Advanced Energy
®
Figure 5-14.
8. Reattach the top cover:
a. Plug in the fan
b. Attach the top cover using the twelve screws you removed in step 2.
9. Reconnect PLASMA/LOAD, RF-GENERATOR, and AC MAINS as
described in
5-26
Tap position for large loads
"Installing the VarioMatch Match Network" on page
Installation,
Setup, and Operation
---
RFGENERATOR
connection
- - - Load
coil,
tap
position
C for large loads
5-4.
57020080-00D