Vm 1000 Series; Table 3-4. Electrical Specifications For Vm 1000 Series - Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual

Advanced Energy ®
Electrical specifications for VM 700 series (Continued )
Table 3-3.
Description
Maximum RF load current
Maximum RF load voltage
Input impedance to generator
Maximum load DC self bias
voltage
DC selfbias monitor voltage
Runtime from start point to end
point
Tuning range
VM1 000 Series
Table 3-2 describes the VM 1000 series electrical specifications.
Electrical specifications for VM 1000 series
Table 3-4.
Description
Frequency
AC line voltage
AC line frequency
AC line current (maximum)
Maximum transfer power
Maximum reactive power
Maximum RF load current
Maximum RF load voltage
Input impedance to generator
3-12
Specification
15 A
v
4000
p eak
5 0 Q
voe voe
o to 4000
0 V to 1 0 V
3 seconds
To reach appropriate resistance and reactance values, you
may need to change load and series coil settings. See
Up the Match for Your Load" on page
For details on tuning ranges possible for your unit, see
Chapter 7, "VarioMatch Match Network Tuning
Specification
13.56 MHz
100 V AC to 240 VAC, single �
50 Hz to 60 Hz
LO A to 0.7 A
1000W
Varies by V arioMatch product part number:
PN 69000023, 69000115: 100,000 W
All other PNs: 88,000 W
Varies by part number:
PN 69000023, 69000115: 25 A
All other PNs: 22 A
v
4000
p eak
5 0 Q
Specifications
"Set
5-16.
Ranges".
57020080-00D