Table of Contents
Related Manuals for Edwards EXT70 Series
Summary of Contents for Edwards EXT70 Series
- Page 1 B722-01-880 Issue K Original Instruction Manual EXT70 and EXT250 Turbomolecular Pumps Description Item Number EXT70/NW40 B722-03-000 EXT70/NW50 B722-04-000 EXT70/ISO63 B722-01-000 EXT70/63CF B722-02-000 EXT250/ISO100 B736-01-000 EXT250/100CF B736-02-000...
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Page 3: Table Of Contents
Maintenance ..................25 Introduction ......................25 Bearing life ......................25 Rotor life ......................... 25 Clean the pump ......................25 Fault finding ......................26 © Edwards Limited 2007. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 4 EXT250 Turbomolecular Pump dimensions (mm) ..............14 Typical pumping system ....................16 Correct installation of the inlet-screen ................17 Installation of optional accessories (and spares) ..............33 Page ii © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 5 Pump cooling methods for different applications ..............21 Fault finding ......................26 Associated publications Publication title Publication number EXT Pump Accessories D580-66-880 EXC Controllers D396-14-880 © Edwards Limited 2007. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 7: Introduction
Turbomolecular Pumps. You must use the pumps as specified in this manual. Read this manual before you install and operate the pump. The EXT Turbomolecular Pumps are designed for use with an Edwards EXC Controller. Read this manual and the instruction manual supplied with your EXC Controller before you attempt to install or operate the equipment. The EXC Controller instructions contain details of how to set up a pumping system and how to control accessories such as an air-cooler, vent-valve and bakeout band. -
Page 8: Description
Pumps with a Conflat flange are supplied with a water-cooler. All EXT pumps have thermal sensors to monitor the motor and pump-body temperature. Page 2 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 9: Cross-Section View Of Ext70 Turbomolecular Pump
8. Lower bearing 3. Magnetic bearing 9. Oil reservoir 4. Safety bearing 10. Spacer ring 5. Envelope 11. Stator 6. Shaft 12. Rotor © Edwards Limited 2007. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 10: Cross-Section View Of Ext250 Turbomolecular Pump
8. Lower bearing 3. Magnetic bearing 9. Oil reservoir 4. Safety bearing 10. Spacer ring 5. Envelope 11. Stator 6. Shaft 12. Rotor Page 4 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 11: Vent Options And Vent Control
EXC Controller is factory set to vent when the EXT pump is at 50% of full rotational speed after you have selected Stop. © Edwards Limited 2007. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 12 B722-01-880 Issue K This page has been intentionally left blank. Page 6 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 13: Technical Data
Mass: EXT70 DN40NW/DN50NW 1.4 kg EXT70 DN63CF 3.4 kg EXT70 DN63ISO-K 1.5 kg EXT250 DN100CF 5.6 kg EXT250 DN100ISO-K 8.0 kg © Edwards Limited 2007. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 14: Performance
† Ultimate pressure 48 hours after bakeout with 2-stage rotary vane backing-pump. ‡ Above this pressure, rotational speed drops below nominal. Page 8 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 15: Ext250 Performance Data
† Ultimate pressure 48 hours after bakeout with 2-stage rotary vane backing-pump. ‡ Above this pressure, rotational speed drops below nominal. © Edwards Limited 2007. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 16: Pumping Media
EXT250 pumps with gas purge When purged with an inert gas, EXT250 pumps can be used to pump oxygen in concentrations above 20% by volume. Page 10 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 17: Vent Gas Specification And Vent Control Data
Figure 3 - Maximum allowed rate of pressure rise during venting: system pressure (Pa/mbar, with the backing pump isolated) against time (s), with the pump initially at full rotational speed © Edwards Limited 2007. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 18: Purge Gas Specification (For Ext250 Only)
Minimum water-cooling flow rate (at 15 15 l h Water temperature 10 to 20 Maximum water pressure 5 bar gauge, 72 psig, 6 x 10 Page 12 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 19: Ext70 Turbomolecular Pump Dimensions (Mm)
1. Vent-valve 4. Allowance for right-angle cable connector 2. Earth (ground) screw 5. Cooling-water connectors 3. Backing-port 6. Electrical supply connector © Edwards Limited 2007. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 20: Ext250 Turbomolecular Pump Dimensions (Mm)
5. Cooling-water connectors 2. Vent-valve 6. Allowance for right-angle cable connector 3. Earth (ground) screw 7. Backing-port 4. Electrical supply connector Page 14 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 21: Installation
Section 3.5. The accessories available for these EXT pumps are detailed in Section 7.4; the accessories are shown in Figure © Edwards Limited 2007. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 22: Typical Pumping System
15. PRX10 purge restrictor 4. Inlet-screen 10. Rotary backing pump 16. Regulated purge gas supply 5. EXT pump 11. Mist filter 17. Vent-valve Page 16 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 23: Connect To The Vacuum System
EXT pump must be securely fixed to a firm support: see Section 3.3.3. © Edwards Limited 2007. All rights reserved. Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 24: Base Mounting
If the pump has an ISO flange, use the Edwards trapped ‘O’ ring supplied with the pump and use a minimum of four claw clamps to connect the inlet-flange of the pump to the vacuum system. Ensure that each claw clamp is tightened to a torque of 10 Nm or more. -
Page 25: Backing Connection
EXT pump. We recommend that you use an Edwards two-stage backing-pump. The backing-pump can also be controlled by the EXC Controller. The minimum size of the backing-pump required is given in Table 1. -
Page 26: Purge Gas Connection (Ext250 Only)
C at the inlet-flange, you must cool the pump by forced-air or water- cooling to prevent damage to the bearing lubricant. Page 20 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 27: Cooling Methods
Make sure that there is a layer of thermal contact grease on the water-cooler before you fit it to the pump. © Edwards Limited 2007. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 28 B722-01-880 Issue K This page has been intentionally left blank. Page 22 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 29: Operation
To increase system pressure or to extend the maximum inlet pressure range of the pump where this suits a particular process To avoid pump excitation of any resonances which may exist on sensitive instrumentation. © Edwards Limited 2007. All rights reserved. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 30: Shut-Down
If you heat the pump, this will also prevent condensation of vapours inside the pump. You can use the Edwards BX bakeout band to heat the pump (refer to Section 7.4.4). Fit the band around the pump, just below the inlet-flange. -
Page 31: Maintenance
We therefore recommend that you exchange your pump for a factory reconditioned replacement every 20,000 cycles, or 10 years of use, whichever occurs first. Alternatively, you can send your pump to an Edwards Service Centre for a major service (which will include rotor replacement). -
Page 32: Fault Finding
If the inside of the EXT pump is contaminated, it may not be possible to achieve the specified ultimate vacuum, or pump-down time may increase. In these circumstances, you should return the pump to an Edwards Service Centre, where the pump will be dismantled and cleaned. Use the procedure given in the forms at the end of this manual to return the pump. - Page 33 If so, a bearing is defective. Consult Edwards or your getting progressively worse? supplier. Is the EXT making a constant If so, the rotor is out of balance. Consult Edwards or high-pitched noise? your supplier. © Edwards Limited 2007. All rights reserved.
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Page 35: Storage And Disposal
Dispose of the EXT Turbomolecular Pump and any components and accessories safely in accordance with all local and national safety and environmental requirements. Take particular care with any components which have been contaminated with dangerous process substances. © Edwards Limited 2007. All rights reserved. Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 36 B722-01-880 Issue K This page has been intentionally left blank. Page 30 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 37: Service, Spares And Accessories
The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each part required: Model and Item Number of your equipment Serial number Item Number and description of part. -
Page 38: Inlet-Flange Seals
Figure 8 shows how the accessories are fitted to an EXT pump. 7.4.2 EXC Controller The Edwards EXC Controllers provide the facilities necessary for operating a pumping system based on an EXT pump. The following EXC Controllers are available: Controller Voltage... -
Page 39: Installation Of Optional Accessories (And Spares)
5. Solenoid vent-valve 11. Air-cooler 16. Inlet-screen (supplied) 6. DN10NW adaptor The design of the air-cooler varies according to pump model. © Edwards Limited 2007. All rights reserved. Page 33 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 40: Bx Bakeout Band
Section 3.7 to check the suitability of air-cooling in a particular application. Pump Air-cooler Item Number EXT70 ACX70 B580-53-050 EXT250 ACX250H B580-53-160 Page 34 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 41: Vibration Isolators
VRX vent-restrictor. Vent-restrictor Orifice diameter (mm) Item Number VRX10 B580-66-021 VRX20 B580-66-022 VRX30 B580-66-023 VRX50 B580-66-024 VRX70 B580-66-025 © Edwards Limited 2007. All rights reserved. Page 35 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 42 B722-01-880 Issue K This page has been intentionally left blank. Page 36 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.