Edwards EPX HiVac Series Instruction Manual page 6

A41 9-00-880 Issue K
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5.2
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5.3 ,......
5.4
Flammable and toxic gases (EPX N series pumps) ............... . .................... . ............................ 54
Start-up ............ . ..... ......... .. .. ....... . ........... ... ........... .. ......... . ... ...................... .. .. . ...... .. 54
Manual shut-down ................................ .......................... .................... . ..... .................. 55
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5.5 Status and fault indications .............................. . ............................................................ 55
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5.6
Unplanned shutdown and alarms ......... . ..................... . ..................................................... 55
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6
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Maintenance .. ..... ...... .. ........ ... ....... ... ..... ..... ...... .... ...... .... ...... ... ...... .. .. 57
6.1
Safety .... ....... .. ................... ....... . .. ... ....... .. ......... ...... ......... ...... .. ....... .. ......... . . ......... .. 58
6.2 Maintenance plan ....... .......................................................................... ...................... 58
6.3
Inspect the pipelines and connections ........................................ .. ........................ .. .......... 59
6.4
Cleaning the pump . .......... . .................. . ........................................ . .............................. 59
6.5 Service the EPX pump .......................... . .................................... . ....... ........................... 59
6.6
Fault finding .................. .. .. ............... .................... ......... ........................ . ... . .............. 60
7 Storage and disposal ....... .......... ...... .... ...... .... ...... .... .......... ... .. .... ....... .. 63
7.1 Storage .... ....... . . ............... .. ....... . . .... ....... ......... . . ...... ......... .. ......... ............... ....... ... . .. 63
7.2
Disposal ... ....................... . ....................... . ... . ........ ..... ............. . ........ .......... ................. 64
8
Service, spares and accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
8.1 Introduction ........... ..... . .................... ........................ ................................................ 65
8.2 Service ... ...................... .... ...................... . ............ ............. ............. ....... . .................. 65
For retum of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure Page
1 Process compatibility chart ......................... .. ................................................................. 2
2 The EPX L dry vacuum pump .......................................................................................... . 5
3 EPX twin 180L installation details · position of additional exhaust port for EPX twin variants ............. 6
4 EPX L labels (refer to Table 3) ............ .. .................... . ................................................... . .. 8
5 EPX E dry pump ..................................... . ................................................................... 10
6 EPX N series dry pump .......... . ........................... . ......................... . ................................ 11
7 End User Controller (EUC) display . ......... . . .. ..... ...... ....... .. .... . ............ ..................... ... .. ..... .. 12
8 Speed curve (mbar • Pa) .................. ................ . ..... ............................ .................. . ..... ... 18
9 Speed curve (Torr) ...... ......... ...... ..................... .. .......... .... .......... .. .......... .... .................. 18
10 Speed curve (mbar • Pa) EPX and EPX Twin . ........ . ...................................................... .. ...... 19
11 Speed curve (Torr) EPX and EPX Twin ............................................................................... 19
12 EPX L installation dimensions (EPX500L shown) ... ................. .... ...................... .... ..... ............. 20
13 EPX LE installation dimensions (EPX500LE shown) ...................... .. ......................................... 21
14 EPX N installation dimensions (EPX500N shown) ................. . ......................... . ....................... 22
15 EPX NE installation dimensions (EPX500NE shown) ................................................................ 23
16 Location of the pump centre of gravity from centre of the top of the inlet flange ........ .. ................ 24
17 Gas module schematic . ......... . ............................... .................... . ..... .. ... . .................... ... 25
18 Schematic diagram of emergency stop facility .................... .. .............................................. 33
19 EUC and PDT menu logic .. .. ............................... .. .................................................. .. ...... 43
20 Switch on menu ........................................ ................................................................. 44
21 Switch off menu ......... .......................... ..... ................. ......... ...................... .... ........... .. 44
22 Normal menu ....... .. ........................ . ......... .. ............. .. ......... .. .......................... ......... .. 45
23 Status menu ............................................ ........... ............... ..................................... .. 46
24 Control menu ....................... . ............ ........................................................................ 47
25 Setup menu (sheet 1 of 2) .......... . ...... . ....... ... .... .. ......... .. .. ........... . . ......... .. ......... .. .... ....... 48
26 Software version .. .. .... ......... . .. ... .. ......... ..... . .................. . ........................... . ................. 50
27 Select units menu ....... .............................................. . . ........................ . ............ ........... 51
28 Select line menu ................. .. .... .. ............................. . ................ . ........ . ....................... 52
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