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A419-00-880
Issue
K
Number
1
2
3
4
5
Page
10
Figure 5
•
EPX E dry pump
dcs/803
11004
Tab
le 4- EPX
E
(Refer to Figure 5)
Description
Label · Product name.
XLR Connector • This may be used to connect a fab-wide network to allow remote monitoring
and control of the EPX Dry Pump.
Label · Warning do not remove cover until 4 minutes after disconnecting power from the
pump.
RJ12 Connector· This is used to connect the
optional,
external,
PDT to the
EPX
Dry
Pump.
End User Controller accessory • The End User Controller has an on-board display and keypad
that allows local control of the EPX Dry Pump. Refer to
Section
1.8
and
4
for the operation of
this.
©
Edwards Limited
2017.
AU rights reserved.
Edwards and the Edwards
logo
a re trademarks of Edwards Limited.
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