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-·
0
::J
A419-00-880
Issue
K
Warning · use protective equipment.
~
Indicates that appropriate protective
equipment
f
~'
Radio Frequency RF earth (ground).
must be used.
-
The following
warnings
only appear in this manual:
Warning
· Risk of explosion
Warning
·
pressurised.
Indicates the potential risk of explosion.
Safety Data Sheets for chemicals supplied by
Edwards
can
be
obtained by contacting
Edwards,
or at
www.edwardsvacuum.com.
1. 2
Figure 1 • Process compatibility chart
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EPX114L
/
LE
EPX500L
I
LE
EPX1110N
I
NE
EPX~N
I
N
E
Description
WARNING
Edwards take no responsibility
for damage or injury caused
by
improper
use
of
the
equipment.
WARNING
The EPX pump
must only
be used
for
applications
shown in
Figure
1.
Incorrect use
of
the EPX pump
could invalidate the
warranty.
Contact the
local Edwards representative
if unsure whether the
EPX
pump
is
appropriate for
the
application.
The EPX pump
should
not
be
used to pump
explosive
mixtures or
pyrophoric
gases.
CAUTION
EPX
pumps are
not
suitable
for
pumping Xenon.
Page 2
©
Edwards Limited 2017. All rights reserved.
Edwards
and
t he Edwards
logo
are trademarks of Edwards
Limited.
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