Edwards EPX HiVac Series Instruction Manual page 45

Dry vacuum pumps
Hide thumbs Also See for EPX HiVac Series:
Table of Contents

Advertisement

riicWARt:JS
A419-00-880
Issue
K
Table 14
·
Output signals from
the
pump
system
(continued)
Function
Pins
Operation
Alarm
SPI · 9 and 10
Closed when no alarm condition exists on the drive
MCM • 9 and 10
inverter. See
Section 4.3
and
4.4
for more
information.
TEL· 10 and 22
E73
6 and 14
LAM· 1 and 14
C3 · 3 and 7
HIT·
15 and 33
Gas
flow
warning
SPI
11 and 12
Closed
when
gas purge flow
warning
does not exist
MCM · 11 and 12
{closed if no gas module
is
present).
TEL • 11 and 23
LAM· 3 and 16
HIT· 16 and 34
Pump
status/
Final Valve
SPI · 13 and
14
Closed when pump running and gas purge flow
warning
does not exist.
Remote/
Local control status
E73 · 7 and 15
Closed
when
remote control is available through the
tool interface.
Notes:
1. Volt free contacts are rated at 24 V, 1 A.
2. All pump status outputs are maintained through a power
loss
of up to 1 second.
3. All status contacts open if power
is
removed.
©
Edwards limited 2017. All rights reserved.
Page 37
Edwards
and the
Edwards logo
are trademarks of Edwards limited.
::J
V')
t"'1"
QJ
-- --
QJ
t"'1"
0
::J

Advertisement

Table of Contents
loading

Table of Contents