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Related Manuals for Edwards EXT Series
Summary of Contents for Edwards EXT Series
- Page 1 B753-03-880 Issue F Original Instruction Manual EXT Compound Molecular Pumps: EXT255H, EXT255Hi and EXT255HVi Description Item Number EXT255Hi/ISO100 B753-03-000 EXT255H/100CF B753-02-000 EXT255H/ISO100 B753-01-000 EXT255HVi/ISO100 B753-07-000...
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Page 3: Table Of Contents
Maintenance ..................27 Introduction ......................27 Bearing life ......................27 Rotor life ......................... 27 Clean the pump ......................27 Fault finding ......................28 © Edwards Limited 2008. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 4 Checklist of items .......................15 Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve) ....20 Fault finding ......................28 Page ii © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 5 Publication title Publication number EXC Turbomolecular Pump Controllers: EXC100E and EXC100L D396-20-880 E2M0.7 Rotary Pump A371-31-880 RV Rotary Vane Pumps A652-01-880 © Edwards Limited 2008. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 6 B753-03-880 Issue F This page has been intentionally left blank. Page iv © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 7: Introduction
EXT255HVi Compound Molecular Pumps. You must use the Pumps as specified in this manual. The EXT Compound Molecular Pumps are designed for use with an Edwards EXC Controller. Read this manual and the instruction manual supplied with your EXC Controller before you attempt to install or operate the equipment. The EXC Controller contains details of how to set up a pumping system and how to control accessories such as an air- cooler, vent-valve and bakeout band. -
Page 8: General Description
Pumps with a Conflat flange are supplied with a water-cooler. All EXT pumps have thermal sensors to monitor the motor and pump-body temperature. Page 2 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 9: Vent Options And Vent Control
EXC Controller is factory set to vent when the EXT pump is at 50% of full rotational speed after you select Stop. © Edwards Limited 2008. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 10: Cross-Section View Of Ext255H Pump
3. Magnetic bearing 10. Drag stage 4. Safety bearing 11. Spacer ring 5. Envelope 12. Stator 6. Shaft 13. Rotor 7. DC motor Page 4 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 11: Cross-Section View Of Ext255Hvi Pump
10. Drag stage 4. Safety bearing 11. Spacer ring 5. Envelope 12. Stator 6. Shaft 13. Rotor 7. DC motor 14. Interstage-port © Edwards Limited 2008. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 12 B753-03-880 Issue F This page has been intentionally left blank. Page 6 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 13: Technical Data
The pumps are designed to pump the following residual gases normally used in high-vacuum systems: Carbon monoxide Neon Ethane Methane Nitrogen Krypton Argon Propane Carbon dioxide Helium Hydrogen Butane © Edwards Limited 2008. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 14: Pumps With Gas Purge
25 sccm (0.42 mbar l s , 42 Pa l s Maximum allowable purge gas supply pressure 2 bar (gauge) ; 29 psig, 3 x 10 Page 8 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 15: Cooling-Water
Outlet-flange DN25NW DN25NW DN25NW Vent-port 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP Interstage-port DN25NW DN40NW Purge-flange DN10NW DN10NW DN10NW © Edwards Limited 2008. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 16 35 °C 2 x 10 mbar, 2 x 10 mbar, 2 x 10 mbar, 2 Pa 2 Pa 2 Pa Page 10 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 17: Materials Exposed To Gases Pumped
The following materials and component types are exposed to the gases pumped: aluminium alloys, stainless steels, fluoroelastomer and nitrile 'O' rings, hydrocarbon lubricant, felt, rare earth magnets, silicon nitride, phenolic resin and carbon-fibre reinforced epoxy resin. © Edwards Limited 2008. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 18: Ext255H/Ext255Hi Dimensions (Mm)
2. Vent-valve 6. Cooling-water connectors 3. Purge-port 7. Allowance for right-angle cable connector 4. Electrical supply connector 8. Earth (ground) bonding point Page 12 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 19: Ext255Hvi Dimensions (Mm)
1. Interstage-port 5. Backing-port 2. Vent-valve 6. Cooling-water connectors 3. Purge-port 7. Allowance for right-angle cable connector 4. Electrical supply connector © Edwards Limited 2008. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 20 B753-03-880 Issue F This page has been intentionally left blank. Page 14 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 21: Installation
7. When necessary, purge the EXT pump with inert gas as described in Section 3.5. The accessories available for these EXT pumps are detailed in Section 7; the accessories are shown in Figure © Edwards Limited 2008. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 22: Typical Pumping System With An Ext255H Pump
17. Regulated purge gas supply 11. Mist filter 5. EXT pump 18. Vent-valve 12. Cooling-water connectors 6. Backing valve 19. Alternative position for vent-valve Page 16 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 23: Typical Pumping System With An Ext255Hi/Ext255Hvi Pump
6. Not used 13. EXC controller 21. Inlet-strainer 7. Vacuum gauge 14. Air-cooler 22. Interstage-port 15. Vent port adaptor 23. Backing valve © Edwards Limited 2008. All rights reserved. Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 24: Connect To The Vacuum System
Figure 8, with the Edwards logo uppermost. Ensure that the dimples on the rim of the screen engage in the groove in the pump flange. If necessary, gently bend the tabs of the screen outwards to ensure a tight fit. -
Page 25: Base Mounting
If the pump has an ISO flange, use the Edwards trapped ‘O’ ring supplied with the pump and use a minimum of four claw clamps to connect the inlet-flange of the pump to the vacuum system. Ensure that each claw clamp is tightened to a torque of 10 Nm or more. -
Page 26: Backing Connection
EXT pump. We recommend that you use an Edwards RV backing-pump. The backing-pump can also be controlled by the EXC Controller (EXC120 EXC300). The minimum size of the backing-pump required is given in Table 1. -
Page 27: Purge Gas Connection
During operation, if the temperature of any surface of the pump is higher than 50 °C, the pump is too hot and you must increase the cooling. © Edwards Limited 2008. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 28: Forced-Air Cooling
M4 cap-head fixing-screws and remove the water-cooler from the pump. Make sure that there is a layer of thermal contact grease on the water-cooler before you refit it to the pump. Page 22 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 29: Operation
To increase system pressure or to extend the maximum inlet pressure range of the pump where this suits a particular process. © Edwards Limited 2008. All rights reserved. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 30: Shut-Down
If you heat the pump, this will also prevent condensation of vapours inside the pump. You can use the Edwards BX bakeout band to heat the pump (refer to Section 7). Fit the band around the pump, just below the inlet-flange. - Page 31 © Edwards Limited 2008. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 33: Maintenance
We therefore recommend that you exchange your pump for a factory reconditioned replacement every 20,000 cycles, or 10 years of use, whichever occurs first. Alternatively, you can send your pump to an Edwards Service Centre for a major service (which will include rotor replacement). -
Page 34: Fault Finding
If the inside of the EXT pump is contaminated, it may not be possible to achieve the specified ultimate vacuum, or pump-down time may increase. In these circumstances, you should return the pump to an Edwards Service Centre, where the pump will be dismantled and cleaned. Use the procedure given in the forms at the end of this manual to return the pump. - Page 35 Consult Edwards or your supplier. The EXC Controller trips into Fail - Consult Edwards or your supplier. all the speed LEDs are lit. © Edwards Limited 2008. All rights reserved. Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 36 If so, the rotor is out of balance. pitched noise ? Consult Edwards or your supplier. None of the above. Consult Edwards or your supplier. Page 30 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 37: Storage And Disposal
Do not incinerate the pump. The pump contains phenolic and fluorosilicone materials which can decompose to very dangerous substances when heated to high temperatures. © Edwards Limited 2008. All rights reserved. Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 38 B753-03-880 Issue F This page has been intentionally left blank. Page 32 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 39: Service, Spares And Accessories
Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, USA and a world-wide network of distributors. The majority of these employ service engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required:... -
Page 40: Interstage-Port Seal (Ext255Hvi Pump Only)
EXT pump. 7.4.2 EXC controller The Edwards EXC Controllers provide the facilities necessary for operating a pumping system based on an EXT255H, EXT255Hi or EXT255HVi pump. The Item Numbers of the EXC Controllers are given below. Controller... -
Page 41: Exdc Drive Modules
The foreline trap minimises oil vapour backstreaming from the backing pump and is recommended where the highest system cleanliness is required. Foreline trap Item Number FL20K A133-05-000 © Edwards Limited 2008. All rights reserved. Page 35 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 42: Installation Of Optional Accessories (And Spares): Ext255Hi Shown
16. Bakeout band position 5. Vent-port 11. Vent port adaptor 17. Inlet-screen (supplied) 6. VRX vent-restrictor EXT255Hi only † EXT255Hi/EXT255HVi only Page 36 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 43: Tav Vent-Valve And Vent-Port Adaptor
VRX vent-restrictor. Vent-restrictor Orifice diameter (mm) Item Number VRX10 B580-66-021 VRX20 B580-66-022 VRX30 B580-66-023 VRX50 B580-66-024 VRX70 B580-66-025 © Edwards Limited 2008. All rights reserved. Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 44 B753-03-880 Issue F This page has been intentionally left blank. Page 38 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.