Speed Curve (Mbar • Pa); Speed Curve (Torr) - Edwards EPX HiVac Series Instruction Manual

A419-00-880 Issue K
~CWARCS
-I
(1)
n
Figure 8 • Speed curve (mbar • Pa)
::r
::J
-·
1000
n
OJ
--
100
a.
:c
OJ
'"'
E
rT
10
OJ
"0
<D
8.
en
.
.
0/
/"
~
---
- --·
::::::....
I
I
_.....,
I
...
"'-.
I
I
I
:®
I
1 /
I
I
0
1x10
-6
1x10
-s 1X10 -•
1 X1 0
-3
1X10 -
2 1x1 0
-~
1x10
°
1x10
1
IX10
2
1X10
3
mbar
1x10 ""
1x1 0
.s 1x10 ·
2
1x1 0
-t 1x10
°
1x10
1
1x10 z
1x10
3
1x10
4
1x10 s
Pa
Inlet Pressure
1. EPX500
2. EPX180
Figure 9 • Speed curve (Torr)
1000
100
:c
M
E
u
10
Q)
Q)
0..
en
' '
" "
.....
""
I
""I '
' I
0;
,....
---
-~
~
I I
--..
'"-
.........
I
'"--
I
I
,
:0
I
0
,/
'"'
""
....
I
1x10 ·
7
1x10 -
6
1x10 ·
5
1x10
-~
1x10 ·
3
1x10 ·
2
1x10 •
1
1x10
°
1x10
1
1x10
2
1X10
3
Torr
Inlet Pressure
1. EPX500
2. EPX180
Page 18
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