Edwards EXS Series Instruction Manual page 19

Table 6 Gas system flow option
Gas system type
Description
Gas ballast purge
(with manually adjus-
EXS450/750 †
ted flow) + shaft seal
purge
† The dry pumping systems in a standard configuration must run with a seal purge. If the application requires the removal of a seal purge, consult our
application specialist.
A41870880_A
A41870880_A - Technical data
Valve
MV-1 off
MV-2 off
MV-1 on
MV-3 HIGH VAC- MV-2 off
UUM MODE
MV-1 off
MV-2 on
MV-1 on
MV-2 on
MV-1 off
MV-2 off
MV-1 on
MV-2 off
MV-3 HIGH FLOW
MODE
MV-1 off
MV-2 on
MV-1 on
MV-2 on
Page 19
Gas flows (slm)
LV shaft seal HV shaft seal
purge purge
6 0.01
6 0.01
6 0.01
6 0.01
6 6
6 6
6 6
6 6
Total flow
Balance Manually‐ adjus‐
purge ted gas ballast
6 0
6 50
6 80
6 130
0.01 0
0.01 50
0.01 80
0.01 130
07/2021 - ©Edwards Limited
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