the application.
The EPX
L series of pumps are designed for
semiconductor loadlock or transfer pumping applications, or clean
general
vacuum
applications.
The
EPX
N
series of pumps are designed for the light-duty
applications
detailed in
Figure
1. Contact
Edwards
or the
supplier if the
EPX
pump is used on other applications. Incorrect use of the
EPX
pump may invalidate the
warranty.
•
Ensure
compliance with all local
and
national
safety
requirements during installation.
•
Ensure
that the installation
technician
is familiar with the
safety
procedures which relate to the
products
pumped.
Wear
the
appropriate safety clothing if
contact
with contaminated components is anticipated.
Dismantle
and
clean contaminated foreline components inside a
fume
cupboard.
The EPX
pump should not be
dismantled
under
any
circumstances.
•
Vent and purge the process system before
starting
installation
work.
•
Disconnect the other components in the process system
from the electrical
supply so that they cannot be
operated
accidentally.
Further
details
are available from
the
Edwards
publication 'Vacuum pump
and
Vacuum System Safety'
,
part no.
P300· 20· 200.
3.
2
Unpack and inspect
WARNING
Heavy objects
can cause
muscle
strain
or back
injury.
Use
suitable
lifting equipment to move
the
pump. Refer
to
Se
ction 2
for
the
pump mass.
©
Edwards Limited 2017. All rights reserved.
Page 27
Edwards and the Edwards
logo
are trademarks of Edwards Limited.
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