Specifications - Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual

Advanced Energy ®
Services (see
d. Did reflected power decrease to within specifications? If not, ensure the
capacitors are within the tuning range of 30 to 80%.
e. Did the motors stop moving? If the motors do not stop moving, ensure the
capacitors are within the tuning range of 30 to 80%.
4. Vary the chamber conditions according to your process requirements, and verify
that the V arioMatch match network can cover the required load impedance range.
NORMAL O PERATIO N
The VarioMatch Match Network operates in the following modes:
•
"Automatic Tune Mode" on page 5-14
•
"Manual Tune Mode" on page 5-15
When connected to the AC power
immediately tum on in the automatic tune mode. To manually tune the capacitors, use
a match controller or an AE Cesar RF generator (see
Generator" on page
To allow easy incorporation of the V arioMatch match network into most any load
system, the unit does not use an on/off switch. To turn on the unit, connect the
VarioMatch match network to the AC
appropriate for your installation (100 V to 240 V at 50 Hz to 60 Hz).
Also read the information in
Automatic Tune Mode
AE recommends using automatic tune mode for normal operation. In automatic tune
mode, the VarioMatch match network controls the impedance functions internally.
Automatic tune mode requires no user interface. Whenever the V arioMatch
network detects RF power, the
positions and minimizes the reflected power.
A minimum RF
properly and accurately and to automatically tune the network for minimum reflected
power. This minimum input power is approximately 1
power (see Chapter 3,
The magnitude (amplitude) detector checks the RF voltage and RF current present on
the 50 Q line between RF generator and V arioMatch match network, and then
compares this with 50 Q. The magnitude detector drives the load variable capacitor.
5- 14
MAINS,
MAINS
Chapter 6, ''Troubleshooting and Global
5-16).
"Importance of Igniting Plasma" on page
unit automatically moves the capacitors to optimum
input power is necessary to allow the electronic circuit to work

"Specifications").

Install ation, Setup, and Operation
Services").
the VarioMatch match network will
"Interaction With a Cesar
connector. Use the AC
of the maximum transfer
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MAINS
cable
5-16.
match
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