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Low Voltage EXT Compound Molecular Pumps:
EXT70H 24V, EXT70Hi 24V
Description
EXT70H/ISO63 24 V
EXT70H/CF63 24 V
EXT70H/NW40 24 V
EXT70H/ISO100 24 V
EXT255H/ISO100 24 V
EXT255H/CF100 24 V
EXT255Hi/ISO100 24 V
EXT255H/ISO100 24 V (Coarse Inlet Screen)
*
The EXT70Hi 24 V pump is an EXT70H/ISO63 24 V pump with an interstage-port accessory fitted. Refer to the text of this
instruction manual for further information.
Instruction Manual
*
, EXT255H 24V and EXT255Hi 24 V
B722-20-880
Issue D Original
Item Number
B722-21-991
B722-22-991
B722-23-991
B722-26-991
B753-01-991
B753-02-991
B753-03-991
B753-05-991
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Table of Contents
Related Manuals for Edwards EXT70H Series
Summary of Contents for Edwards EXT70H Series
- Page 1 B722-20-880 Issue D Original Instruction Manual Low Voltage EXT Compound Molecular Pumps: EXT70H 24V, EXT70Hi 24V , EXT255H 24V and EXT255Hi 24 V Description Item Number EXT70H/ISO63 24 V B722-21-991 EXT70H/CF63 24 V B722-22-991 EXT70H/NW40 24 V B722-23-991 EXT70H/ISO100 24 V B722-26-991 EXT255H/ISO100 24 V B753-01-991...
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Page 3: Table Of Contents
Maintenance ..................27 Introduction ......................27 Bearing life ......................27 Rotor life ......................... 27 Clean the pump ......................27 Fault finding ......................28 © Edwards Limited 2008. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 4 Checklist of items .......................15 Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve) ....21 Fault finding ......................28 Page ii © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 5 B722-20-880 Issue D Associated publications Publication title Publication number EXDC Turbomolecular pump drive modules D396-40-880 © Edwards Limited 2008. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 6 B722-20-880 Issue D This page has been intentionally left blank. Page iv © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 7: Introduction
Section The EXT Compound Molecular Pumps are designed for use with a Edwards Turbomolecular Pump Drive Module (abbreviated to EXDC Drive Module in the remainder of this manual). Read this manual and the instruction manual supplied with your EXDC Drive Module before you attempt to install or operate the equipment. -
Page 8: General Description
1), or that the vent-valve is only opened after the EXT pump speed has fallen to 50% of full rotational speed. Page 2 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 9: Maximum Allowed Rate Of Pressure Rise During Venting: Pressure Against Time (With The Pump Initially At Full Rotational Speed)
Figure 1 - Maximum allowed rate of pressure rise during venting: pressure against time (with the pump initially at full rotational speed) © Edwards Limited 2008. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 10 B722-20-880 Issue D This page has been intentionally left blank. Page 4 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 11: Technical Data
If you do, the pump rotor may corrode and fail. Note: Note that concentrations of gases may be modified by the compression of the pump. © Edwards Limited 2008. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 12: Pumps Without Gas Purge
0.1 parts per million Time for rotational speed to reach 50% 15 s Maximum allowed rate of pressure rise Figure 1 Page 6 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 13: Ext70H 24 V Dimensions (Mm)
5. Allowance for right-angle cable connector 2. Electrical supply connector 6. Position of blanked off interstage port 3. Cooling-water connectors (70H ISO63 only) © Edwards Limited 2008. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 14: Ext255H/Hi 24 V Dimensions (Mm)
6. Cooling-water connectors 2. Vent-valve 7. Allowance for right-angle cable connector 3. Purge-port 8. Earth (ground) bonding point 4. Electrical supply connector Page 8 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 15: Purge Gas Specification (Ext255H 24 V And Ext255Hi 24 V Only)
Outlet-flange DN16NW DN16NW DN16NW DN16NW Vent-port 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP Interstage-port DN25NW Purge-flange © Edwards Limited 2008. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 16 1 x 10 mbar 1 x 10 mbar 1 x 10 mbar 35 °C (1 Pa) (1 Pa) (1 Pa) (1 Pa) Page 10 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 17: Ext255H 24 V / Ext255Hi 24 V Technical Data
Table 2 - EXT255H 24 V / EXT255Hi 24 V technical data Parameter EXT255H 24V EXT255Hi 24V Notes Mass DN100ISO-K inlet flange 5.6 kg 6.0 kg DN100CF inlet flange 8.2 kg © Edwards Limited 2008. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 18 12 mbar (1200 Pa) 12 mbar (1200 Pa) 9 mbar (900 Pa) 9 mbar (900 Pa) 2.5 mbar (250 Pa) 2.5 mbar (250 Pa) Page 12 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 19 Above this pressure, rotational speed drops below nominal due to thermal limitation of pump and / or control module. ††† A larger backing pump may be required for maximum throughput. © Edwards Limited 2008. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 20 B722-20-880 Issue D This page has been intentionally left blank. Page 14 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 21: Installation
(15, 16). The accessories available for these EXT pumps are detailed in Section 7; the accessories are shown in Figure © Edwards Limited 2008. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 22: Typical Pumping System With An Ext70H Or Ext255H Pump
11. Mist filter 5. EXT pump 17. Vent-valve 12. Cooling-water connectors 6. Backing valve 18. Alternative position for vent-valve EXT255H only Page 16 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 23: Typical Pumping System With An Ext70Hi Or Ext255Hi Pump
13. EXDC drive module 6. Not used 21. Interstage-port 14. Air-cooler 7. Vacuum gauge 15. PRX10 purge restrictor EXT255Hi only 8. Flexible bellows © Edwards Limited 2008. All rights reserved. Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 24: Connect To The Vacuum System
EXT pump must be securely fixed to a firm support: see Section 3.3.3. Page 18 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 25: Base Mounting
If the pump has an ISO flange, use the Edwards trapped ‘O’ ring supplied with the pump and use a minimum of four claw clamps to connect the inlet-flange of the pump to the vacuum system. Ensure that each claw clamp is tightened to a torque of 10 Nm or more. -
Page 26: Backing Connection
EXT pump. It is recommended that you use an Edwards EM or RV backing-pump. The minimum size of the backing-pump required is given in Table 1 and 2. -
Page 27: Purge Gas Connection (Ext255H 24 V And Ext255Hi 24 V Only)
Do not disconnect or connect the EXDC drive module while the pump is rotating. If you do, you may damage the drive module. © Edwards Limited 2008. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 28: Earth (Ground) Connections
If you wish to use an alternative fan for air-cooling, ensure that the flow rate is above 70 m (40 cfm) Page 22 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 29: Water-Cooling
Make sure that there is a layer of thermal contact grease on the water-cooler before you refit it to the pump. © Edwards Limited 2008. All rights reserved. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 30 B722-20-880 Issue D This page has been intentionally left blank. Page 24 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 31: Operation
Section 1.3 and 2.3. 3. If water-cooling is in use, turn off the cooling-water supply. © Edwards Limited 2008. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 32: Shut-Down Due To Pump Under Or Over-Speed
100% of its normal full rotational speed (as operation above this level reduces bearing operational life). In the unlikely event of a failure of this control circuit the pump may overspeed. If you suspect that your pump may be running at overspeed you should switch it off and consult Edwards or your supplier. Bakeout CAUTION When baking the EXT pump to above 70 °C at the inlet-flange, the pump must be water-cooled to prevent... -
Page 33: Maintenance
We therefore recommend that you exchange your pump for a factory reconditioned replacement every 20,000 cycles, or 10 years of use, whichever occurs first. Alternatively, you can send your pump to an Edwards Service Centre for a major service (which will include rotor replacement). -
Page 34: Fault Finding
If the inside of the EXT pump is contaminated, it may not be possible to achieve the specified ultimate vacuum, or pump-down time may increase. In these circumstances, you should return the pump to an Edwards Service Centre, where the pump will be dismantled and cleaned. Use the procedure given in the forms at the end of this manual to return the pump. - Page 35 If so the rotor is out of balance. pitched noise ? Consult Edwards or your supplier. None of the above. Consult Edwards or your supplier. © Edwards Limited 2008. All rights reserved. Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 36 B722-20-880 Issue D This page has been intentionally left blank. Page 30 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 37: Storage And Disposal
Do not incinerate the pump. The pump contains phenolic and fluorosilicone materials which can decompose to very dangerous substances when heated to high temperatures. © Edwards Limited 2008. All rights reserved. Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 38 B722-20-880 Issue D This page has been intentionally left blank. Page 32 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 39: Service, Spares And Accessories
Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A and a world-wide network of distributors. The majority of these employ service engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required:... -
Page 40: Wcx Water-Cooler
EXT70H/Hi 24 V BX70 (110 V) B580-52-040 BX70 (240 V) B580-52-060 EXT255H/Hi 24 V BX250 (110 V) B580-52-041 BX250 (240 V) B580-52-061 Page 34 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 41: Fl20K Foreline Trap
7.4.5) to the purge-port on an EXT255H 24V or EXT255Hi 24V pump, in order to connect the purge restrictor to the pump. Purge-restrictor Flange size Item Number PRX10 NW10 B580-65-001 © Edwards Limited 2008. All rights reserved. Page 35 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 42: Vrx Vent-Restrictor
Tighten the flange sufficiently, to prevent the flange being loosened by vibration or stress transmitted from pipelines connected to the flange. Accessory Item Number EXT70H/ISO63 interstage-port accessory kit B580-69-001 Pin-spanner B279-29-029 27 mm ‘C’ spanner B279-29-028 Page 36 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 43: Installation Of Optional Accessories (And Spares): Ext255Hi Shown
5. Vent-port 10. Water-cooler (on opposite side of 15. Interstage-port the pump) 16. Bakeout band position 17. Inlet-screen (supplied) EXT255Hi pump only © Edwards Limited 2008. All rights reserved. Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 44 B722-20-880 Issue D This page has been intentionally left blank. Page 38 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.