Edwards EXT200/200H Instruction Manual
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Edwards EXT200/200H Instruction Manual

Split flow compound turbomolecular pumps
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EXT Split Flow Compound Turbomolecular Pumps
Description
24 Volt EXT Compound Turbomolecular Pumps:
EXT200/200H
EXT200/200Hi
EXT70/200H
EXT200/200H
EXT200/200H GCMS (Reversed Body)
EXT200/200H LCMS (Reversed Body)
24 Volt EXT system (comprising Compound Turbomolecular Pump and EXDC160):
EXT200/200H
EXT200/200Hi
EXT70/200H
EXT200/200H ICPMS
EXT200/200H GCMS
EXT200/200H GCMS (Reversed Body)
EXT200/200H LCMS (Reversed Body)
Instruction Manual
B756-01-880
Issue K Original
Item Number
B756-01-991
B756-02-991
B756-03-991
B756-24-991
B756-41-991
B756-43-991
B756-21-991
B756-22-991
B756-23-991
B756-30-991
B756-40-991
B756-42-991
B756-44-991

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Summary of Contents for Edwards EXT200/200H

  • Page 1 Item Number 24 Volt EXT Compound Turbomolecular Pumps: EXT200/200H B756-01-991 EXT200/200Hi B756-02-991 EXT70/200H B756-03-991 EXT200/200H B756-24-991 EXT200/200H GCMS (Reversed Body) B756-41-991 EXT200/200H LCMS (Reversed Body) B756-43-991 24 Volt EXT system (comprising Compound Turbomolecular Pump and EXDC160): EXT200/200H B756-21-991 EXT200/200Hi B756-22-991 EXT70/200H...
  • Page 2 EU authorised to assemble the technical file, that the product(s) SPLIT-FLOW EXT Compound Turbomolecular Pump (24 Volts):   EXT200/200H B756-01-991 EXT200/200H ICPMS B756-30-991 *   EXT200/200Hi B756-02-991 EXT200/200H GCMS B756-40-991 * ‡...
  • Page 3 The relevant technical documentation has been compiled in accordance with Annex VII Part B. In response to a reasoned request by the national authorities, Edwards Ltd undertakes to provide relevant information on the partly completed machinery (via email).
  • Page 4 This page intentionally blank.

  • Page 5: Table Of Contents

    Storage and disposal ................27 Storage ........................27 Disposal ........................27 Service, spares and accessories .............. 29 Introduction ......................29 Service ........................29 © Edwards Limited 2013. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 6 EXT water cooling block assembly ................... 31 TAV vent valve and vent port adaptor ................31 ACX air cooler ......................31 VRX vent restrictor .....................32 Page ii © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 7: Introduction

    The pump must be used as specified in this manual. Read this manual before installing and operating the pump. The EXT Split Flow Pumps are designed for use with an Edwards EXDC or EXC Controller. Read the instruction manual supplied with the controller before attempting to install or operate the equipment. The controller manual contains details of electrical installation.
  • Page 8 B756-01-880 Issue K This page has been intentionally left blank. Page 2 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 9: Technical Data

    It is the customer’s responsibility to leak check the system to ensure process gases cannot escape to the atmosphere and cause a hazard. WARNING Gases pumped from different inlets may combine to cause dangerous mixtures. © Edwards Limited 2013. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 10: Vent Gas Specification And Vent Control Data

    Maximum vent gas pressure < 0.5 bar gauge (7 psig, 0.5x10 Pa gauge)* * If using pressures in excess of this figure, please consult Edwards. Page 4 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 11: Water Cooling

    Water temperature Table 4 Maximum water pressure 5 bar (gauge), 73.5 psig, 6x10 Materials exposed to cooling water Nickel plated brass © Edwards Limited 2013. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 12: Technical Data

    2.5 x 10 2 x 10 2 x 10 3.3 x 10 6 x 10 1.7 x 10 7 x 10 Page 6 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 13 60000 r min speed Standby rotational speed 42000 r min 42000 r min 42000 r min 42000 r min EXC controller only © Edwards Limited 2013. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 14 40 W Recommended backing ‡‡‡ pump The data shown for EXT200/200H GCMS applies to pumps: B75640991, B75641991, B75642991, B75643991 and B75644991. This is because these pumps have the same internal components and the data is taken without inlet screens fitted. †...

  • Page 15: Materials Exposed To Gases Pumped

    1. TAV5 vent valve 4. Main inlet 2. 8 slots 8.4 mm wide 5. EXDC controller 3. Side inlet 6. Backing port © Edwards Limited 2013. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 16: Dimensions Of The Ext 200/200H Gcms Split Flow Pump System (Units In Mm)

    4. TAV5 vent valve 1. 8 slots 8.4 mm wide 5. Main inlet 2. EXDC controller 6. Side inlet 3. Backing port Page 10 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 17: Dimensions Of The Ext 200/200H Icpms Split Flow Pump System (Units In Mm)

    4. Vent port 1. 8 slots 8.4 mm wide 5. Main inlet 2. Controller connection 6. Side inlet 3. Backing port © Edwards Limited 2013. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 18: Dimensions Of The Ext 200/200H Gcms/Lcms (Reversed Body)

    4. 8 slots 8.4 mm wide 1. Extended vent port adaptor 5. Main inlet 2. Backing port 6. Side inlet 3. EXDC controller Page 12 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 19: Installation

    Typical installation CAUTION Local legislation concerning the impact of the pump on the environment must be followed when installing the pump. © Edwards Limited 2013. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 20: Connection To The Vacuum System

    Install the pump in the vacuum system before connecting the controller to the power supply. This will ensure that the pump cannot operate and injure people during installation. Page 14 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 21: Mechanical Fixing

    For variants listed under the Declaration of Incorporation, refer to customer guidelines for mechanical fixing. © Edwards Limited 2013. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 22: Inlet Screens (Supplied Fitted) Or Integral Mesh Centering Ring (Supplied Separate From The Pump)

    Figure 6, with the Edwards logo uppermost. Ensure that the dimples on the rim of the screen engage in the groove in the pump flange. If necessary, gently bend the tabs of the screen outwards to ensure a tight fit.

  • Page 23: Backing Connection

    B756-01-880 Issue K Use the Edwards trapped O-ring supplied with the pump and use a minimum of four fixing bolts to connect the inlet flange of the pump to the vacuum system. M8 bolts should be tightened to a torque of 5-6 Nm.

  • Page 24: Interstage Connection (Hi Pump Variants Only)

    However, if the pump is manually vented when it is at full rotational speed and the rate of pressure rise is too high, the pump life may be reduced. When using the manual vent valve supplied, Edwards recommends either limiting the vent or only opening the vent valve after the EXT Split Flow Pump speed has fallen to 50% of full rotational speed.

  • Page 25: Exdc Controllers

    Backing pressure > 5 mbar (500 Pa) and interstage flow > 80 sccm (1.3 mbar l s , 130 Pa l s  Ambient temperature > 35 °C.  © Edwards Limited 2013. All rights reserved. Page 19 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 26: Forced-Air Cooling

    Make sure that there is a layer of thermal contact grease on the water cooler before refitting it to the pump. Page 20 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 27: Operation

    EXDC/EXC Controller. Note: In an emergency only, open the vent valve quickly to decelerate the pump rotor in the shortest possible time. © Edwards Limited 2013. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 28: Safety Interlocks And Control System

    Note: Any references to LEDs and buttons do not apply to OEM versions of the EXC Controller i.e. EXC100L or EXC100. Page 22 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 29: Maintenance

    Alternatively, send the pump to an Edwards Service Centre to have the bearings replaced. When returning the pump to an Edwards Service Centre, use the procedure included at the end of this manual. Please note that the instruction to drain all fluids does not apply to the lubricant in the pump oil reservoirs.

  • Page 30: Cleaning The Pump

    If the inside of the EXT Split Flow pumps is contaminated, it may not be possible to achieve the specified ultimate vacuum, or pump-down time may increase. In these circumstances, the pump must be returned to an Edwards Service Centre, where the pump will be dismantled and cleaned. Use the procedure given in the forms at the end of this manual to return the pump.

  • Page 31: Fault Finding

    EXC Controller). If the EXC Controller still trips into Fail, consult Edwards or the supplier. © Edwards Limited 2013. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 32 If so, the rotor is out of balance. constant high-pitched noise? Consult Edwards or the supplier. None of the above. Consult Edwards or the supplier. Page 26 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 33: Storage And Disposal

    The pump contains phenolic and fluorosilicone materials which can decompose to very dangerous substances when heated to high temperatures. © Edwards Limited 2013. All rights reserved. Page 27 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 34 B756-01-880 Issue K This page has been intentionally left blank. Page 28 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 35: Service, Spares And Accessories

    The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from the nearest Edwards company or distributor. When ordering, state for each part required: Model and item number of the equipment.

  • Page 36: Inlet Strainer (Interstage Pumps Only)

    Pump system originally supplied with D396-46-510 (unpackaged) 7.4.3 EXC controllers The Edwards EXC Controllers provide the facilities necessary for operating a pumping system based on an EXT70/ 200H, EXT70/200Hi, EXT200/200H or EXT200/200Hi Split Flow Pump. The Item Numbers of the EXC Controllers are given below.

  • Page 37: Pump-To-Controller Cables

    Table 16 - ACX air cooler Air cooler Item Number ACX250H B580-53-160 © Edwards Limited 2013. All rights reserved. Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 38: Vrx Vent Restrictor

    Figure 8 - Installation of optional accessories 3. TAV vent valve 1. ACX cooling fan 4. EXDC controller 2. WCX water cooler Page 32 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

This manual is also suitable for:

Ext200/200hiExt70/200hExt200/200h lcmsExt200/200h gcms

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