Edwards EXT70 Instruction Manual
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Edwards EXT70 Instruction Manual

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B580-65-880
Issue G Original
Instruction Manual
EXT Pump Accessories

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Summary of Contents for Edwards EXT70

  • Page 1 B580-65-880 Issue G Original Instruction Manual EXT Pump Accessories...
  • Page 2 This page has been intentionally left blank.

  • Page 3: Table Of Contents

    Technical data ......................41 Installation ....................... 41 6.3.1 Unpack and inspect .....................41 6.3.2 Fit or remove the inlet-screen ..................42 PRX10 purge-restrictor ................. 45 © Edwards Limited 2008. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 4 Accessories for EXT DX pumps (EXT75iDX pump shown) ............3 Accessories for other EXT pumps (EXT250M pump shown) ............4 Accessories for EXT406PX pumps ..................5 Page ii © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 5 Vent-port adaptor technical data ..................53 Extended vent-port adaptor technical data ................ 53 Vent-restrictor technical data ..................55 WCX water-cooler technical data ..................57 © Edwards Limited 2008. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 6 B580-65-880 Issue G This page has been intentionally left blank. Page iv © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 7: Introduction

    B580-65-880 Issue G Introduction Scope and definitions This manual provides installation, operation and maintenance instructions for the Edwards range of accessories for the following EXT pumps: EXT70 and EXT70H turbomolecular pumps. EXT75DX and EXT75iDX compound molecular pumps. EXT250 and EXT250M turbomolecular pumps.

  • Page 8: Installation And Operation Safety

    If you have an EXT DX pump: isolate the podule from the electrical supply. An EXC Controller or a TIC (Turbo Instrument Controller) Page 2 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 9: Accessories For Ext Dx Pumps (Ext75Idx Pump Shown)

    EXT pump. manual supplied with your EXT pump. © Edwards Limited 2008. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 10: Accessories For Other Ext Pumps (Ext250M Pump Shown)

    Supplied fitted to all pumps, except for manual supplied with your EXT EXT555H pumps: refer to the instruction pump. manual supplied with your EXT pump Page 4 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 11: Accessories For Ext406Px Pumps

    16. BX250 bakeout band position 8. Inlet screens (fitted) 17. BX450 bakeout band position 18. WCX water-cooler 9. Purge plug (fitted) © Edwards Limited 2008. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 12: Accessories For Extpx Split Flow Pumps

    5. Manual vent valve (fitted) 14. WCX water-cooler 6. TAV solenoid valve 7. Inlet-flange O-rings 15. EXDC controller 8. Purge plug (fitted) Page 6 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 13: Bx Bakeout Band

    Description You can fit an Edwards BX bakeout band to an EXT pump to increase the rate of degassing of the pump body, to achieve faster pump down and lower ultimate pressure. You should only fit BX bakeout bands to CF flanged pumps intended for use at ultra high vacuum.

  • Page 14: Installation

    EXT pump operates below normal speed. Check that the rating of the fuse fitted within your electrical supply corresponds to the fuse rating stamped on the BX bakeout band. Page 8 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 15: Operation

    If you have connected the bakeout band to a TIC Relay Box, refer to the TIC instruction manual for instructions on how to use the TIC to control the operation of the bakeout band. © Edwards Limited 2008. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 16 B580-65-880 Issue G This page has been intentionally left blank. Page 10 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 17: Acx Air-Cooler

    ACX250 EXT250M B580-53-150 ACX250H EXT250/250H/250Hi, EXT255H/255Hi/255DX/255iDX B580-53-160 ACX400 radial EXT406PX/EXT400/200/(30i)PX B580-53-455 ACX400 axial EXT406PX/EXT400/200/(30i)PX B580-53-405 ACX500 EXT351/501 B580-53-200 ACX555 EXT555H/555HF/555Hi B580-53-561 © Edwards Limited 2008. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 18: Acx75 Air-Cooler Dimensions (Mm)

    B580-65-880 Issue G Figure 5 - ACX75 air-cooler dimensions (mm) Page 12 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 19: Acx75 Air-Cooler Installation (Shown Fitted To Ext75Dx Pump)

    5. Fixing screws and washers: M4 x 5 (4 off) 2. Podule 6. Manual vent-valve 3. EXT75DX pump-base 7. ACX75 mounting bracket 4. Pump backing-port Shown in alternative mounting position © Edwards Limited 2008. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 20: Acx250 Air-Cooler Dimensions (Mm)

    B580-65-880 Issue G Figure 7 - ACX250 air-cooler dimensions (mm) Page 14 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 21: Acx250 Air-Cooler Installation (Shown Fitted To Ext250M Pump)

    2. Fixing screws: M5 x 5 (2 off) 5. Alternative mounting position 3. EXT250M pump-base 6. Fan/bracket fixing screws: M5 x 5 (2 off) © Edwards Limited 2008. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 22: Acx250 Air-Cooler Axial Installation (Shown Fitted To Ext250M Pump)

    4. Screws: M5 x 5 (2 off) 2. ACX250 axial mounting bracket 5. ACX250 air-cooler 3. Screws: M5 x 5 (2 off) Page 16 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 23: Acx250H Air-Cooler Dimensions (Mm)

    B580-65-880 Issue G Figure 10 - ACX250H air-cooler dimensions (mm) © Edwards Limited 2008. All rights reserved. Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 24: Acx250H Air-Cooler Installation (Shown Fitted To Ext255Hi Pump)

    Figure 11 - ACX250H air-cooler installation (shown fitted to EXT255Hi pump) 1. M5 fixing screws (length dependent on pump): 2 off 2. ACX250H mounting bracket 3. EXT250H/Hi pump-base Page 18 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 25: Acx400 Radial Air-Cooler Dimensions (Mm)

    Figure 12 - ACX400 radial air-cooler dimensions (mm) 1. Earth screw (M5 x10) 2. 24 V power cable 3. Mounting screws (M8 x 30) x 5 with washers © Edwards Limited 2008. All rights reserved. Page 19 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 26: Acx400 Radial Air-Cooler Installation

    6. ACX400 air-cooler 3. EXT406PX 7. Mounting screws (M8 x 30) and washers 4. Radial fan mounting screws (5 x M8 holes) Page 20 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 27: Acx400 Axial Air-Cooler Dimensions (Mm)

    1. Removable screen for mounting 2. Mounting screws (M5 x 16) x 4 3. 24 V power 4. Earth screw (M5 x 10) © Edwards Limited 2008. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 28: Acx400 Axial Air-Cooler Installation

    6. Axial fan fixings (4 x M5 holes) 3. Pump booster port 7. Fixing screws (M5 x 16) 4. EXT406PX 8. Air-cooler grill Page 22 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 29: Acx400 Axial And Radial Air-Cooler Combination Installation

    6. ACX400 air-cooler 3. Pump booster port 7. Assembly-body fixings (M8 x 30) x 4 4. EXT406PX 8. Removable protective grill © Edwards Limited 2008. All rights reserved. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 30: Acx500 Air-Cooler Dimensions (Mm)

    B580-65-880 Issue G Figure 17 - ACX500 air-cooler dimensions (mm) Page 24 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 31: Acx500 Air-Cooler Installation (Shown Fitted To Ext501 Pump)

    1. EXT501 pump-base 4. ACX500 mounting bracket 2. Pump water-cooling connections 5. Pump outlet-port 3. Screws: M5 x 5 (3 off) © Edwards Limited 2008. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 32: Acx555 Air-Cooler Dimensions (Mm)

    B580-65-880 Issue G Figure 19 - ACX555 air-cooler dimensions (mm) Page 26 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 33: Acx555 Air-Cooler Installation (Shown Fitted To Ext555H Pump)

    4. Pump mounting feet (4 off) 2. ACX555 air-cooler 5. Spacers (4 off) 3. Screws: M8 x 25 (2 off) 6. EXT555H pump-base © Edwards Limited 2008. All rights reserved. Page 27 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 34: Installation

    To flange-mount the air-cooler, do not refit the pump mounting feet, but use four screws to secure the air-cooler to the pump. Page 28 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 35: Axial Mounting

    With the protective screen attached the fans can then be connected to the power supply. © Edwards Limited 2008. All rights reserved. Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 36: Electrical Connection

    If you have connected the ACX air-cooler to your own electrical supply, switch on the electrical supply to operate the ACX air-cooler. Page 30 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 37: Ext Dx Podule Connector Plug

    Figure 21 - EXT DX podule connector plug 1. -ve (negative) connection 2. +ve (positive) connection © Edwards Limited 2008. All rights reserved. Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 38 B580-65-880 Issue G This page has been intentionally left blank. Page 32 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 39: Tav Vent-Valve

    Red (positive), black (negative) Valve electrical connector type 2 pole and earth (ground), miniature Vale inlet-connection M5 female Valve outlet-connection 1/8 inch BSP © Edwards Limited 2008. All rights reserved. Page 33 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 40: Installation

    Number of the TAV vent-valve together with your order number and your supplier's invoice number. Retain all packing materials for inspection. Do not use the TAV vent-valve if it is damaged. Page 34 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 41: Fit The Tav Vent-Valve To The Pump

    If you have connected the TAV vent-valve to an EXC Controller, use the EXC Controller to operate the vent-valve: refer to the EXC Controller instruction manual. © Edwards Limited 2008. All rights reserved. Page 35 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 42: Tav Vent-Valve Connections

    1. Air filter 5. Alternative electrical supply connector position 2. Inlet-port 6. Electrical supply connector 3. Vent-valve adaptor 7. Hose connector 4. O-ring Page 36 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 43: Vibration Isolator

    Vibration attenuation depends on frequency of interest and mass of vacuum system. Stated value is typical for vibration at pump operational frequency, and for system with mass of ~200 kg. © Edwards Limited 2008. All rights reserved. Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 44: Installation

    The vibration isolator is unable to withstand the large forces generated in the event of total rotor failure. An additional restraining means must be fitted. Page 38 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 45: Vibration Isolator Installation

    1. Rigid frame secured to vacuum system 2. Vibration isolator 3. Vacuum system 4. Claw clamps 5. Shoulder screws 6. Clearance © Edwards Limited 2008. All rights reserved. Page 39 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 46 B580-65-880 Issue G This page has been intentionally left blank. Page 40 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 47: Inlet Screens

    Retain all packing materials for inspection. Do not use the inlet-screen if it is damaged. © Edwards Limited 2008. All rights reserved. Page 41 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 48: Fit Or Remove The Inlet-Screen

    Refer to Figure 25. Lower the inlet-screen (with the Edwards logo (if present) at the top) into the pump-inlet until the dimples on the rim of the screen engage in the groove in the pump-inlet bore, as shown in Figure 25.

  • Page 49: Ishx Inlet-Screen

    (1). Figure 25 - ISX inlet-screen 1. EXT inlet-flange 2. Inlet-screen Figure 26 - ISDX inlet-screen 1. EXT inlet-flange 2. Inlet-screen © Edwards Limited 2008. All rights reserved. Page 43 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 50 Figure 27 - ISHX inlet-screen 1. Screws: do not remove or loosen 2. ISHX inlet-screen mesh 3. Screws: remove to remove/fit inlet-screen Page 44 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 51: Prx10 Purge-Restrictor

    Item Number of the PRX10 purge-restrictor together with your order number and your supplier's invoice number. Retain all packing materials for inspection. Do not use the PRX10 purge-restrictor if it is damaged. © Edwards Limited 2008. All rights reserved. Page 45 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 52: Fit The Purge-Restrictor

    5. Turn off your purge gas supply, remove the mass flow meter and connect your purge gas supply to the purge-restrictor. Page 46 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 53 4.0 x 10 Figure 28 - PRX10 purge-restrictor 1. Filtered purge gas inlet to PRX10 purge-restrictor 2. O-ring 3. Locknut 4. Adjustment screw © Edwards Limited 2008. All rights reserved. Page 47 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 54 B580-65-880 Issue G This page has been intentionally left blank. Page 48 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 55: Pump-To-Controller Cable

    Note: Pump-to-controller cables are not applicable to EXT DX pumps. If you need extension cables for EXT DX pumps, refer to the Edwards catalogue, or contact your supplier or Edwards. Description Complete cables are available for 80 V pumps in 1, 3 and 5 metre lengths to suit your application.
  • Page 56 B580-65-880 Issue G This page has been intentionally left blank. Page 50 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 57: Vent-Port Adaptor

    O-ring to seal to the pump, NW10 centering ring and NW10/16 clamping ring. Refer to Figure © Edwards Limited 2008. All rights reserved. Page 51 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 58 0.8 mm orifice in the pipeline used to connect to the extended vent-port adaptor. The extended vent-port adaptor is best suited to the following pump types: EXT200/200H EXT200/200Hi EXT200/200/30H EXT400/200/30H EXT70/70/200H Page 52 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 59: Technical Data

    1/8 inch BSP vent-port. Tighten the adaptor so that it seals firmly against the face of the vent-port. 4. Connect your vent pipeline to the NW10 flange (1) of the adaptor with suitable fittings. © Edwards Limited 2008. All rights reserved. Page 53 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 60 B580-65-880 Issue G This page has been intentionally left blank. Page 54 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 61: Vrx Vent - Restrictor

    You must not exceed the maximum allowable rate of pressure rise specified in the EXT pump instruction manual. © Edwards Limited 2008. All rights reserved. Page 55 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 62: Fit The Vent-Restrictor

    Figure 31 - VRX vent-restrictor 1. O-ring 4. Orifice diameter 2. M3 tapped hole 5. VRX identification number 3. Sealing washer Page 56 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 63: Wcx Water-Cooler

    Number of the water-cooler together with your order number and your supplier's invoice number. Retain all packing materials for inspection. Do not use the water-cooler if it is damaged. © Edwards Limited 2008. All rights reserved. Page 57 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 64: Wcx555 Water-Cooler Dimensions (Mm)

    B580-65-880 Issue G Figure 32 - WCX555 water-cooler dimensions (mm) Page 58 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 65: Wcx555 Water-Cooler Installation

    1. Pump base 2. WCX555 water-cooler 3. Screws: M8 x 25 (4 off) 4. Pump mounting feet (4 off, supplied with the pump) © Edwards Limited 2008. All rights reserved. Page 59 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 66: Fit The Water-Cooler To The Pump

    Refer to your EXT pump instruction manual for: The operating conditions under which you must use water-cooling. The necessary cooling-water supply flow rates and temperatures. Page 60 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 67: Maintenance

    B580-65-880 Issue G Maintenance Edwards EXT Accessories require little user maintenance and contain no user serviceable parts. To maintain the accessories in normal use, do the appropriate checks below when you maintain the pump. Check that all mechanical fixings are secure.
  • Page 68 B580-65-880 Issue G This page has been intentionally left blank. Page 62 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 69: Storage And Disposal

    Dispose of the accessories safely in accordance with all local and national safety and environmental requirements. Take particular care with components that have been contaminated with dangerous process substances. © Edwards Limited 2008. All rights reserved. Page 63 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 70 B580-65-880 Issue G This page has been intentionally left blank. Page 64 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

This manual is also suitable for:

Ext70hExt75dxExt250hiExt250hExt255hExt255hi ... Show all

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