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EXT Split Flow Compound Turbomolecular Pumps
Description
24 Volt EXT Compound Turbomolecular Pumps:
EXT200/200H
EXT200/200Hi
EXT70/200H
EXT200/200H
EXT200/200H GCMS (Reversed Body)
EXT200/200H LCMS (Reversed Body)
24 Volt EXT system (comprising Compound
Turbomolecular Pump and EXDC160):
EXT200/200H
EXT200/200Hi
EXT70/200H
EXT200/200H ICPMS
EXT200/200H GCMS
EXT200/200H GCMS (Reversed Body)
EXT200/200H LCMS (Reversed Body)
Instruction Manual
Item
Description
Number
80 Volt EXT Compound Turbomolecular Pumps:
B756-01-991 EXT200/200H
B756-02-991 EXT200/200Hi
B756-03-991 EXT70/200H
B756-24-991 EXT200/200H ICPMS
B756-41-991 80 Volt EXT system (comprising Compound
Turbomolecular Pump and EXDC160)
B756-43-991 EXT200/200H
EXT200/200Hi
EXT70/200H
B756-21-991
B756-22-991
B756-23-991
B756-30-991
B756-40-991
B756-42-991
B756-44-991
B756-01-880
Issue J Original
Item
Number
B756-01-000
B756-02-000
B756-03-000
B756-30-000
B756-21-000
B756-22-000
B756-23-000
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Table of Contents
Related Manuals for Edwards EXT200/200H LCMS
Summary of Contents for Edwards EXT200/200H LCMS
- Page 1 B756-03-991 EXT70/200H B756-03-000 EXT200/200H B756-24-991 EXT200/200H ICPMS B756-30-000 EXT200/200H GCMS (Reversed Body) B756-41-991 80 Volt EXT system (comprising Compound Turbomolecular Pump and EXDC160) EXT200/200H LCMS (Reversed Body) B756-43-991 EXT200/200H B756-21-000 EXT200/200Hi B756-22-000 24 Volt EXT system (comprising Compound EXT70/200H B756-23-000...
- Page 2 EXT200/200H GCMS (Reversed body) B756-41-991 ‡ EXT200/200Hi B756-22-991 * EXT200/200H GCMS (Reversed body) B756-42-991 ‡ * EXT70/200H B756-23-991 * EXT200/200H LCMS (Reversed body) B756-43-991 ‡ EXT200/200H B756-24-991 EXT200/200H LCMS (Reversed body) B756-44-991 ‡* SPLIT-FLOW EXT Compound Turbomolecular Pump (80 Volts): EXT200/200H...
- Page 3 The relevant technical documentation has been compiled in accordance with Annex VII Part B. In response to a reasoned request by the national authorities, Edwards Ltd undertakes to provide relevant information on the partly completed machinery (via email).
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Page 5: Table Of Contents
Storage and disposal ................27 Storage ........................27 Disposal ........................27 Service, spares and accessories .............. 29 Introduction ......................29 Service ........................29 © Edwards Limited 2010. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 6 Pump-to-controller cable ....................31 EXT water cooling block assembly ................... 31 TAV vent-valve and vent-port adaptor ................31 ACX air-cooler ......................31 VRX vent-restrictor .....................32 Page ii © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 7: Introduction
Covering both the 24 V and 80 V variants. Please read and follow all instructions in this manual. The EXT Split Flow Pumps are designed for use with an Edwards EXDC or EXC Controller. Read this manual and the instruction manual supplied with your controller before you attempt to install or operate the equipment. - Page 8 B756-01-880 Issue J This page has been intentionally left blank. Page 2 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 9: Technical Data
It is the customers responsibility to leak check their system to ensure any process gases cannot escape to the atmosphere and cause a hazard. WARNING Gases pumped from different inlets may combine to cause dangerous mixtures. © Edwards Limited 2010. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 10: Vent Gas Specification And Vent Control Data
Maximum vent gas pressure < 0.5bar gauge (7 psig, 0.5x10 Pa gauge)* * If you wish to use vent pressures in excess of this value, please consult Edwards Page 4 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 11: Water-Cooling
15 l hr Water temperature Table 4 Maximum water pressure 5 bar (gauge), 73.5 psig, 6x10 Materials exposed to cooling-water Nickel plated brass © Edwards Limited 2010. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 12: Technical Data
2.5 x 10 2 x 10 2 x 10 3.3 x 10 6 x 10 1.7 x 10 7 x 10 Page 6 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 13 60000 r min speed Standby rotational speed 42000 r min 42000 r min 42000 r min 42000 r min EXC controller only © Edwards Limited 2010. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 14 ††† Above this pressure, rotational speed drops below nominal. ‡‡‡ A larger backing pump may be required for maximum throughput. Page 8 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 15: Materials Exposed To Gases Pumped
1. TAV5 vent valve 4. Main inlet 2. 8 slots 8.4 mm wide 5. EXDC controller 3. Side inlet 6. Backing port © Edwards Limited 2010. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 16: Dimensions Of The Ext 200/200H Gcms Split Flow Pump System (Units In Mm)
4. TAV5 vent valve 1. 8 slots 8.4 mm wide 5. Main inlet 2. EXDC controller 6. Side inlet 3. Backing port Page 10 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 17: Dimensions Of The Ext 200/200H Icpms Split Flow Pump System (Units In Mm)
4. Vent port 1. 8 slots 8.4 mm wide 5. Main inlet 2. Controller connection 6. Side inlet 3. Backing port © Edwards Limited 2010. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 18: Dimensions Of The Ext 200/200H Gcms/Lcms (Reversed Body)
4. 8 slots 8.4 mm wide 1. Extended vent-port adaptor 5. Main inlet 2. Backing port 6. Side inlet 3. EXDC controller Page 12 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 19: Installation
Typical installation CAUTION Local legislation concerning the impact of the pump on the environment must be followed when installing the pump. © Edwards Limited 2010. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 20: Connection To The Vacuum System
Install the pump in the vacuum system before you connect the controller to the power supply. This will ensure that the pump cannot operate and injure people during installation. Page 14 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 21: Mechanical Fixing
For variants listed under the Declaration of Incorporation refer to your own guide lines for mechanical fixing. © Edwards Limited 2010. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 22: Inlet-Screens (Supplied Fitted) Or Integral Mesh Centering Ring (Supplied Separate From The Pump)
Figure 6, with the Edwards logo uppermost. Ensure that the dimples on the rim of the screen engage in the groove in the pump flange. If necessary, gently bend the tabs of the screen outwards to ensure a tight fit. -
Page 23: Backing Connection
B756-01-880 Issue J Use the Edwards trapped o-ring supplied with the pump and use a minimum of four fixing bolts to connect the inlet- flange of the pump to the vacuum system. M8 bolts should be tightened to a torque of 5-6 Nm. -
Page 24: Interstage Connection (Hi Pump Variants Only)
WARNING It is the responsibility of the customer to ensure that the power supply used is correctly rated/ protected. Page 18 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 25: Exdc Controllers
Backing pressure > 8 mbar (800 Pa) and interstage flow > 30 sccm (0.5 mbar l s , 50 Pa l s © Edwards Limited 2010. All rights reserved. Page 19 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 26: Forced-Air Cooling
M4 cap-head fixing-screws and remove the water-cooler from the pump. Make sure that there is a layer of thermal contact grease on the water-cooler before you refit it to the pump. Page 20 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 27: Operation
EXDC/EXC Controller. Note: In an emergency only, open the vent-valve quickly to decelerate the pump rotor in the shortest possible time. © Edwards Limited 2010. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 28: Safety Interlocks And Control System
Note: Any references to LEDs and buttons do not apply to OEM versions of the EXC Controller i.e. EXC100L or EXC100. Page 22 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 29: Maintenance
Alternatively, you can send your pump to an Edwards Service Centre to have the bearings replaced. When you return EXT Split Flow Pumps to Edwards Service Centres please use the procedure included at the end of this manual. However, the instruction to drain all fluids does not apply to the lubricant in the EXT Split Flow Pump oil-reservoirs. -
Page 30: Cleaning The Pump
If the inside of the EXT Split Flow pumps is contaminated, it may not be possible to achieve the specified ultimate vacuum, or pump-down time may increase. In these circumstances the pump must be returned to an Edwards Service Centre, where the pump will be dismantled and cleaned. Use the procedure given in the forms at the end of this manual to return the pump. -
Page 31: Fault Finding
EXC Controller). If the EXC Controller still trips into Fail consult Edwards or your supplier. © Edwards Limited 2010. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 32 If so, the rotor is out of balance. constant high-pitched noise? Consult Edwards or your supplier. None of the above. Consult Edwards or your supplier. Page 26 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 33: Storage And Disposal
The pump contains phenolic and fluorosilicone materials which can decompose to very dangerous substances when heated to high temperatures. © Edwards Limited 2010. All rights reserved. Page 27 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 34 B756-01-880 Issue J This page has been intentionally left blank. Page 28 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 35: Service, Spares And Accessories
Germany, Hong Kong, Italy, Japan, Korea, United Kingdom, USA and a worldwide network of distributors. The majority of these employ service engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. -
Page 36: Inlet-Strainer (Interstage Pumps Only)
Pump system originally supplied with D396-46-510 (unpackaged) 7.4.3 EXC controllers The Edwards EXC Controllers provide the facilities necessary for operating a pumping system based on an EXT70/ 200H, EXT70/200Hi, EXT200/200H or EXT200/200Hi Split Flow Pump. The Item Numbers of the EXC Controllers are given below. -
Page 37: Pump-To-Controller Cables
Section 2 to check the suitability of air-cooling in a particular application. Table 16 - ACX air-cooler Air-cooler Item Number ACX250H B580-53-160 © Edwards Limited 2010. All rights reserved. Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 38: Vrx Vent-Restrictor
B580-66-025 Figure 8 - Installation of optional accessories 3. TAV vent-valve 1. ACX cooling fan 4. EXDC controller 2. WCX water-cooler Page 32 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 39: Index
ISX Inlet-Screens ......... 29 Maintenance ..........23 Materials exposed to gases pumped ....9 Mechanical fixing ........15 Pumping media ..........3 Pump-to-controller cables ......31 © Edwards Limited 2010. All rights reserved. Page 33 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 40 B756-01-880 Issue J This page has been intentionally left blank. Page 34 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.