Commission The Dry Pumping System - Edwards EXS Series Instruction Manual

Dry screw vacuum pump
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WARNING:
The surfaces of the dry pump, booster (if fitted) and spools are very hot when the dry
pumping system is running. Allow these surfaces to cool to safe temperatures before
installing the accessories inside the enclosure. Be sure to route and secure accessory
cables as shown in their installation manuals to prevent the cables from resting on
hot surfaces.
Refer to the individual accessories manuals for installation information.

5.12 Commission the dry pumping system

WARNING:
During some application cycles, the dry pumping system may exceed the OSHA
1910.95 Occupational Noise Exposure Limits, the EU noise directive 2003/10/EC or
other regional noise limits dependent upon the process, duty cycle, installation or
environment in which the dry pumping system is being operated. A sound pressure
survey must be conducted after installation. If necessary, the controls must be
implemented to ensure that the relevant limits are not exceeded during the
operation and that adequate precautions are taken to prevent the person from
exposure to the high noise levels during the operation.
1.
Before starting the pump, the main power supply should be connected correctly
and cooling water and purge gas need to be checked.
2.
Switch on the cooling water and purge gas supplies.
3.
Ensure that the exhaust extraction system is not blocked (for example, that valves
in the exhaust extraction system are open).
4.
Ensure that all openings to atmospheric pressure in the foreline vacuum system
are closed.
5.
Either connect the main power supply or install the run button (1x6:6 and 1x6:7).
6.
If the dry pumping system starts and continues to operate, continue at step 8. If a
warning or alarm condition is indicated:
7.
Look at the pressure gauge in the inlet pipeline:
8.
Visually check the purge gas dial pressure gauge on the rear of the pump to ensure
that the purge gas is being delivered to the pump. Continue to check the dial
pressure gauge regularly as the dry pumping system is used.
9.
After the dry pumping system is commissioned:
A41870880_A
A41870880_A - Installation
Shut down the dry pumping system. Refer to
Contact us.
If the pressure is increasing, immediately shut down the dry pumping system
and contact us.
If the pressure is decreasing, continue to step 9.
To continue to operate the dry pumping system, refer to
Otherwise, shut down the dry pumping system. Refer to
page 51.
Page 46
Manual shut down
on page 51.
Start up
on page 50.
Manual shut down
07/2021 - ©Edwards Limited
on

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