Table of Contents
Advertisement
riicWARCS
A419-00-880 Issue K
5
5.
1
Operation
Introduction
WARNING
Do not operate the pump when the exhaust pifeline is restricted or blocked. If
so,
the EPX pump
can generate pressures up to 16 bar (1.6 x 10 Pa) and be damaged.
WARNING
Inlet and exhaust temperatures can exceed
6s·c
in extreme operating conditions.
WARNING
The EPX N series of pumps must be purged for 30 minutes with the nitrogen purge gas flowing
before pumping process gas. This must be done with the pump running to allow it to warm up to
its full operating temperature.
WARNING
There are no user serviceable parts within the EPX pump.
Metal
covers must not be removed from
the pump; to do so may cause damage to the pump and injury to personnel a nd would invalidate
the declaration of conformity and the warranty. Qualified Edwards service
personnel
should allow
4 minutes after the isolation of power before removing any covers.
CAUTION
The flow switch is set to 12 slm and therefore provides an indication that a flow in excess of 12 slm is
present,
but
gives no guarantee that there is sufficient flow to prevent
condensation
or to provide sufficient dilution of
the process gas to ensure pump reliability.
The flow switch is not a guaranteed interlock. To ensure
correct,
reliable
operation
of the pump the system
installer should fit
appropriate,
interlocked
hardware
to ensure correct nitrogen purge flow and
monitoring.
CAUTION
If the electrical supply to the EPX pump fails for up to one
second,
the pump will continue to run once the power
is
returned.
CAUTION
If the electrical supply to the
EPX
pump fails for
only
a few
seconds,
the pump will cont inue to operate
normally
provided the
run
signal on the interface is maintained.
©
Edwards Limited
2017.
All rights reserved.
Page 53
Edwards and the Edwards logo are trademarks of Edwards L
imited.
Advertisement
Table of Contents
