Edwards EPX HiVac Series Instruction Manual page 7

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A419-00-880 Issue K
Tables
Table
Page
1 LEOs on the EPX pumps ..... .. .......... .. ............. . ... ............ ......... .. ... ............ ......... ... ... ........ 7
2 Connections ................... ......................................... . . .............. ........ ...................... ... . . 7
3 EPX L pump labelling information (Refer to Figure 4) ................ ............................................. 9
4 EPX E (Refer to Figure 5) ...... .... .......... .. .. .. ........ .................... ...... ...... ......... ................ . .. 10
5 EPX N (refer to Figure 6) .............................................................................................. 11
6 General ............................................................. ............... . ... ... .... . .................. ......... 15
7 Performance ... . ............ . ............ . ............................................................................... 15
8 Electrical data ........... .......................... ...................................................................... 16
9 Cooling water supply .................. ................ ..... ........................... ... .............................. 17
10 Nitrogen supply ............ ...... . .......... ........... .... . ...... ...... ......... ................. .................... .. 17
11 Materials in contact with process gas ............................................................................... 17
12 Tool connectors and mating tool connector kits ................................................................... 35
13 Tool input signals to the pump system ...... .. ....... ... ..... ........... ....... ............... .. ....... .. .. ......... 36
14 Output signals from the pump system ............................................................................... 36
15 EUC and PDT menu structure ........................ ...... .................... ...... .............................. ... 41
16 Maintenance plan ........................................ ..... ..................... ..................................... 59
17 Fault finding .................................................................. ................................... ........ 60
18 EPX EUC alarms and warnings ......................................................................................... 61
19 Accessory kits .................... ............... ....... .................................................... ............. 65
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