Advanced Energy ®
• You can configure some ICP units to use either the Gamma or the L match
topology. See
Topology" on page 5 -
If you purchased a unit with 2 MHz frequency, you can change additional fixed
capacitors. See
Only)" on page
Selecting the Correct Tap Setting for the Tune Coil
The V arioMatch match network is equipped with a tune coil. This design enables the
taps to be effective for large RF currents. The transformation step is determined
mostly by the tune
compensate and correct the phase for optimum matching quality, a load capacitor and
coil are also used. Both tuning elements interact somewhat, and are used together to
obtain the best possible match.
Depending on your unit, you may be able to set taps to match your load (see
Tune Coil Taps" on page
your unit's internal coil specifications.
SETTING TUNE COIL TAPS
The number of turns and available taps enables the V arioMatch match network to be
flexible enough to match nearly all load systems. The number of turns and available
taps varies based on the model you purchased (see
page
3-1).
The following guidelines will help to determine the optimum component values for a
particular load system:
• The match network should be configured to allow matching with the tune
capacitor set between 20 and 80% of its capacitance range to avoid extreme RF
stress. Always try to achieve a tuning position with both capacitors in the range of
20 to 80%.
• Increase the number of active coils if the tune capacitor is at the upper end of its
tuning range (greater than 80% ).
• Decrease the number of active coils if the tune capacitor is at the lower end of its
tuning range (less than 20% ).
• Large and highly capacitive loads require, for example, 4 to 6 turns on a coil with
14 turns.
• Medium capacity loads require, for example 6 to 10 turns on a coil with 14 turns.
•
Small
area loads (for example, etching diodes), for example 1 0 to 14 turns on a
coil with 14 turns.
5-18
"Changing the Configuration Between the
27.
"Changing the Fixed Capacitor Setting (Model 0415 2 MHz Units
5-36.
coil,
represented by the tune capacitor in series with the coil. To
5-18). See
"Physical Specifications Table" on page 3-7
Installation,
Setup, and Operation
L
match and the Gamma
"Setting
"Physical Specifications" on
57020080-00D
for