Edwards EXTPX Series Instruction Manual
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Edwards EXTPX Series Instruction Manual

Split flow compound turbomolecular vacuum pump
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Description
24 Volt EXT400/200PX Split flow compound Turbomolecular Vacuum Pump
24 Volt EXT400/200PX Split flow compound Turbomolecular Vacuum Pump
24 Volt EXT400/200/30iPX Split flow compound Interstage Turbomolecular Vacuum Pump
24 Volt EXT400/200/30iPX Split flow compound Cartridge Interstage Turbomolecular Vacuum Pump
Instruction Manual
EXTPX Split Flow
B760-60-880
Issue A Original
Item Number
B760-61-991
B760-62-991
B760-67-991
B760-53-991

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Summary of Contents for Edwards EXTPX Series

  • Page 1 B760-60-880 Issue A Original Instruction Manual EXTPX Split Flow Description Item Number 24 Volt EXT400/200PX Split flow compound Turbomolecular Vacuum Pump B760-61-991 24 Volt EXT400/200PX Split flow compound Turbomolecular Vacuum Pump B760-62-991 24 Volt EXT400/200/30iPX Split flow compound Interstage Turbomolecular Vacuum Pump B760-67-991 24 Volt EXT400/200/30iPX Split flow compound Cartridge Interstage Turbomolecular Vacuum Pump B760-53-991...
  • Page 4 This page has been intentionally left blank.

  • Page 5: Table Of Contents

    Fault finding ......................28 Storage and disposal ................31 Storage ........................31 Disposal ........................31 Service, spares and accessories .............. 33 © Edwards Limited 2007. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 6 Correct installation of inlet screen .................. 17 Correct mounting attitude of the EXTPX split flow pump ............19 Installation of optional accessories .................. 36 Page ii © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 7 EXDC Turbomolecular pump drive module D396-45-880 TIC (100 W and 200 W) manual D397-22-880 TIC range CD D397-00-879 EXT pump accessories manual B580-65-880 © Edwards Limited 2007. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 8 B760-60-880 Issue A This page has been intentionally left blank. Page iv © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 9: Introduction

    EXT400/200PX and EXT400/200/30iPX split flow compound turbomolecular vacuum pumps, hereafter referred to as EXTPX split flow pumps. Please read and follow all instructions in this manual. The EXTPX split flow pump is designed for use with an Edwards 24 V EXDC160 drive module unless using Argon (please refer to Section 2.2) when an EXDC80 drive module may be recommended.
  • Page 10 B760-60-880 Issue A This page has been intentionally left blank. Page 2 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 11: Technical Data

    200 l s 200 l s 150 l s Peak interstage inlet pumping speed 27 l s 27 l s 27 l s © Edwards Limited 2007. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 12 15%. Actual pumping speed for different envelope variants will be dependent on inlet geometry and flow distribution between ports. Page 4 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 13: Pumping Media

    Power Limit Zone: The temperatures shown are pump local ambients. The tests were performed with a single radial fan cooling the pump. If extra cooling is added, extra performance can be obtained. Exact limits will be based on application requirements, cooling method and pump configuration; please consult Edwards to ensure suitability. Also refer to Section 3.7...
  • Page 14 An EXDC160 drive module is recommended for most applications. However, when pumping high concentrations of Argon (over 50% of gas mixture) an EXDC80 drive module is recommended to protect the pump against overheating. If in any doubt, please contact your local Edwards Vacuum Representative. CAUTION Do not use the EXTPX split flow pump to pump particulates or condensable media.

  • Page 15: Vent Gas Specification And Vent Control Data

    < 0.5 bar gauge (7 psig, 0.5 x 10 Pa gauge) If you wish to use vent pressures in excess of this value, please consult Edwards. Purge gas specification and data When purged with an inert gas, the pumps can be used to pump oxygen in concentrations above 20% by volume.
  • Page 16 2. Base mounting holes (remove feet) 8. Side port 3. Purge port 9. Main port 4. Booster port 10. Vent port 5. Backing-pump port Page 8 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 17 3. Purge port 9. Main port 4. Booster port 10. Vent port 5. Backing-pump port 11. End port 6. Earth screw © Edwards Limited 2007. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 18 9. Side port 3. Purge port 10. Vent port 4. Booster port 11. End port 5. Backing-pump port 6. Earth screw Page 10 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 19 11. Interstage port 4. Backing-pump port 12. Side port 5. Earth screw 13. Vent port 6. Electrical connector 7. Base mounting holes © Edwards Limited 2007. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 20 B760-60-880 Issue A This page has been intentionally left blank. Page 12 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 21: Installation

    ISO160 inlet screen (supplied fitted) Inlet protection strips (supplied fitted) Booster port O-ring and inlet strainer (fitted) Inlet O-ring seals (supplied loose) Covers © Edwards Limited 2007. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 22: Typical Installation

    Local legislation concerning the impact of the pump on the environment must be followed when installing and removing the pump. A typical pumping system with an EXTPX split flow pump is shown in Figure Page 14 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 23 OSRVP = Oil Sealed Rotary Vane Pump The accessories available for the EXTPX split flow pump are detailed in Section 7.4 and are shown in Figure © Edwards Limited 2007. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 24: Connection To The Vacuum System

    To remove an inlet screen, carefully extract it from the inlet-flange using a bent wire hook. Once removed, a screen is not reusable. Spares are available (refer to Section Page 16 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 25: Inlet Connection And Pump Orientation

    Use the O-rings supplied with the pump and use four M8 bolts tightened to a torque of 20 Nm (15 lb ft) to connect the inlet-flange of the pump to the vacuum system. © Edwards Limited 2007. All rights reserved. Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 26 13,000 Nm may be transmitted to the chamber for a very short time. It is the responsibility of the user to ensure that the vacuum system is capable of containing the rotor fragments in the event of a catastrophic failure. Contact Edwards for further information if required.
  • Page 27 B760-60-880 Issue A Figure 8 - Correct mounting attitude of the EXTPX split flow pump © Edwards Limited 2007. All rights reserved. Page 19 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 28: Backing-Port Connection

    If necessary, use flexible pipe or bellows to reduce the transmission of vibration from the backing-pump to the EXTPX split flow pump. The EXTPX split flow pump is suitable for use with Edwards Rotary Vane, Scroll or diaphragm backing-pumps. The system performance may depend upon which pump is used, hence we recommend that you consult Edwards to help select an appropriate backing-pump for your application.

  • Page 29: Purge Gas Connection

    EXDC drive module; the impedance between the pump-body and earth connection point must be less than 0.1 Ohms. Refer to the instruction manual supplied with the controller to complete the electrical installation. © Edwards Limited 2007. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 30: Exdc Drive Module

    Ensure that the water supply is constant and within the quality, temperature and flow rate limits detailed in Table Page 22 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 31: Magnetic Fields

    Nickel plated brass Magnetic fields WARNING If you wish to use the pump in or near magnetic fields please consult Edwards. © Edwards Limited 2007. All rights reserved. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 32 B760-60-880 Issue A This page has been intentionally left blank. Page 24 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 33: Operation

    5. The pump will then accelerate to full operating speed. The normal-speed LED on the EXDC drive module will illuminate once nominal operating speed is reached. Note: Refer to the controller manual if using the TIC controller. © Edwards Limited 2007. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 34: Shut-Down

    Bakeout CAUTION Bakeout of envelopes would lead to damage of this product - do not bake. Page 26 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 35: Maintenance

    When you return the EXTPX split flow pump to an Edwards Service Centre please use the procedure included at the end of this manual. Please note that the instruction to drain all fluids does not apply to the lubricant in the EXTPX split flow pump oil-reservoir.

  • Page 36: Fault Finding

    In these circumstances the pump must be returned to an Edwards Service Centre, where the pump will be dismantled and cleaned. Use the procedure given in the forms at the end of this manual to return the pump.
  • Page 37 If so, the rotor may be out of a constant high-pitched noise? balance. Consult Edwards or your supplier. None of the above. Consult Edwards or your supplier. © Edwards Limited 2007. All rights reserved. Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 38 B760-60-880 Issue A This page has been intentionally left blank. Page 30 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 39: Storage And Disposal

    Particular care must be taken with any components which have been contaminated with dangerous process substances. © Edwards Limited 2007. All rights reserved. Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 40 B760-60-880 Issue A This page has been intentionally left blank. Page 32 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 41: Service, Spares And Accessories

    Kingdom, USA and a worldwide network of distributors. The majority of these employ service engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment.

  • Page 42: Accessories

    Vac system (litres) TAV5 vent-valve B580-66-010 0.5 mm <5 TAV6 vent-valve B580-66-020 1.0 mm <20 NW10-1/8 inch BSP male adaptor B580-66-011 Page 34 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 43: Vrx Vent-Restrictor

    A water-cooler can be fitted to the EXTPX split flow pump. Please refer to Section 3.7.3 to check the suitability of the water-cooling supply. Table 16 - WCX water-cooler Water-cooler Item Number WCX250 B735-01-164 © Edwards Limited 2007. All rights reserved. Page 35 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 44 3. DN10NW adaptor 10. WCX water-cooler 4. VRX vent restrictor 5. Manual vent-valve (fitted) 11. EXDC drive module 6. TAV solenoid vent-valve Page 36 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 45: Index

    WCX water-cooler ........35 Magnetic fields ........... 23 Maintenance ..........27 Materials exposed to gases pumped ....7 Mechanical fixing ........16 Operation ..........25 © Edwards Limited 2007. All rights reserved. Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 46 B760-60-880 Issue A This page has been intentionally left blank. Page 38 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

This manual is also suitable for:

Ext400/200pxExt400/200/30ipx

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