Edwards EXT75DX Instruction Manual
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Edwards EXT75DX Instruction Manual

Ext compound turbomolecular pumps
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Description
EXT75DX
ISO63
EXT75DX
CF63
EXT75DX
NW40
EXT75DX
ISO100
EXT75DX
ISO100 (NW25 Backing)
EXT75DX
ISO63 Reversed
EXT75DXi
NW40
EXT75DXi
ISO63 (NW16 Interstage)
EXT75DXi
ISO63 (NW25 Interstage)
EXT75iiDX
ISO63 (NW16 Interstage)
EXT75iiDX
Cartridge Pump
Instruction Manual
EXT Compound Turbomolecular Pumps
EXT75DX, EXT75DXi and EXT75iiDX
Original Instructions
B722-40-880
Issue H
Item Number
B722-41-000
B722-42-000
B722-43-000
B722-45-000
B722-46-000
B722-48-000
B722-35-000
B722-37-000
B722-38-000
B722-31-000
B722-32-000

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Summary of Contents for Edwards EXT75DX

  • Page 1 B722-40-880 Issue H Instruction Manual EXT Compound Turbomolecular Pumps EXT75DX, EXT75DXi and EXT75iiDX Description Item Number EXT75DX ISO63 B722-41-000 EXT75DX CF63 B722-42-000 EXT75DX NW40 B722-43-000 EXT75DX ISO100 B722-45-000 EXT75DX ISO100 (NW25 Backing) B722-46-000 EXT75DX ISO63 Reversed B722-48-000 EXT75DXi NW40 B722-35-000...
  • Page 2 Declaration of Conformity Edwards Ltd, Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK The following product EXT75DX/DXi/iiDX B722-yy-zzz Where ‘yy’ and ‘zzz’ are numeric characters Is in conformity with the relevant requirements of European CE legislation: 2006/42/EC Machinery directive...
  • Page 3 E2M0.7, 1.5, E1M18, E2M18, 28, 30, nE2M40i nEXT Pumps nEXT 85, 240, 300, 400, Splitflow nXDS pumps nXDS 6, 10, 15, 20 EXT pumps EXT75DX XDS pumps XDS35, 46, 100 Diaphragm XDD 1, D lab Turbo Pump Carts T station, nEXPT, nEXT station 材料成分声明...
  • Page 4 This page has been intentionally left blank.

  • Page 5: Table Of Contents

    Connect the logic interface to the customer control equipment ..........24 3.5.5 Connect the electrical supply ..................25 Parallel interface mode ....................26 © Edwards Limited 2018. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 6 Operation at high temperatures ..................50 4.9.3 Operation at over-speed ....................50 4.9.4 Electrical supply failure ....................50 4.10 Bakeout ........................51 Maintenance ..................53 Introduction ......................53 Page ii © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 7 Conceptual diagram for multi-drop connection ..............29 Schematic diagram of the logic interface connections ............33 Installation of optional accessories and spares ..............67 © Edwards Limited 2018. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 8 Example decoding of system status words ................58 Inlet flange seals ......................64 Vent restrictors ......................65 Trademark credits Windows™ is trademark of Microsoft Corporation. Page iv © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 9: Introduction

    B722-40-880 Issue H Introduction Scope and definitions This manual provides installation, operation, maintenance and storage instructions for the Edwards DX Compound Turbomolecular Pumps. The pumps must be used as specified in this manual. Read this manual before installing and operating the pumps.

  • Page 10: General Description

    For details on the EXT75iiDX pumps, contact Edwards. The inlet screen and inlet strainer protect the pump against damage that would be caused by debris entering the pump. The inlet screen also protects the user against injury from the sharp blades in the pump.

  • Page 11: Operational Features

    4.1.6). If the application requires the pump to ramp up slowly, extend the time-out period. The Timer is permanently enabled for ramp-up. © Edwards Limited 2018. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 12: Analogue Output

    1.4.5 Automatic vent options An Edwards TAV vent valve can be connected directly to the DX pump’s Podule. The Podule is capable of controlling a number of different venting options. The drive electronics can control the rate of venting. Using this feature, the pump can be vented from full rotational speed in a controlled manner that will not damage the pump bearings.

  • Page 13: Electronic Braking

    The simple parallel interface is a quick and easy way to control the pump. This is the same interface used on existing 24V Edwards Turbo Pumps. The controls that are available to use are Start and Standby. The system status can be monitored using the Normal, Fail and Analogue output signals.

  • Page 14: Full Serial Control

    Standby speed using this line. The Serial Enable signal must be linked to 0 V for serial communications to take place. Edwards suggests making a special cable for serial communications that includes a link between Serial Enable and 0 V. This way, Serial Enable is automatically activated when the cable is connected and then deactivated when the cable is removed.

  • Page 15: Technical Data

    Ensure that the gases will not react or combine to form dangerous gases and substances. WARNING Do not expose any part of the human body to vacuum. © Edwards Limited 2018. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 16: Purge Gas Specification

    70 sccm flow through interstage port 10 l s 5 sccm flow through interstage port 3 l s Interstage pumping speed, for Page 8 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 17 Ultimate pressure 48 hours after bakeout with 2-stage rotary vane backing pump. † Ultimate pressure 48 hours after bakeout with P < 5 mbar (500 Pa). Note: Contact Edwards for details on the EXT75DXi and EXT75iiDX variants. Table 4 - DX pumps technical data Parameter EXT75DX Critical backing pressure 8 mbar 6.5 mbar...
  • Page 18 †† Power limit setting 80 W (EXT75DX). Note: Contact Edwards for details on the EXT75DXi and EXT75iiDX variants. WARNING Do not exceed the maximum continuous operating pressure. Doing so can result in dangerous rotor temperatures and will shorten the life of the pump.

  • Page 19: Vent Gas Specification And Vent Control Data

    Figure 2 - Maximum allowed rate of pressure rise during venting: pressure against time (with pump initially at full rotational speed) © Edwards Limited 2018. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 20: Purge Gas Specification

    Aluminium alloys, stainless steels, fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, felt, rare earth magnets, silicon nitride, phenolic resin, carbon-fibre-reinforced epoxy resin, fire retardant polypropylene, polyamide and PVC. Page 12 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 21: Electrical Data

    B722-40-880 Issue H Electrical data DX pumps can be driven either by the customer system or by the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller. If using the customer system, the size of the power supply required depends on the application. The power limit setting determines how quickly the pump ramps up and dictates the size of power supply required.

  • Page 22: Podule Connector Socket

    3, with the polarity of the pins marked when the vent valve/fan is energised. The podule connector plug is available as an accessory, see Section 7.4. Page 14 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 23: Podule Technical Data

    Connector plug Phoenix part number FKMC1881325 Voltage output 24 V d.c. +10%, -20% (19.2 to 26.4 V d.c.) Current output 120 mA © Edwards Limited 2018. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 24: Indicator Leds

    Ambient operating humidity range 10 to 90% RH (non-condensing) Maximum operating altitude 2000 m Ambient storage temperature range -30 °C to 70 °C Page 16 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 25: Installation

    This will ensure that the pump cannot operate accidentally causing injury to people. Edwards recommends leak testing the system after installation has been completed. © Edwards Limited 2018. All rights reserved. Page 17...
  • Page 26 6. Backing valve 16. Regulated purge gas supply 7. Vacuum gauge 17. WCX water cooler and connections 8. Flexible bellows 9. Foreline trap Page 18 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 27: Inlet Screen (Supplied Fitted)

    It is not possible to remove the inlet screen from a pump with an NW40 inlet flange (EXT75DX only). To remove the inlet screen from a pump with an ISO or CF inlet flange, use a bent wire hook or small screwdriver to carefully lever the inlet screen out from the inlet flange.

  • Page 28: Base Mounting

     complement of bolts to connect the inlet flange of the pump to the vacuum system. If the pump has an ISO flange, use the Edwards trapped O-ring supplied with the pump and use a minimum of  four claw clamps (each torqued to 10 Nm) to connect the inlet flange of the pump to the vacuum system.

  • Page 29: Interstage Connection (Idx Variants Only)

    Earth the pump using the connection provided and refer to Section 3.5.2. The DX pump can be operated using the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller (refer to Section 3.5.3). The DX pump can also be controlled using the customer system. Refer to Section 3.5.4...

  • Page 30: Earth (Ground) Connections

    Connect the logic interface to the TIC If an Edwards TIC Turbo Instrument Controller or TIC Turbo Controller is used to power and control the pump, the DX pump logic interface cable connects directly into the back of the TIC. Refer to the TIC Instruction Manual for further information.

  • Page 31: Parallel Interface Mode

    Standby Speed  To activate either of these control inputs, connect the control input pin to the 0 V control reference. © Edwards Limited 2018. All rights reserved. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 32: Serial Interface Mode

    DX pump units to a single serial link master. A concept drawing of one possible arrangement is shown in Figure Page 24 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 33: Serial Enable

    To send a Serial message, first activate Serial Enable. This is achieved by linking the Serial Enable input signal (pin 5) to pin 2 of the customer logic interface mating half. Edwards recommends incorporating this link into the customer Serial communications cable so that Serial Enable is only activated when the serial cable is connected. When the cable is removed, Serial Enable will become inactive.

  • Page 34: Message Structure

     The message protocol in multi-drop mode is marginally different, refer to Section 3.7.7. Page 26 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 35: Command Set

    >50% speed or hard vent if stop and <50% speed Hard vent if stop or fail Same as option 6 Vent = Permanently Enabled (Fan) © Edwards Limited 2018. All rights reserved. Page 27 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 36 There is no open vent valve command but the stop command (!C852 0) will clear the override. Page 28 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 37 Missing parameter Parameter out of range Invalid command in current state - e.g. serial command to start/stop when in parallel control mode © Edwards Limited 2018. All rights reserved. Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 38: Multi-Drop Mode

    The remainder of the message (command, query or reply) follows the same protocol as already described for  single pump systems. The wild card address 99 is very useful and means ‘any’ node.  Page 30 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 39: Vent Options, Vent Valve Connection And Control

    A manual vent valve is supplied with the DX pump. It is not possible to accurately control the rate of pressure rise using the manual vent valve so take care not to open it too quickly. Edwards recommends opening the manual vent valve only after the pump speed has fallen to 50% of full rotational speed.

  • Page 40: Alternative Valve Connected To The Vacuum System

    Serial Interface to close the vent valve before sending a Start command. This is known as a delayed start. If the DX pump is controlled with an Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller, the TAV solenoid valve can be driven from the TIC. Refer to the TIC Instruction Manuals for more information.

  • Page 41: Cooling

    (40 cfm). The air cooler can be powered by a customer external power supply, the Edwards TIC Turbo and Instrument Controller, the TIC Turbo Controller or by the Podule. It cannot be powered by the Podule if a TAV solenoid valve is already connected to the Podule.
  • Page 42 Make sure there is a layer of thermal contact grease on the water cooler before refitting it to the pump. Page 34 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 43: Operation

    The DX pump can be configured using the customer serial system. Section 4.1 details the commands that will be needed to configure the Podule. Alternatively, use the Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller. Further information regarding this is detailed in Section 4.2.

  • Page 44: Powering A Fan From The Podule

    To check what Venting Option is set, send a query as follows: Command The reply will be in the following format: Reply Page 36 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 45: Standby Speed Setting

    The Normal Speed is now stored in memory within the DX pump. To check what Normal Speed is set, send a query as follows: Command The reply will be as follows: Reply © Edwards Limited 2018. All rights reserved. Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 46: Timer Setting And Options

    To check whether the Timer is enabled or disabled, send the following query: Command The reply will be as follows (where d=0 means disabled and d=1 means enabled): Reply Page 38 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 47: Analogue Signal Options

    The reply will be as follows: Reply To check whether Electronic Braking is enabled or disabled, send the following query: Command © Edwards Limited 2018. All rights reserved. Page 39 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 48: Factory Settings

    Use the following query (using wild card address 99 which means ‘any’ node) to find out the multi-drop address of the DX pump: Command The reply will be as follows, where dd denotes the multi-drop address of the pump: Reply Page 40 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 49: Configuring The Dx Pump Using A Tic

    Configuring the DX pump using a TIC The DX pump can be configured using the Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller. It is possible to set the following parameters of the DX pump using the TIC: Power limit setting ...

  • Page 50: Pre-Start Checks

    Stop the DX pump by disconnecting the Start/Stop control input from the 0 V control reference on the logic interface connector. The pump rotor will decelerate to rest. Page 42 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 51: Parallel Monitoring

    If the pump is currently below Standby Speed, it will accelerate until it reaches Standby Speed. If it is running faster than Standby Speed, it will decelerate until Standby Speed is reached. © Edwards Limited 2018. All rights reserved. Page 43 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 52: Stop The Pump

    The reply will be as follows, where the first returned number refers to motor rotational speed in revolutions per second (Hz): Reply sp d Page 44 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 53: Simultaneous Parallel And Serial Operation

    Operation with a TIC For operation with an Edwards Turbo Instrument Controller or TIC Turbo Controller, the DX pump can be connected directly to this type of unit, which will provide the power necessary to drive the DX pump. Instructions on the setup and operation with the TIC or TIC Turbo Controller can be found on CD ROM part number D397-00-879 which is supplied with the TIC or TIC Turbo Controller.

  • Page 54: Operation At High Temperatures

    The Podule will signal a Fail condition if over-speed has been detected. If the pump appears to be running at over-speed, switch it off and consult Edwards or the supplier. 4.9.4...

  • Page 55: Bakeout

    Heating the pump will also prevent condensation of vapours inside the pump. The Edwards BX bakeout band may be used to heat the pump (refer to Section 7.4). Fit the appropriate band around the pump, just below the CF inlet flange.

  • Page 56: Behaviour Of A Pump When The Power Is Re-Instated After An Electrical Supply Failure

    Any Fail signals that were triggered during the regenerative power period are lost when the power is reinstated. Page 48 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 57: Maintenance

    If the DX pump is contaminated inside, it may not be possible to achieve the specified ultimate vacuum or pump- down time may increase. The pump should be returned to an Edwards Service Centre where the pump will be dismantled and cleaned.

  • Page 58: Fault Finding

    B722-40-880 Issue H Any organic solvents can be used to clean the external surfaces of the pump. Edwards recommends using non-CFC solvents, such as isopropanol or ethanol. Use a cleaning solution that is suitable for the contaminants on the pump surfaces.
  • Page 59 If so, the rotor is out of balance. pitched noise? Contact the supplier or Edwards. Any other problems Contact the supplier or Edwards. © Edwards Limited 2018. All rights reserved. Page 51 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 60: Flashing Error Codes

    The reply will be as follows, where the first returned number refers to motor rotational speed in revolutions per second (Hz): Reply sp d Page 52 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 61: Hexadecimal Conversion Table

    Bit number Status flag Active flags means Fail Fail status condition active Stopped speed Below stopped speed Normal speed Above normal speed © Edwards Limited 2018. All rights reserved. Page 53 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 62: Example Decoding Of System Status Words

    Over-speed and Over-current trip not activated Pump internal temperature measurement system is fine Serial enable has not become inactive during serial control Page 54 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 63: Useful Service Information

    Send the following query to find out the PIC software version: Command The reply is as follows, where String1 is the PIC software version number: Reply String 1 © Edwards Limited 2018. All rights reserved. Page 55 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 64 B722-40-880 Issue H This page has been intentionally left blank. Page 56 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 65: Storage And Disposal

    Do not incinerate the pump. The pump contains phenolic and fluorosilicone materials that can decompose to very dangerous substances when heated to high temperatures. © Edwards Limited 2018. All rights reserved. Page 57 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 66 B722-40-880 Issue H This page has been intentionally left blank. Page 58 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 67: Service, Spares And Accessories

    Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, USA, and a world-wide network of distributors. Order spare parts and accessories from the nearest Edwards company or distributor. When ordering, please state for each part required: Model and Item Number of the equipment ...

  • Page 68: Inlet Strainer

    A water cooler can be fitted to the DX pump. Refer to Section 2.5 to check the suitability of the cooling water supply. Water Cooler Item Number WCX500 water cooling kit B736-00-121 Page 60 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 69: Bx Bakeout Band

    The vent port adaptor has a 1/8 inch BSP male thread that can be screwed into both the vent port and purge port, making them suitable for NW10 fittings. Vent port adaptor Item Number Vent Port adaptor NW10 -1/8 inch BSP male B580-66-011 © Edwards Limited 2018. All rights reserved. Page 61 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 70: Prx Purge Restrictor

    TIC Turbo Controller (200 W) D397-12-000 TIC Turbo and Instrument Controller (100 W) D397-21-000 TIC Turbo and Instrument Controller (200 W) D397-22-000 Page 62 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 71: Tic Pc Program

    16. ACX air cooler 8. Purge port blank (supplied) 17. BX bakeout band 9. Purge port adaptor 18. Inlet screen (supplied fitted) EXT75DXi only © Edwards Limited 2018. All rights reserved. Page 63 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 72 B722-40-880 Issue H This page has been intentionally left blank. Page 64 © Edwards Limited 2018. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

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