Edwards EXS Series Instruction Manual page 64

Cause Pump has an internal leak.
Remedy Contact us.
Cause Shaft-seals are defective.
Remedy Contact us.
Fault Lubricant in the pump chamber
Cause Lubricant level is too high
Remedy Drain the lubricant down to the correct level.
Cause Lubricant is ejected from the system.
Remedy Check the system.
Cause Pump is not standing horizontally.
Remedy Place the pump correctly.
Cause Pump has a gas leak towards the outside.
Remedy Run a leak search and pinpoint leaks. If the leak is not at the oil‐fill or oil-drain
plugs, return the pump to the service.
Cause Pump has an internal leak.
Remedy Contact us.
Cause Shaft-seals are defective.
Remedy Contact us.
Fault Pump does not attain its pumping speed
Cause Pump speed(frequency) is set wrongly.
Remedy Correct the pump speed, see
Cause Intake screen is clogged.
Remedy Clean intake screen.
Cause Motor incorrectly connected.
Remedy Connect motor correctly.
Cause Motor stator defective.
Remedy Contact us.
Cause Motor rotor defective.
Remedy Contact us.
Cause Vacuum pump system has a gas leak.
Remedy Detect leak and seal it.
Cause Rotor gap is too great.
Remedy Contact us.
A41870880_A
A41870880_A - Fault finding
Table: Start, warm-up and on-process
Page 64
sequences.
07/2021 - ©Edwards Limited