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Description
EXT555H / ISO160
EXT555H / ISO160 (fine)
EXT555H / 160CF
EXT555Hi / ISO160
EXT555Hf / ISO160
EXT555Hf / 160CF
Instruction Manual
EXT Compound Turbomolecular Pumps:
EXT555H, EXT555Hi and EXT555Hf
B777-00-880
Issue E Original
Item Number
B777-01-000
B777-11-000
B777-02-000
B777-05-000
B777-07-000
B777-08-000
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Table of Contents
Related Manuals for Edwards EXT555H
Summary of Contents for Edwards EXT555H
- Page 1 B777-00-880 Issue E Original Instruction Manual EXT Compound Turbomolecular Pumps: EXT555H, EXT555Hi and EXT555Hf Description Item Number EXT555H / ISO160 B777-01-000 EXT555H / ISO160 (fine) B777-11-000 EXT555H / 160CF B777-02-000 EXT555Hi / ISO160 B777-05-000 EXT555Hf / ISO160 B777-07-000 EXT555Hf / 160CF...
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Page 3: Table Of Contents
Bearing maintenance ....................21 Clean the pump ......................21 Fault finding ......................22 Storage and disposal ................25 Storage ........................25 Disposal ........................25 © Edwards Limited 2008. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 4 Maximum rate of pressure rise when venting ..............14 Dimensions and features of EXT555H pumps ............... 16 Installation of EXT555H optional accessories and spares ............29 Page ii © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 5 Associated publications Publication title Publication number EXC120/120E/300/300M Turbomolecular Pump Controllers D396-14-880 EXC250E/250L Turbomolecular Pump Controllers D396-36-880 EXDC Turbomolecular Pump Drive Modules D396-40-880 © Edwards Limited 2008. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 6 B777-00-880 Issue E This page has been intentionally left blank. Page iv © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 7: Introduction
Please read and follow all the instructions in this manual. The EXT555H pump is designed for use with a Edwards EXC or EXDC controller. Read this manual and the instruction manual supplied with your controller before you attempt to install or operate the equipment. The controller manual contains details of electrical installation. - Page 8 B777-00-880 Issue E This page has been intentionally left blank. Page 2 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 9: Technical Data
Ensure that the gases will not react or combine to form dangerous gases and substances. CAUTION Do not use an EXT555H pump to pump gases containing more than 20% oxygen unless a bearing purge is applied as stated in Section 2. -
Page 10: Pumps Without Gas Purge
B777-00-880 Issue E CAUTION Do not use the EXT555H pump to pump mercury vapour, and do not allow mercury to come into contact with the pump. If you do, the rotor may corrode and fail. Note: Concentrations of gases may be modified by the compression of the pump. -
Page 11: Vent Gas Specification And Vent Control Data
Table 5 Maximum water pressure 5 bar (gauge), 73.5 psig, 6 x 10 Materials exposed to cooling water Copper, brass, braise © Edwards Limited 2008. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 12: Materials Exposed To Gases Pumped
> 20 mbar Ultimate pressure <10 mbar <2 x 10 mbar Minimum backing pump 12 m displacement Recommended backing pump RV12 Page 6 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 13 Above this pressure the rotational speed of the pump drops below nominal and light gases refer to those with a rmm <28amu © Edwards Limited 2008. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 14 B777-00-880 Issue E This page has been intentionally left blank. Page 8 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 15: Installation
Installation Unpack and inspect WARNING The EXT555H DN160CF pump variant weighs 21 kg. Take care when handling the pump and ensure that you grip it firmly by the inlet flange when manoeuvring it. CAUTION Do not damage the envelope surface of the HF variant as this may cause corrosion and a reduction in performance. -
Page 16: Typical Pumping System
15. PRX10 purge restrictor 4. Inlet-screen 10. Rotary backing pump 16. Regulated purge gas supply 5. EXT pump 11. Mist filter 17. Vent-valve Page 10 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 17: Typical Installation
B777-00-880 Issue E Typical installation A typical pump system with an EXT555H pump is shown in Figure The accessories available for the EXT555H pump are detailed in Section 7.4. The accessories are shown in Figure Connection to the vacuum system Carefully remove the pump from packaging media and connect to the vacuum system. - Page 18 Figure 2 - Diagram of inlet screen - remove screws 'A' in order to remove the inlet screen. Do not remove screws 'B' Page 12 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 19: Inlet Connection
If the inlet flange of the EXT555H is not connected to a rigid, firmly fixed vacuum system, ensure that the base of the pump is fixed to a firm support. Remove the four feet and secure the pump using eight M8 screws through the tapped fixing holes in the base of the pump. -
Page 20: Vent Options, Vent Valve Connection And Control
To maintain the cleanliness of your vacuum system we recommend that, whenever you switch the pump off, you vent the pump or the vacuum system when the speed of the EXT555H pump is between full rotational speed and 50% of full rotational speed. -
Page 21: Purge Gas Connection
20% by volume. Electrical installation Note: You must electrically bond the EXT555H pump to earth (ground) using the earth (ground) screw provided on the pump (item 5, Figure 4) to ensure that the pump complies with EN61010. -
Page 22: Dimensions And Features Of Ext555H Pumps
B777-00-880 Issue E Figure 4 - Dimensions and features of EXT555H pumps 1. Backing port (NW25 4. Vent valve 2. Interstage port - Hi variants (NW25) 5. Earth bond point 3. Electrical supply connector 6. Purge plug Page 16 © Edwards Limited 2008. All rights reserved. -
Page 23: Cooling
3.7.2 Forced air cooling An air cooler accessory is available for the EXT555H pump (see Section 7). Fit the air cooler as described in the instructions supplied with it. If you wish to use alternative air cooling, ensure that the flow rate is above 280 m (80 l s , 160 cfm). -
Page 24: Magnetic Fields
The EXT555HF variant will experience large attractive forces whilst in or near magnetic fields. Ensure that the pump is firmly secured to the installation before presenting into a magnetic field. Page 18 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 25: Operation
Stand-by The EXC250 controller has a 95% speed standby option - this can be used to stop 'beating' between two EXT555H pumps on a system. Refer to the controller manual for details. The EXC300 also has a standby option, operated using the standby button on the front of the controller. This runs the pump at 70% rotational speed. -
Page 26: Safety Interlocks And Control System
If you heat your EXT555H pump (and your vacuum system), you will speed up the degassing process so that the pump will reach ultimate vacuum in the shortest possible time. If you heat the pump, this will also prevent condensation of vapours inside the pump. -
Page 27: Maintenance
Do not use abrasive materials on any surface of the HF variant. If the EXT555H pump is contaminated inside, it may not be possible to achieve the specified ultimate vacuum, or pump-down time may increase. The pump should be returned to a Edwards Service Centre where the pump will be dismantled and cleaned. -
Page 28: Fault Finding
EXC Controller configured for local (manual) operation. Note that if you use an EXC Controller configured for remote operation to control the EXT555H pump, or if you use an EXDC Pump Drive Module to control the EXT555H pump, some of the checks and actions in... - Page 29 Consult Edwards or your supplier. The EXC Controller trips into Fail - Consult Edwards or your supplier. all the speed LEDs are lit © Edwards Limited 2008. All rights reserved. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 30 If so, the rotor might be out of pitched noise? balance. Consult Edwards or your supplier. None of the above. Consult Edwards or your supplier. Page 24 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 31: Storage And Disposal
Disposal Dispose of the EXT555H Turbomolecular Pump and any components and accessories safely in accordance with all local and national safety and environmental requirements. Particular care must be taken with any components which have been contaminated with dangerous process substances. - Page 32 B777-00-880 Issue E This page has been intentionally left blank. Page 26 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 33: Service, Spares And Accessories
The majority of these employ service engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and Item Number of your equipment... -
Page 34: Inlet-Strainer (Ext555Hi Pump Only)
EXT pump. 7.4.2 EXC controller The Edwards EXC Controllers provide the facilities necessary for operating a pumping system based on an EXT555H or EXT555Hi pump. The Item Numbers of the EXC Controllers are given below. Table 12 - EXC controller... -
Page 35: Installation Of Ext555H Optional Accessories And Spares
B777-00-880 Issue E Figure 5 - Installation of EXT555H optional accessories and spares 1. Vibration isolator 7. DN10NW adaptor 12. Purge port 2. Bakeout band 8. Manual vent valve (fitted) 13. Purge plug (fitted) 3. Inlet flange seal (supplied) 9. VRX vent restrictor 14. -
Page 36: Pump-To-Controller Cable
The foreline trap minimises oil vapour backstreaming from the backing pump and is recommended where the highest system cleanliness is required. Table 16 - FL20K foreline trap Foreline trap Item Number FL20K A133-05-000 Page 30 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 37: Tav Vent-Valve And Vent-Port Adaptor
The isolator required depends on the pump inlet-flange size. Table 20 - Vibration isolators Inlet-flange size Item Number DN160ISO-K B581-25-000 DN160CF-K B581-10-000 © Edwards Limited 2008. All rights reserved. Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 38: Prx Purge-Restrictor
Table 22 - VRX vent-restrictor Vent-restrictor Orifice diameter (mm) Item Number VRX10 B580-66-021 VRX20 B580-66-022 VRX30 B580-66-023 VRX50 B580-66-024 VRX70 B580-66-025 Page 32 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.