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Description
EXT556H / DN160ISO-K
EXT556H / DN160CF
EXT556H / DN160ISO-K (fine inlet)
EXT556HF / DN160ISO-K
EXT556HF / DN160CF
Instruction Manual
EXT Compound Turbomolecular Pumps:
EXT556H and EXT556HF
B777-50-880
Issue D Original
Item Number
B777-51-000
B777-52-000
B777-61-000
B777-57-000
B777-58-000
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Table of Contents
Related Manuals for Edwards EXT Series
Summary of Contents for Edwards EXT Series
- Page 1 B777-50-880 Issue D Original Instruction Manual EXT Compound Turbomolecular Pumps: EXT556H and EXT556HF Description Item Number EXT556H / DN160ISO-K B777-51-000 EXT556H / DN160CF B777-52-000 EXT556H / DN160ISO-K (fine inlet) B777-61-000 EXT556HF / DN160ISO-K B777-57-000 EXT556HF / DN160CF B777-58-000...
- Page 2 Declaration of Conformity Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex, RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) EXT556H Compound Turbomolecular Pumps: ...
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Page 3: Table Of Contents
Rotor life ......................... 23 Clean the pump ......................23 Fault finding ......................24 Storage and disposal ................27 Storage ........................27 Disposal ........................27 © Edwards Limited 2013. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 4 Maximum rate of pressure rise when venting ..............16 Dimensions and features of EXT556H pumps ............... 18 Installation of EXT556H optional accessories and spares ............31 Page ii © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 5 Associated publications Publication title Publication number EXC120/120E/300/300M Turbomolecular Pump Controllers D396-14-880 EXC250E/250L Turbomolecular Pump Controllers D396-36-880 EXDC Turbomolecular Pump Drive Modules D396-40-880 © Edwards Limited 2013. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 6 B777-50-880 Issue D This page has been intentionally left blank. Page iv © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 7: Introduction
The pump must be used as specified in this manual. The EXT556H pump is designed for use with an Edwards EXC or EXDC controller. Read this manual and the manual supplied with the controller before installing and operating the equipment. The controller manual contains details of electrical installation. - Page 8 B777-50-880 Issue D This page has been intentionally left blank. Page 2 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 9: Technical Data
2. If so, the lubricant will be damaged and the pump will fail prematurely. Note: Concentrations of gases may be modified by the compression of the pump. © Edwards Limited 2013. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 10: Pumps Without Gas Purge
Pumps with gas purge When purged with an inert gas the pumps can be used to pump oxygen in concentrations above 20% by volume. Page 4 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 11: Vent Gas Specification And Vent Control Data
Maximum water pressure 5 bar (gauge), 73.5 psig, 6 x 10 Materials exposed to cooling water Copper, brass and nickel plating © Edwards Limited 2013. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 12: Materials Exposed To Gases Pumped
1.5 x 10 mbar Forced air cooled, 35 °C ambient 1.0 x 10 mbar Water cooling at 15 °C 2.0 x 10 mbar Page 6 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 13 Nominal rotational speed 50000 rpm Start time to 90% speed: EXC250 < 8 minutes EXC300 < 8 minutes EXDC160 < 8 minutes © Edwards Limited 2013. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 14 28 AMU and light gas for example atomic mass less than or equal to 28 AMU. †† If air cooling is required, Edwards recommends the ACX555. Page 8 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 15: Mounting Attitude Of The Ext556H Pump
B777-50-880 Issue D Figure 1 - Mounting attitude of the EXT556H pump 1. Inlet 2. Backing port © Edwards Limited 2013. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 16 B777-50-880 Issue D This page has been intentionally left blank. Page 10 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 17: Installation
Table 6 - List of items supplied Description EXT556H turbomolecular pump Inlet screen (fitted) Inlet seal (trapped 'O' ring, co-seal or copper compression gasket) © Edwards Limited 2013. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 18: Typical Pumping System
4. Inlet-screen (supplied fitted) 10. Rotary backing pump 16. Regulated purge gas supply 5. EXT pump 11. Mist filter 17. Vent-valve Page 12 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 19: The Inlet Screen (Supplied Fitted)
© Edwards Limited 2013. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 20: Do Not Remove Screws 'B
Figure 3 - Diagram of inlet screen – remove screws 'A' in order to remove the inlet screen. Do not remove screws 'B' Page 14 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 21: Backing Connection
If necessary use flexible pipe or bellows to reduce the transmission of vibration from the backing pump to the EXT556H pump. Edwards recommends using an Edwards RV backing pump. The minimum size of the backing pump required is given Table 5. -
Page 22: Maximum Rate Of Pressure Rise When Venting
Figure Refer to Section 2 for information on vent gas specification. Figure 4 - Maximum rate of pressure rise when venting Page 16 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 23: Purge Gas Connection
It is also the responsibility of the customer to ensure that no service connections present slip or trip hazards. © Edwards Limited 2013. All rights reserved. Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 24: Dimensions And Features Of Ext556H Pumps
Figure 5 - Dimensions and features of EXT556H pumps 1. Vent valve 4. Purge plug 2. Electrical supply connector 5. Earth bond point 3. Backing port (NW25) Page 18 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 25: Cooling
3. If the pump is mounted off the vertical, ensure that the water cooling plate connectors are positioned below the electrical connector so that any leaking water does not drip onto it. © Edwards Limited 2013. All rights reserved. Page 19 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 26: Magnetic Fields
The EXT556HF variant will experience large attractive forces whilst in or near magnetic fields. Ensure that the pump is firmly secured to the installation before presenting into a magnetic field. Page 20 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 27: Operation
5. As the rotor turns freely and is spinning in a vacuum, if the pump is not vented at all the rotor will take around 40 minutes to coast to a complete halt. © Edwards Limited 2013. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 28: Safety Interlocks And Control System
If heating the pump, this will also prevent condensation of vapours inside the pump. Use the Edwards BX bakeout band to heat the pump (refer to Section 7). Fit the band around the pump, just below the inlet-flange. -
Page 29: Maintenance
If the EXT556H pump is contaminated inside, it may not be possible to achieve the specified ultimate vacuum, or pump-down time may increase. The pump should be returned to a Edwards Service Centre where the pump will be dismantled and cleaned. Use the procedure included at the end of this manual. -
Page 30: Fault Finding
B777-50-880 Issue D Use any organic solvent to clean the external surfaces of the pump. Edwards recommends using non-CFC solvents, such as isopropanol or ethanol. Use a cleaning solution which is suitable for the contaminants on the pump surfaces. For environmental reasons, keep wastage of cleaning solutions and solvents to a minimum. - Page 31 Consult Edwards or the supplier. The EXC Controller trips into Fail – Consult Edwards or the supplier. all the speed LEDs are lit © Edwards Limited 2013. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 32 If so, the rotor might be out of pitched noise? balance. Consult Edwards or the supplier. None of the above. Consult Edwards or the supplier. Page 26 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 33: Storage And Disposal
Do not incinerate the pump. The pump contains phenolic and fluorosilicone materials which can decompose to very dangerous substances when heated to high temperatures. © Edwards Limited 2013. All rights reserved. Page 27 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 34 B777-50-880 Issue D This page has been intentionally left blank. Page 28 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 35: Service, Spares And Accessories
Equipment which has been serviced, repaired or rebuilt is returned with a full warranty. The local Service Centre can also provide Edwards engineers to support on-site maintenance, service or repair of the equipment. Please ensure that all accessories (i.e. water/air cooler) are removed prior to returning the pump for service. -
Page 36: Accessories
EXT pump. 7.4.2 EXC controller The Edwards EXC Controllers provide the facilities necessary for operating a pumping system based on an EXT556H pump. The Item Numbers of the EXC Controllers are given in Table... -
Page 37: Installation Of Ext556H Optional Accessories And Spares
16. Bakeout band position 17. ACX air cooler assembly 6. TAV solenoid vent valve 11. WCX water cooling accessory © Edwards Limited 2013. All rights reserved. Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 38: Bx Bakeout Band (Conflat Only)
Table 17 - ACX air-cooler Pump Air-cooler Item Number EXT556H/HF ACX555 B580-53-561 Page 32 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 39: Wcx Water-Cooler
Table 21 - VRX vent-restrictor Vent-restrictor Orifice diameter (mm) Item Number VRX10 B580-66-021 VRX20 B580-66-022 VRX30 B580-66-023 VRX50 B580-66-024 VRX70 B580-66-025 © Edwards Limited 2013. All rights reserved. Page 33 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 40 B777-50-880 Issue D This page has been intentionally left blank. Page 34 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.