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Related Manuals for Edwards EXT70/70200
Summary of Contents for Edwards EXT70/70200
- Page 1 B756-50-880 Issue C Original Instruction Manual EXT70/70/200H...
- Page 2 Declaration of Conformity Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex, RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) EXT70/70/200 24V system B756-52-991 ...
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Page 3: Table Of Contents
Vent valves ......................22 Service ........................22 For return of equipment, complete the HS Forms at the end of this manual. © Edwards Limited 2013. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 4 Spares Items ......................22 Vent valves ......................22 Associated publications Publication title Publication number Vacuum pump and vacuum system safety P400-40-000 Page ii © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 5: Introduction
200H system and the integral cartridge pumps. The pumps must be used as specified in this manual. Read this manual before installing and operating the pumps. The EXT70/70/200H is designed for use with an Edwards EXDC160 Controller. Read the instruction manual supplied with the controller before attempting to install or operate the equipment. The controller manual contains details of electrical installation. - Page 6 WARNING Under no circumstances should the pump be run other than when installed in the Edwards approved sealed chamber. There is no inlet screen fitted to the end of the cartridge pump and the blades of the turbo pump are visible and accessible through the pump envelope at this point.
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Page 7: Technical Data
If there is a requirement to pump a gas not in the list above, contact the supplier for advice. If the supplier is not contacted, the warranty on the pump may be invalidated. The pumps are not suitable for pumping aggressive or corrosive gases. © Edwards Limited 2013. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 8: Vent Gas Specification And Vent Control Data
Noise level (at 1 metre) < 50 dB(A) Recommended controller EXDC160 24 V EXDC160 maximum VA input 250 VA Quiescent power 25 W Page 4 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 9: Materials Exposed To Gases Pumped
< 1 micron. The total weight of the coating on the chamber is approximately 20 mg. © Edwards Limited 2013. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 10: Ext70/70/200H Dimensions
B756-50-880 Issue C Figure 1 - EXT70/70/200H dimensions This page has been intentionally left blank. Page 6 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 11: Installation
Check that the package contains the items listed in Table 2. If any of these items is missing, notify the supplier in writing within three days. © Edwards Limited 2013. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 12: Installation
One of the supplied eyebolts should be temporarily fitted to the side position highlighted on Figure 3 aid manoeuvring the system on to the LCT Premier flight tube. Page 8 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 13: Connection To The Lct Premier System
- refer to Figure The system mounting must be suitably rigid and capable of absorbing the rotational energy generated by the unlikely event of a failure of the pump rotor. Contact Edwards for further information. 3.3.1 Connection of the EXDC160 module The EXT70/70/200H is supplied with the EXDC160 module fitted. -
Page 14: Backing Connection
70/200H Split Flow pump. Edwards recommends using an Edwards E2M28 rotary vane or XDS35I scroll backing pump. It may be necessary to use a larger backing pump if the pump is run at a high inlet pressure. The EXT70/70/200H is also suitable for use with... -
Page 15: Exdc160 Controllers
If using an alternate fan for air cooling, ensure that the flow rate is above 70 (40 cfm). © Edwards Limited 2013. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 16 B756-50-880 Issue C This page has been intentionally left blank. Page 12 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 17: Operation
The pump protection and safety interlock features are described in Section 4.3.1. Refer to the instruction manual supplied with the controller for a full description of these features. © Edwards Limited 2013. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 18: Exdc160 Controller
If the EXDC160 controller detects excessive power consumption or temperature, the rotational speed of the pump motor is reduced until the power and temperature return to normal. Page 14 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 19: Maintenance
5. Store the cartridge pump in an upright position on the four rubber feet at the base of the pump. © Edwards Limited 2013. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 20: Refitting The Cartridge Pump To The System
3. Once a thin, even, sheen of grease is evident on the O-ring, slowly manoeuvre the O-ring over the pump until it can be smoothed into the O-ring land nearest the body of the cartridge pump. Page 16 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 21: Pressing The Pump In Place With The Fixing Bolts
Alternatively, send the pump to an Edwards Service Centre to have the bearings replaced. When returning EXT70/70/200H pumps to Edwards Service Centres, use the procedure included at the end of this manual. Note that the instruction to drain all fluids does not apply to the lubricant in the EXT70/70/200H pump oil reservoirs. - Page 22 If so, the rotor is out of balance. high-pitched noise? Consult Edwards or the supplier. None of the above. Consult Edwards or the supplier. Page 18 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 23: Storage And Disposal
Do not incinerate the pump. The pump contains phenolic and fluorosilicone materials that can decompose to very dangerous substances when heated to high temperatures. © Edwards Limited 2013. All rights reserved. Page 19 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 24 B756-50-880 Issue C This page has been intentionally left blank. Page 20 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 25: Service, Spares And Accessories
The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from the nearest Edwards company or distributor. When ordering, state for each part required: Model and Item Number of the equipment. -
Page 26: Vent Valves
TAV6 vent valve Service Edwards products are supported by a worldwide network of Edwards Service Centres. Each Service Centre offers a wide range of options including: equipment decontamination; service exchange; repair; rebuild and testing to factory specifications. Equipment which has been serviced, repaired or rebuilt is returned with a full warranty.