Cooling Water Supply; Nitrogen Purge System (Epxn Series Pumps); Materials In Contact With Process Gases - Edwards EPX HiVac Series Instruction Manual

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riicWARCS
A419-00-880 Issue K
2.4
Cooling water supply
Table 9
Cooling water
supply
Cooling water items
Reference data
Maximum supply pressure
7
barg,
7 x 10
5
Pa,
100 psig
Minimum required pressure differential across supply and return
2
bar,
2 x 10
5
Pa,
30 psi
Maximum supply temperature
35 °C
Minimum supply temperature
15 °C
Maximum particle size in supply
0.03 mm
2
,
4.6 x 10·
5
inch
2
Typical heat removed from EPX pump
1.3
kW,
5118 btu h-
1
Minimum water flow rate
2 l min-
1 ,
31.7 US gallons h-
1
Connectors
Inlet
Per customer specification
Outlet
Per customer specification
2.
5
Nitrogen purge system
(EPX
N series
pumps)
Table 10
-
Nitrogen
supply
Gas Module Items
Reference Data
Nitrogen supply interface
1/
4 inch (6.35 mm) tube
Maximum supply pressure
7
barg,
7 x 10
5
Pa, 100 psig
Minimum supply pressure
3.0
barg,
3 x 10
5
Pa,
45 psig
Minimum purity
0.9995
Typical nitrogen purge flow at a supply pressure of 3.0 barg
25 slm (17 slm gas ballast)
2.
6
Materials
in
contact
with
process gases
Table
11
Materials
in
contact with
process
gas
Material items
Reference data
Pump body
Hard anodised aluminium
Pump rotor
Hard anodised aluminium
Internal shaft seals
PTFE coated aluminium
0-rings
Viton fluoroelastomer
Pump shaft
Carbon steel
Gas module nitrogen components
Stainless
steel,
hard anodised aluminium and viton
©
Edwards
Limited
2017.
All rights
reserved.
Page
17
Edwards
and
the Edwards logo are
trademarks
of
Edwards
Limited.
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