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A419-00-880 Issue K
The EPX pump system operates at pressures between atmospheric and ultimate
vacuum,
with no lubricating or
sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into
the system being evacuated.
Between 1 bar and 0.2
mbar,
the EPX Twin pump offers a significant pumping performance advantage over the
standard EPX pump. As
such,
the EPX Twin pump is ideal for use on load lock applications, rapid cycling
applications,
and so forth.
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The stator of the pump and the enclosed motor are cooled by an integrated water cooling
circuit.
The EPX pump is
0
therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water
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supply and return pipelines are connected to the pump by water connectors (customer
specified)
(Figure
2,
items 4
and 9). Cooling water must be provided commensurate with environmental conditions (humidity and
temperature)
such that the dewpoint is not reached. Refer to
Table 9
for the water supply specifications.
Refer to
Figure 2
and 4. The pump incorporates an EMC supply filter and an inverter
drive,
which provides and
controls the electrical supply to the pump motor. LEOs on the front cover identify the status of the EPX pump: (refer
to
Figure
4,
items
2, 3, 4,
and 5 and
Table
1). Motor speed depends on the pressure at the pump inlet. When the
pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which
is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is
reduced,
the
motor speed
increases,
until it eventually reaches its preset maximum speed. If the pressure at the inlet
increases,
the motor will slow down again.
The
EPX
pump is supported by four vibration isolators
(Figure
2,
item 7).
Pump protection sensors automatically shut down the pump if a fault condition arises: refer to
Section
1.3.
The EPX pump is available in a number of different
variants.
The nomenclature is arranged to help identify which
variants are suitable for which
applications,
and which method of control is required for the pump. The four base
variants are described in more detail below:
1.2.1
The EPX
L
This pump is for use on clean duty applications pumping inert gas
mixtures,
such as
loadlock,
whereby control is
provided by the process tool
interface.
(Refer to
Figure
2).
1.2.2
The
EPX
LE
This pump is for use on clean duty applications such as load
lock,
and is augmented with an End User Controller (EUC).
The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide
network for remote control and monitoring. A Pump Display Terminal (PDT) may also be used with the End User
Controller to facilitate local
control.
(Refer to
Figure
5).
1.2.3
The
EPX
N
This is fitted with a gas module that supplies nitrogen purge gas to the shaft seal and pump mechanism areas to
provide dilution of process gases for the light duty applications specified in
Figure
1. (Refer to
Figure
5,
Table 5
and
Section 3.6
for further information).
1.
2.4
The EPX NE
This system is a light process application pump with network and local control capability through the EUC as described
in
Section
1.2.2. (Refer to
Figure
5).
The four base
variants,
the L,
LE,
Nand NE are also available in two
capacities,
180m
3
/
hr (letter designation prefixed
with 180 for example
EPX180LE)
and 500 m
3
/
hr (letter designation prefixed with 500 for example EPXSOON).
The EPX pump can also be specified as either
200/
208 V or 400 V compatible and a choice of either
1/
4 inch
BSP, 3/
8 inch
BSP, 9/
16 inch BSP quick connect water fittings or no quick connects.
©
Edwards Limited
2017.
All rights
reserved.
Page 3
Edwards and the Edwards logo are trademarks of Edwards
Limited.
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