Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual page 69

& DANGER:
RISK OF DEATH OR BODILY INJURY. Disconnect and lockout/tagout all
sources of input power before working on this unit or anything
connected to it.
&
W ARNING:
Leaving on the RF power after turning off the input power to the match
network may damage the unit.
AE recommends that you operate the unit in automatic mode for first-time operation.
To Operate the VarioMatch match network:
1. Turn on the system by connecting AC
2. Turn on the RF generator and adjust it to
A substantial amount of RF power is necessary for proper operation of the
automatic detection circuitry and the control circuitry within the VarioMatch
match network.
Allow 5 to 10 seconds for the unit to tune automatically.
If you are testing the unit with a dummy load, use the minimum power to start
(the minimum amount of power to ensure operation is 25 W.)
3. Check to see that you have a correct and appropriate response from your load.
For example, if you are using a plasma chamber, look for the following:
a. Is the plasma lit? If not, you may have a faulty connector or too little input
power. Check your match process and check that the full system is properly
designed and installed.
b. Is the plasma stable (that is, is there a constant glow)? If not, switch to
tune mode and experiment to see if you can get it stable. Once it is stable in
manual mode, look at the positions of the capacitors. Minimally, the capacitors
should be in the tuning range of 20 to 80%; ideally between 30 to 80%. If the
capacitors are outside this range, change the coil tappings (see
Match for Your Load" on page
c. Did the capacitors begin to move? If not, check if AC
connected, then switch to manual tune mode. If the capacitors move in manual
tune mode but not in automatic tune mode, verify that you have RF coming into
the match network from the generator. If not, the matching motors won't move
in automatic tune mode. If the capacitors still do not move, contact AE Global
57020080-00D
MAINS.
AE VarioMatch Match Network, VM 1000/1500 Platform
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Installation, Setup, and Operation
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