Related Manuals for Edwards EXS Series
Summary of Contents for Edwards EXS Series
- Page 1 Dry screw vacuum pump EXS Series INSTRUCTION MANUAL edwardsvacuum.com A41870880_A Original instructions...
- Page 2 GXS/CXS Installation recommendations P60102675 Trademark credit Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess Hill, West Sussex RH15 9TW. Fomblin® is a registered trademark of Solvay Solexis SpA Krytox® is a registered trademark of DuPont (E.I. du Pont de Nemours and Company) Loctite®...
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Page 3: Table Of Contents
5.8 Electrical supply..........40 A41870880_A Page 3 07/2021 - ©Edwards Limited... - Page 4 11. Service..........73 11.1 Return the equipment or components for service ....73 A41870880_A Page 4 07/2021 - ©Edwards Limited...
- Page 5 13. Legal declarations........75 A41870880_A Page 5 07/2021 - ©Edwards Limited...
- Page 6 Figure 18: Remove cubicle fan..........65 A41870880_A Page 6 07/2021 - ©Edwards Limited...
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Page 7: Safety And Compliance
For the operation of this equipment “trained personnel” are: ▪ skilled workers with knowledge in the fields of mechanics, electrical engineering, pollution abatement and vacuum technology and ▪ personnel specially trained for the operation of vacuum pumps A41870880_A Page 7 07/2021 - ©Edwards Limited... -
Page 8: Safety Symbols
Warning - Risk of explosion There is a risk of explosion when you do the task. Warning - Read the manual Warning - Use protective equipment Use appropriate protective equipment for the task. A41870880_A Page 8 07/2021 - ©Edwards Limited... -
Page 9: Introduction
2.4 Interface overview Refer Front view on page 10 and Rear view on page 12 for interface overview. A41870880_A Page 9 07/2021 - ©Edwards Limited... -
Page 10: Front View
1. Lifting brackets (4 off) 2. Process inlet 2. Process inlet 3. Floor mounting hole (4 off) 3. Floor mounting hole (4 off) 4. Motor cranking hole (rotate clockwise 4. Motor cranking hole (rotate clockwise only) only) A41870880_A Page 10 07/2021 - ©Edwards Limited... -
Page 11: Figure 2 Front View - Exs450
1. Lifting brackets (4 off) 2. Process inlet 2. Process inlet 3. Motor cranking hole (rotate clockwise 3. Motor cranking hole (rotate clockwise 4. Floor mounting hole (4 off) 4. Floor mounting hole (4 off) only) only) A41870880_A Page 11 07/2021 - ©Edwards Limited... -
Page 12: Rear View
10. Castor (if fitted) 10. Castor (if fitted) 11. M40 cable gland 11. M40 cable gland 12. M20 cable gland 12. M20 cable gland 13. Secondary ground earth stud 13. Secondary ground earth stud A41870880_A Page 12 07/2021 - ©Edwards Limited... -
Page 13: Genius Instant Insights (If Fitted)
Some pumps have a GENIUS BOX mounted in the electrical cabinet. The GENIUS BOX allows the read-out of parameters of the pump on a user login protected web site https://iot.edwardsvacuum.com. The connected antenna is mounted outside the pump. For more detail, refer to Cloud User Handbook. A41870880_A Page 13 07/2021 - ©Edwards Limited... - Page 14 The modem can transmit signals that could interfere with this equipment. A41870880_A Page 14 07/2021 - ©Edwards Limited...
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Page 15: Technical Data
Installation drawings on page 29. ‡ Refer to Connect the dry pumping system to the vacuum/exhaust system on page 35 for information relating to the exhaust size and length for EXS dry pumping systems. A41870880_A Page 15 07/2021 - ©Edwards Limited... -
Page 16: Performance Data
The loading data in Table: Loading data is for dry pumping systems with optional levelling feet and castors. Table 4 Loading data Load at levelling foot position (kg) Pump EXS750 EXS450 A41870880_A Page 16 07/2021 - ©Edwards Limited... -
Page 17: Figure 5 Levelling Foot Loads - Exs750
A41870880_A - Technical data Figure 5 Levelling foot loads - EXS750 Figure 6 Levelling foot loads - EXS450 A41870880_A Page 17 07/2021 - ©Edwards Limited... -
Page 18: Purge Data
Units 2.5 - 6.9 bar gauge Purge gas supply pressure range 36 - 100 psi gauge Purge gas supply quality ISO 8573 - Class 2 Purge gas inlet connection 1/2 inch BSP female A41870880_A Page 18 07/2021 - ©Edwards Limited... - Page 19 0.01 12-142 MV-2 on † The dry pumping systems in a standard configuration must run with a seal purge. If the application requires the removal of a seal purge, consult our application specialist. A41870880_A Page 19 07/2021 - ©Edwards Limited...
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Page 20: Electrical Data
Must be fitted with a cross‑sectional Second protective earth (ground) con- area at least equal to phase conduc- ductor tor size Typical earth leakage† For 380 - 460 V systems: For EXS750 <10 A41870880_A Page 20 07/2021 - ©Edwards Limited... - Page 21 Table 10 Wire assembly according to VDE 0295 Wire size (mm²) Fine stranded wires VDE 0295 class 5 84 x 0.30 80 x 0.40 128 x 0.40 200 x 0.40 280 x 0.40 400 x 0.40 A41870880_A Page 21 07/2021 - ©Edwards Limited...
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Page 22: Cooling-Water Data
1 bar dP 15 SLM 15 SLM 12 SLM EXS750 1.2 bar dP 1.2 bar dP 1 bar dP 12 SLM 12 SLM 12 SLM 1 bar dP 1 bar dP 1 bar dP A41870880_A Page 22 07/2021 - ©Edwards Limited... -
Page 23: Dp Clean High Flow Purge/Solvent Flush (Option)
3/8 inch BSP female pipe connection Note: The DP clean solvent suction pipe is supplied with the pump but not fitted. Refer to the instruction given with the kit to activate the function. A41870880_A Page 23 07/2021 - ©Edwards Limited... -
Page 24: Figure 7 Dimension Drawing - Exs750
3. Cooler inlet 3/8" BSP female 3. Cooler inlet 3/8" BSP female 4. Cooler outlet 3/8" BSP female 4. Cooler outlet 3/8" BSP female 5. Gas inlet 1/2" BSP female 5. Gas inlet 1/2" BSP female A41870880_A Page 24 07/2021 - ©Edwards Limited... -
Page 25: Figure 8 Dimension Drawing - Exs450
4. Cooling water outlet 3/8" BSP female 4. Cooling water outlet 3/8" BSP female 5. Process outlet NW50 5. Process outlet NW50 6. Gas inlet G 1/2" BSP female 6. Gas inlet G 1/2" BSP female A41870880_A Page 25 07/2021 - ©Edwards Limited... -
Page 26: Transportation
Follow the procedure laid out in Storage on page 71 and then read form HS1 and fill out form HS2, which can be found at the back of this manual. A41870880_A Page 26 07/2021 - ©Edwards Limited... -
Page 27: Installation
Any unintended overflows or spills of oil or water must be removed immediately to avoid the risk of slips. ▪ Obey all national and local rules and safety regulations when installing the dry pumping system. Consult our safety manual publication number P40040100 A41870880_A Page 27 07/2021 - ©Edwards Limited... - Page 28 For the dry pumping system to perform to specification, appropriate facilities must be provided as detailed in this manual. Before installing, we recommend that you read the publication P60102675 Installation recommendations for the pumps. A41870880_A Page 28 07/2021 - ©Edwards Limited...
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Page 29: Installation Drawings
A41870880_A - Installation 5.1 Installation drawings Figure 9 Installation drawing - EXS750 A41870880_A Page 29 07/2021 - ©Edwards Limited... -
Page 30: Locate The Dry Pumping System
4. Mains power inlet 4. Mains power inlet 5.2 Locate the dry pumping system WARNING: Suitable lifting equipment must be used to move the dry pumping system. It is too heavy to lift by hand. A41870880_A Page 30 07/2021 - ©Edwards Limited... -
Page 31: Dry Pumping Systems With Optional Castors
It is your responsibility to carry out a risk assessment of their location and take appropriate measures to ensure that the dry pumping system is manoeuvred safely and in accordance with local and national manual handling guidelines. A41870880_A Page 31 07/2021 - ©Edwards Limited... -
Page 32: Levelling The Pump
Do not install the vacuum pump such that it will cause strain on the inlet or outlet flanges or any connecting pipework. Refer to Installation drawings on page 29. A41870880_A Page 32 07/2021 - ©Edwards Limited... -
Page 33: Lubrication
The fan capacity must match the fan capacity of the vacuum pump at a pressure head equal to the pressure drop caused by cooling air ducts. 5.3 Lubrication The dry pumping systems are given a charge of oil before leaving the factory. A41870880_A Page 33 07/2021 - ©Edwards Limited... -
Page 34: Electrical Connections
▪ Installation of emergency stop switch: Emergency stop switch must be fitted before operating the pump, use single core cable (AWG18) to connect 1X6:4 and 1X6:5 with NC contact of emergency stop switch. A41870880_A Page 34 07/2021 - ©Edwards Limited... -
Page 35: Connect The Dry Pumping System To The Vacuum/Exhaust System
0.2 barg. For all pumps, it is your responsibility to provide an exhaust system with sufficient conductance to ensure the exhaust pressure limit is not normally exceeded. A41870880_A Page 35 07/2021 - ©Edwards Limited... - Page 36 Retain the nuts, bolts, washers and blanking plate for future use. Retain the temporary cover for future use on non‑contaminated pumps only. The inlet O‑ring is supplied with the pump, it is fitted underneath the inlet flange cover. A41870880_A Page 36 07/2021 - ©Edwards Limited...
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Page 37: Connect The Purge Gas Supply
Ensure that the purge gas supply conforms to the requirements given in the Technical data on page 15. Failure to do so may cause the gas pipelines to become blocked or the dry pumping system to be damaged. A41870880_A Page 37 07/2021 - ©Edwards Limited... -
Page 38: Flammable/Pyrophoric Materials
You may need to consider adding appropriate measures to monitor the flow of purge gas (for example, external sensors). For further information refer to publication number P40040100, applications note 'Pumping Flammable Gases' P4100090 or contact us. A41870880_A Page 38 07/2021 - ©Edwards Limited... -
Page 39: Gas Purges
Note: For further information on the leak testing, contact us or the supplier for advice. A41870880_A Page 39 07/2021 - ©Edwards Limited... -
Page 40: Electrical Supply
WARNING: Risk of electric shock. Isolate the electrical supply before disconnecting the electrical supply cable from the dry pumping system. A41870880_A Page 40 07/2021 - ©Edwards Limited... -
Page 41: Mains Supply Cable Connection
Use the following instructions to make the electrical supply cable: Refer to Electrical data on page 20 for cable sizes and type to determine the most appropriate cable for the dry pumping system. A41870880_A Page 41 07/2021 - ©Edwards Limited... -
Page 42: Emc Filter
The drive has a built-in EMC filter. The EMC filter switch is in ON position by default. Move the screw position to switch ON (enable) and OFF (disable). Figure 14 EMC filter switch location 1. Switch ON 1. Switch ON 2. Switch OFF 2. Switch OFF A41870880_A Page 42 07/2021 - ©Edwards Limited... -
Page 43: Figure 15 Symmetric Grounding
Type of grounding Diagram Grounded at the corner of the delta con- nection Grounded at the middle of the side Single-phase, grounded at the end point Three-phase variable transformer without solidly grounded neutral A41870880_A Page 43 07/2021 - ©Edwards Limited... -
Page 44: Connect To The Emergency Stop Circuit
Ensure that both sets of plastic plugs are removed before connecting the cooling water hoses. Refer to Figure: Remove the plastic plugs from the water fittings. Retain the plastic plugs for future use. A41870880_A Page 44 07/2021 - ©Edwards Limited... -
Page 45: Install The Accessories
Turn off the water supply while completing the remainder of the installation procedures. 5.11 Install the accessories WARNING: When fitting accessories inside the enclosure, ensure that the pump is switched off. Lockout and tagout the electrical supply before removing the enclosure panels. A41870880_A Page 45 07/2021 - ©Edwards Limited... -
Page 46: Commission The Dry Pumping System
After the dry pumping system is commissioned: ▪ To continue to operate the dry pumping system, refer to Start up on page 50. ▪ Otherwise, shut down the dry pumping system. Refer to Manual shut down page 51. A41870880_A Page 46 07/2021 - ©Edwards Limited... -
Page 47: Install Additional Safety Equipment
If air is not compatible with your process then nitrogen or another inert gas may be used. It is your responsibility to assess whether the DP clean purge gas is compatible with the process. A41870880_A Page 47 07/2021 - ©Edwards Limited... - Page 48 When performing a solvent flush, fit a solvent suction pipe only when ready to perform the DP clean procedure. For pump‑only systems, refer to Figure: DP clean assembly for the pump only systems. A41870880_A Page 48 07/2021 - ©Edwards Limited...
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Page 49: Connecting The Dry Pumping System For Serial Communications
8. Pneumatic valve electrical connection 8. Pneumatic valve electrical connection 5.16 Connecting the dry pumping system for serial communications 5.16.1 MODBUS MODBUS-RTU communication is available (AC D+ D-). Refer to Figure: Service diagram for more information. A41870880_A Page 49 07/2021 - ©Edwards Limited... -
Page 50: Operation
Start warm-up and on-process sequences are listed in Table: Start, warm-up and on- process sequences. Table 15 Start, warm-up and on-process sequences Sequence Description Shaft Seal Purge (SSP) valve is opened. Start pump Pump runs. A41870880_A Page 50 07/2021 - ©Edwards Limited... -
Page 51: Dry Pump Speed Control
EXS pump for at least 40 minutes with all purge on. Once the pump has stopped, seal the inlet and exhaust to prevent migration of liquid/condensates back into the pump mechanism. A41870880_A Page 51 07/2021 - ©Edwards Limited... -
Page 52: Automatic Shut Down
Warning condition triggered Alarm condition triggered DP TEMP temperature EXS750 120 °C 130 °C EXS450 120 °C 130 °C Refer to Automatic shut down on page 52 for information about alarms and automatic shutdown conditions. A41870880_A Page 52 07/2021 - ©Edwards Limited... -
Page 53: Emergency Stop
The high flow purge and the solvent flush kit is available to clean the pump mechanism on applications where large quantities of dust and sticky deposits are encountered. The cleaning process is carried out without the need to remove the pump enclosure. A41870880_A Page 53 07/2021 - ©Edwards Limited... -
Page 54: High Flow Purge And Solvent Flush
The DP clean high flow purge and solvent flush procedures can be run as often as required. 6.7.1 High flow purge and solvent flush Operation instruction of high flow purge and solvent flush is provided together with the kit, contact us. A41870880_A Page 54 07/2021 - ©Edwards Limited... -
Page 55: Maintenance
Particular caution should be exercised when working with fluorinated materials which may have been exposed to temperatures greater than 260 °C. Refer to our safety datasheets for detailed information. A41870880_A Page 55 07/2021 - ©Edwards Limited... -
Page 56: Preventive Maintenance Schedule
15. Contact us for more information. 7.2 Preventive maintenance schedule Table 20 Preventive maintenance schedule Action Frequency Check the oil level and top-up if required 1 week Check water hoses 6 months or 4000 operating hours A41870880_A Page 56 07/2021 - ©Edwards Limited... -
Page 57: Relocate The Dry Pumping System For Maintenance
To remove the dry pumping system from its operating location and move it to another location to carry out maintenance, use the following procedure: Purge the dry pumping system and shutdown as described in Operation on page 50 and allow the dry pumping system to cool down. A41870880_A Page 57 07/2021 - ©Edwards Limited... -
Page 58: Draining The Cooling Water
The following maintenance can be carried out on the dry pumping system between the overhauls. Contact us for the details and training: ▪ Check the oil level. Refer to Checking the oil levels and refilling on page 59. A41870880_A Page 58 07/2021 - ©Edwards Limited... -
Page 59: Checking The Oil Levels And Refilling
15 for the specification. Keep adding oil until the oil level is in line with the MAX indicator. Refit the oil fill plug. Refit all dry pumping system side panels. A41870880_A Page 59 07/2021 - ©Edwards Limited... -
Page 60: Inspect The Connections, Pipelines, Cables And Fittings
Do not attempt to overhaul the pump without our training and tooling. We provide a full range of overhaul options worldwide. We can provide training, tooling and spares to enable the users to overhaul their pumping systems. Contact us for more information. A41870880_A Page 60 07/2021 - ©Edwards Limited... -
Page 61: Fault Finding
Install the pump at a suitable place or ensure a sufficient flow of cooling air. Cause Pump is operating in the wrong pressure range. Remedy Check the pressure levels within the system. Cause Gas temperature is too high. Remedy Check system. A41870880_A Page 61 07/2021 - ©Edwards Limited... - Page 62 Pump is too loud Cause Motor stator defective. Remedy Contact us. Cause Motor rotor defective. Remedy Contact us. Cause Distances between housing and rotors is too small due to contamination. Remedy Clean pumping chamber. A41870880_A Page 62 07/2021 - ©Edwards Limited...
- Page 63 Place the pump correctly. Cause Pump has a gas leak towards the outside. Remedy Run a leak search and pinpoint leaks. If the leak is not at the oil‐fill plugs, return the pump to the service. A41870880_A Page 63 07/2021 - ©Edwards Limited...
- Page 64 Remedy Contact us. Cause Motor rotor defective. Remedy Contact us. Cause Vacuum pump system has a gas leak. Remedy Detect leak and seal it. Cause Rotor gap is too great. Remedy Contact us. A41870880_A Page 64 07/2021 - ©Edwards Limited...
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Page 65: Inverter Warnings And Alarms
Uv2 - Control power undervoltage on page 69 Uv3 - Soft charge answerback fault on page 69 EF3 - External fault(terminal S3) on page 69 dWFL - High temperature warning on page 69 A41870880_A Page 65 07/2021 - ©Edwards Limited... - Page 66 Contact us. Cause Overheating caused damage to the motor or the motor insulation is not satisfactory. Remedy Measure the motor insulation resistance and replace the motor if there is electrical conduction or unserviceable insulation. A41870880_A Page 66 07/2021 - ©Edwards Limited...
- Page 67 Cause The screws on the drive output terminals are loose. Remedy Tighten the terminal screws to the correct tightening torque. Cause The output transistor in the drive is damaged. Remedy Contact us. A41870880_A Page 67 07/2021 - ©Edwards Limited...
- Page 68 The drive input power voltage is changing too much. Remedy Examine the input power for problems. Make the drive input power stable. If the input power supply is good, examine the magnetic contactor on the main circuit side for problems. A41870880_A Page 68 07/2021 - ©Edwards Limited...
- Page 69 An external baseblock command is entered through MFDI terminal S1 to S7 and the drive output stopped as shown by an external baseblock command. Remedy Examine the external sequence and timing of the baseblock command input. A41870880_A Page 69 07/2021 - ©Edwards Limited...
- Page 70 The pump has been warmed up completely, the inlet valve must be opened manually. Fault dWA2 ‐ High temperature Cause The stator reaches 120 °C which is very hot for stator. Remedy Check cooling water. A41870880_A Page 70 07/2021 - ©Edwards Limited...
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Page 71: Storage
If the pump is to be stored for longer than six weeks, it must be manually rotated every 14 days or less. Contact us for details. When required for use, prepare and install the dry pumping system as described in Installation on page 27 of this manual. A41870880_A Page 71 07/2021 - ©Edwards Limited... -
Page 72: Disposal
Take particular care with the following: ▪ Fluoroelastomers which may have decomposed as the result of being subjected to high temperatures. ▪ Components which have been contaminated with dangerous process substances. ▪ Lithium battery. A41870880_A Page 72 07/2021 - ©Edwards Limited... -
Page 73: Service
HS1, fill in the electronic HS2 form, print it, sign it, and return the signed copy to us. NOTICE: If we do not receive a completed HS2 form, your equipment cannot be serviced. A41870880_A Page 73 07/2021 - ©Edwards Limited... - Page 74 H11312025 Cubicle vent filter kit G1950851774 Blow off valve service kit 750 3490790545 Blow off valve service kit 450 3490790546 For information about all other spares, refer to the customer parts manual M58840845. A41870880_A Page 74 07/2021 - ©Edwards Limited...
- Page 75 This page has been intentionally left blank.
- Page 76 EU Declaration of Conformity Edwards Ltd Documentation Officer Innovation Drive Jana Sigmunda 300 Burgess Hill Lutín , 78349 West Sussex Czech Republic RH15 9TW T: +42(0) 580 582 728 documentation@edwardsvacuum.com The product specified and listed below EXS750 HV MD A418709XX...
- Page 77 You must retain the signed legal declaration for future reference This declaration becomes invalid if modifications are made to the product without prior agreement. Signed for and on behalf of Edwards Ltd Andries De Bock – Vice President Engineering Terry Hong– General Manager...
- Page 78 ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION EMC (EU, UK): Class A Industrial equipment Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to radio reception in such environments. RoHS (EU, UK): Material Exemption Information This product is compliant with the following Exemptions Annex III: 6(c) Copper alloy containing up to 4% lead by weight...
- Page 79 材料成分声明 China Material Content Declaration 有害物质 Hazardous Substances 部件名称 六价铬 多溴联苯 多溴二苯醚 Part name 铅 汞 镉 Hexavalent Polybrominated Polybrominated Lead Mercury Cadmium Chromium biphenyls diphenyl ethers (Pb) (Hg) (Cd) (Cr VI) (PBB) (PBDE) 电机（泵和机械增压泵） Motors (pump and mechanical booster) 泵和增压泵...
- Page 80 edwardsvacuum.com...